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Data Sheet
3-Axis Subsystems for Laser Beam Deflection AXIALSCAN
03/2013
AXIALSCAN-30-C [300BO]
General Specifications
Power Supply
Voltage
±15 to ±18 V
Interface
Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
300x300 to 750x750 mm
²
beam optimized
Ambient Temperature
+15 to +35 °C
Lens Positions
Storage Temperature
-10 to +60 °C
Humidity
≤
80 % non-condensing
Weight
approx. 13.5 kg
Specifications for Linear Translator Modules
Field size
300 x 300 mm
²
400 x 400 mm
²
500 x 500 mm
²
600 x 600 mm
²
750 x 750 mm
²
Mechanical Data:
Distance D
1)
206.0 mm
187.0 mm
175.0 mm
167.0 mm
159.0 mm
Working Distance
2)
325.0 mm
448.0 mm
572.0 mm
696.0 mm
882.0 mm
Dynamic Data:
Spot Diameter 1/e
3)
200.0
µ
m
265.0
µ
m
330.0
µ
m
390.0
µ
m
490.0
µ
m
Resolution
< 10
µ
m
< 13
µ
m
< 16
µ
m
< 19
µ
m
< 23
µ
m
Acceleration Time
≤
3 ms
≤
3 ms
≤
3 ms
≤
3 ms
≤
3 ms
1) From the front edge of the linear translator to the inner side of housing plate, 2) from the bottom edge of deflection unit to the processing field; the distance
will vary with laser divergence and lens tolerance. 3) Input beam quality: M
2
= 1,0
Specifications for associated Deflection Units
TURBOSCAN-30
SUPERSCAN-IIE-30
SUPERSCAN-III-30
Mechanical Data:
Beam Displacement
35.7mm
35.38
4)
/35.82 mm
35.4
4)
/36.0 mm
Dynamic Data:
Typical Deflection
±0.393 rad
±0.393 rad
±0.393 rad
Repeatability (RMS)
2
µ
rad
2
µ
rad
2
µ
rad
Max. Gaindrift
1)
70 ppm/K
15 ppm/K
15 ppm/K
Max. Offsetdrift
1)
35
µ
rad/K
10
µ
rad/K
10
µ
rad/K
Long-term Drift
1,2)
< 400
µ
rad
< 150
µ
rad
Long term Drift with water
tempering
[W] [W2]
1,2;3)
< 100
µ
rad
< 60
µ
rad
3)
Mirrors
QU
SI
SC
BE
QU
SI
SC
BE
Tunings
LN
RA
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) (ms)
0.90
0.90
0.84
0.52
0.50
0.90
0.77
0.85 0.76
0.60 0.52
0.56 0.49
1) Drift per axis, 2) after warming-up, variations of ambient temperature < 1K, variations of cooling water <1K 3) with water tempering at 4.5 l/min and 22˚C
temperature after 0.5 h warm-up 4) Specification for Qu fused Silica mirrors
Specifications for Optics
CO
2
Wavelength
10,600 nm
Coating
AR Coating
Max. Laser Power, cw
700 W/cm
2