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Data Sheet
3-Axis Subsystems for Laser Beam Deflection FOCUSSHIFTER
03/2013
FOCUSSHIFTER
AXIALSCAN-30-Y [260]
General Specifications
Power Supply
Voltage
±15 V to ±18 V
Interface Signals
Analog
±5 V, ±10 V
Current
7.5 A, RMS, max. 10 A
Digital
XY2-100 Protocol
Ripple/Noise
Max. 200 mVpp, @20MHz
bandwidth
Max. Input Aperture
15 mm
Field Size
260x260 mm
²
to 600x600 mm
²
Beam optimized
Ambient Temperature
+15 °C to +35 °C
Lens Positions
Storage Temperature
-10 °C to +60 °C
Humidity
≤
80 % non condensing
Weight
approx. 16.5 kg
Specifications for Linear-Translator-Modules
Field Size
260 x 260 mm
²
300 x 300 mm
²
400 x 400 mm
²
500 x 500 mm
²
600 x 600 mm
²
Mechanical Data:
Distance D
1)
135 mm
128 mm
116 mm
109 mm
104 mm
Working Distance
2)
282 mm
332 mm
455 mm
579 mm
703 mm
Dynamic Data:
Spot Diameter 1/e
3)
22.9
µ
m
26.15
µ
m
34.27
µ
m
42.39
µ
m
50.5
µ
m
Resolution
< 8
µ
m
< 10
µ
m
< 13
µ
m
< 16
µ
m
< 19
µ
m
1) From the font edge of the linear translator to the inner side of the housing plate, 2) From the bottom edge of the deflection unit to the processing field; the
distance will vary with laser divergence and lens tolerance. 3) Input Beam Quality: M
2
= 1.0
Specifications Deflection Unit
TS-II-30
SS-III-30
Mechanical Data:
Beam Displacement
35.7 mm
35.4
4)
/36.0
Dynamic Data:
Typical Deflection
35.7 mm
±0.393 rad
Repeatability (RMS)
2
µ
rad
< 2
µ
rad
Max. Gaindrift
1)
< 70 ppm/K
< 15 ppm/K
Max. Offsetdrift
1)
< 35
µ
rad/K
< 10
µ
rad/K
Long-term Drift
1,2)
< 400
µ
rad
Long-term Drift with water tempering
[W] [W2]
1,2,3)
< 60
µ
rad
3)
Mirrors
QU
SI
SC
BE
Tunings
LN
RA
LN
RA
LN
RA
LN
RA
Acceleration Time (10-90%) (ms)
≤
0.90
≤
0.90
≤
0.77
≤
0.85
≤
0.76
≤
0.60
≤
0.52
≤
0.56
≤
0.49
1)
Drift per Axis, 2) After warming-up, variations of ambient temperature < 1K, variations of cooling water < 1K 3) with water tempering at 4.5 l/min and
22˚C water temperature after 0.5 h warm up 4) Specification for QU fused Silica mirrors
Specifications for Optics
Nd:YAG
Wavelength
1,064 nm
Coating
AR Coating
Max. Laser Power, cw, W/cm
2
1000 W/cm
2
Beam
Moving
Lens
Focusing
Lens