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Data Sheet
3-Axis Subsystems for Laser Beam Deflection FOCUSSHIFTER
03/2013
FOCUSSHIFTER
FOCUSSHIFTER
General Specifications
Power Supply
Voltage
±15 to ±18 V
Ambient Temperature
+15 to +35 °C
Current
7.5 A, RMS, max. 10 A
Storage Temperature
-10 to +60 °C
Ripple/ Noise
Max.200 mVpp, @20MHz
bandwidth
Humidity
≤
80 % non-condensing
Interface
Signals
Analog
±5 V, ±10 V
Digital
XY2-100 Protocol
Specifications for Linear Translator Modules
Nd:YAG
Nd:YAG doubled
Nd:YAG Tripled
CO
2
CO
2
Input Aperture
5.0 mm
5.0 mm
5.0 mm
10.0 mm
10.0 mm
Beam Expansion Factor
3.0
3.0
2.0
1.5
2.0
Focus Range in Z-Direction
+/- 15.0 mm
1)
+/- 10.0 mm
1)
+/- 25.0 mm
1)
+/- 10.0 mm
2)
+/- 15.0 mm
2)
Weight
approx. 7.5 kg
approx. 7.5 kg
approx. 7.5 kg
approx. 7.5 kg
approx. 7.5 kg
1) with F-Theta Lens f = 160 mm, 2) with F-Theta Lens f = 250 mm
Specifications for associated Deflection Units
SS-IIE-15
SS III-15
SUPERSCAN IIE-20
Mechanical Data:
Input Aperture (mm)
15.0
15.0 mm
20.0 mm
Beam Displacement (mm)
18.05
4)
/18.55
18.1
4)
/18.6
26.28
4)
/25.63
Weight (without Lens) (kg)
approx. 3.8
approx. 2.9 kg
approx. 3.3 kg
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
±0.393 rad
Repeatability (RMS)
2
µ
rad
2
µ
rad
2
µ
rad
Max. Gaindrift
1)
(ppm/K)
< 15
< 15
< 15
Max. Offsetdrift
1) (
µ
rad/K)
< 10
< 10
< 10
Long-term Drift
1,2)
µ
rad
< 150
< 150
Long-term Drift with water
tempering [W] [W2]
1,2,3)
< 100
< 60
3)
< 100
Mirrors
QU
BE
QU
SI
BE
QU
SI
BE
Tunings
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) ms
≤
0.36
≤
0.24
≤
0.36
≤
0.31
≤
0.30
≤
0.27
≤
0.23
≤
0.20
≤
0.58
≤
0.61
≤
0.40
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water 3) with water tempering at 4.5 l/min and 22˚ C water
temperature after 0.5 h warm up. 4) Specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG
Nd:YAG doubled
Nd:YAG Tripled
CO
2
Wavelength
1,064 nm
532 nm
355 nm
10,600 nm
Coating
AR Coating
AR Coating
AR Coating
AR Coating
Max. Laser Power, cw (W/cm
2
)
1000
500
100
700
Specifications for F-Theta Lenses
Nd:YAG
Nd:YAG doubled
Nd:YAG Tripled
CO
2
Wavelength
1,064 nm
532 nm
355 nm
10,600 nm
Lens
f = 160 mm
f = 160 mm
f = 160 mm
f = 250 mm
Typical Field Size
95 mm x 95 mm
95 mm x 95 mm
95 mm x 95 mm
150 mm x 150 mm
Spotdiameter 1/e
²
, TEM00
Aperture 15 mm / 20 mm
30
µ
m / -
15
µ
m / -
10
µ
m / -
270
µ
m / 220
µ
m
Working Distance
209 mm +/- focus range
208 mm +/- focus range
248 mm +/- focus range
193 mm +/- focus range