RAYLASE AXIALSCAN, Manual

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Data Sheet 3-Axis Subsystems for Laser Beam Deflection FOCUSSHIFTER
03/2013 FOCUSSHIFTER
FOCUSSHIFTER
General Specifications
Power Supply
Voltage ±15 to ±18 V Ambient Temperature +15 to +35 °C
Current 7.5 A, RMS, max. 10 A Storage Temperature -10 to +60 °C
Ripple/ Noise
Max.200 mVpp, @20MHz
bandwidth
Humidity ≤ 80 % non-condensing
Interface
Signals
Analog ±5 V, ±10 V
Digital XY2-100 Protocol
Specifications for Linear Translator Modules
Nd:YAG Nd:YAG doubled
Nd:YAG Tripled
CO
2
CO
2
Input Aperture 5.0 mm 5.0 mm
5.0 mm
10.0 mm 10.0 mm
Beam Expansion Factor 3.0 3.0
2.0
1.5 2.0
Focus Range in Z-Direction +/- 15.0 mm
1)
+/- 10.0 mm
1) +/- 25.0 mm
1)
+/- 10.0 mm
2)
+/- 15.0 mm
2)
Weight approx. 7.5 kg approx. 7.5 kg
approx. 7.5 kg
approx. 7.5 kg approx. 7.5 kg
1) with F-Theta Lens f = 160 mm, 2) with F-Theta Lens f = 250 mm
Specifications for associated Deflection Units
SS-IIE-15 SS III-15 SUPERSCAN IIE-20
Mechanical Data:
Input Aperture (mm) 15.0 15.0 mm 20.0 mm
Beam Displacement (mm) 18.05
4)
/18.55 18.1
4)
/18.6 26.28
4)
/25.63
Weight (without Lens) (kg) approx. 3.8 approx. 2.9 kg approx. 3.3 kg
Dynamic Data:
Typical Deflection ±0.393 rad ±0.393 rad ±0.393 rad
Repeatability (RMS) 2 µ rad 2 µ rad 2 µ rad
Max. Gaindrift
1)
(ppm/K) < 15 < 15 < 15
Max. Offsetdrift
1) (
µ rad/K) < 10 < 10 < 10
Long-term Drift
1,2)
µ rad < 150 < 150
Long-term Drift with water
tempering [W] [W2]
1,2,3)
< 100 < 60
3)
< 100
Mirrors QU BE QU SI BE QU SI BE
Tunings LN RA LN RA LN RA
Acceleration Time (10-90%) ms ≤ 0.36 ≤ 0.24 ≤ 0.36 ≤ 0.31 ≤ 0.30 ≤ 0.27 ≤ 0.23 ≤ 0.20 ≤ 0.58 ≤ 0.61 ≤ 0.40
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water 3) with water tempering at 4.5 l/min and 22˚ C water
temperature after 0.5 h warm up. 4) Specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG Nd:YAG doubled
Nd:YAG Tripled
CO
2
Wavelength 1,064 nm 532 nm
355 nm
10,600 nm
Coating AR Coating AR Coating AR Coating AR Coating
Max. Laser Power, cw (W/cm
2
) 1000 500 100 700
Specifications for F-Theta Lenses
Nd:YAG Nd:YAG doubled
Nd:YAG Tripled
CO
2
Wavelength 1,064 nm 532 nm
355 nm
10,600 nm
Lens f = 160 mm f = 160 mm f = 160 mm f = 250 mm
Typical Field Size 95 mm x 95 mm 95 mm x 95 mm 95 mm x 95 mm 150 mm x 150 mm
Spotdiameter 1/e ² , TEM00
Aperture 15 mm / 20 mm
30
µ m / -
15
µ m / -
10
µ m / -
270
µ m / 220 µ m
Working Distance 209 mm +/- focus range 208 mm +/- focus range
248 mm +/- focus range
193 mm +/- focus range