RAYLASE AXIALSCAN, Manual

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Data Sheet 3-Axis Laser Beam Subsystems
03/2013
AXIALSCAN-30-Y [300HP]
General Specifications
Power Supply
Voltage ±15 V to ±18 V
Interface Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital XY2-100 Protocol
Ripple/Noise Max. 200 mVpp, @20MHz
bandwidth Max. Input Aperture 20 mm
Field Size
300x300 mm ² to 1200x1200 mm ²
Beam optimized
Ambient Temperature +15 °C to +35 °C
Lens Positions
Storage Temperature -10 °C to +60 °C
Humidity ≤ 80 % non condensing
Weight approx. 16.5 kg
Specifications for Linear-Translator-Modules
Field Size 300 x 300 mm ² 500 x 500 mm ² 800 x 800 mm ² 1000 x 1000 mm ² 1200 x 1200 mm ²
Mechanical Data:
Distance D
1)
132 mm 104 mm 87 mm 81 mm 77 mm
Working Distance
2)
332 mm 579 mm 950 mm 1198 mm 1446 mm
Dynamic Data:
Spot Diameter 1/e
3)
27 µ m 44 µ m 70 µ m 87 µ m 104 µ m
Resolution < 10 µ m < 17 µ m < 27 µ m < 34 µ m < 41 µ m
1) From the font edge of the linear translator to the inner side of the housing plate, 2) From the bottom edge of the deflection unit to the processing field; the
distance will vary with laser divergence and lens tolerance. 3) Input Beam Quality: M
2
= 1.0
Specifications for associated Deflection Units
SUPERSCAN-IIE-30 SUPERSCAN-III-30
Mechanical Data:
Beam Displacement 35.38
4)
/35.82 mm 35.4
4)
/36.0 mm
Dynamic Data:
Typical Deflection ±0.393 rad ±0.393 rad
Repeatability (RMS) 2 µ rad 2 µ rad
Max. Gaindrift
1)
15 ppm/K 15 ppm/K
Max. Offsetdrift
1)
10 µ rad/K 10 µ rad/K
Long-term Drift
1,2)
< 150 µ rad
Long term Drift with water tempering
[W] [W2]
1,2,3)
< 100 µ rad < 60 µ rad
3)
Mirrors QU SI SC BE QU SI SC BE
Tunings LN RA LN RA LN RA LN RA
Acceleration Time (10-90%) (ms) 0.90 0.84 0.52 0.50 0.90 0.77 0.85 0.76 0.60 0.52 0.56 0.49
1)Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG
Wavelength 1,064 nm
Coating AR Coating
Max. Laser Power, cw, W/cm
2
1000 W/cm
2
Beam
Moving
Lens
Focusing
Lens