Pfeiffer Vacuum HiCube 300 H Pro, Operating Instructions Manual

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Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 7
1.3.1 Instructions in the text 7
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety precautions 14
2.4 Limits of use of the product 15
2.5 Proper use 15
2.6 Foreseeable improper use 15
3 Product description 17
3.1 Function 17
3.1.1 Operating interface 17
3.1.2 Drive 18
3.1.3 Cooling 18
3.2 Identifying the product 18
3.3 Product features 19
3.4 Scope of delivery 20
4 Transportation and Storage 21
4.1 Transporting the pumping station 21
4.2 Transport lock 22
4.3 Store pumping station 22
5 Installation 23
5.1 Preparing for set-up 23
5.2 Setting up the pumping station 23
5.3 Anchor pumping station 24
5.4 Connecting the high vacuum side 25
5.4.1 Designing the counter flange 25
5.4.2 Use splinter shield or protective screen 25
5.4.3 Using the vibration compensator 26
5.4.4 Connecting the turbopump externally 26
5.4.5 Installation of ISO-KF flange 27
5.4.6 Attaching ISO-K flange onto ISO-K 27
5.4.7 Installation of ISO-K flange onto ISO-F 27
5.4.8 Attaching CF flange to CF-F 29
5.5 Connect the exhaust side 30
5.6 Remove transportation lock 31
5.7 Fill operating fluid 32
5.8 Connecting accessories 33
5.9 Connecting measuring tubes 35
5.10 Ground pumping station 35
5.11 Connect to the mains power supply 36
6 Operation 37
6.1 Commissioning 37
6.2 Switch on turbo pumping station 38
Table of contents
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