Flange size
Reduced pumping speed in % for the gas type
Splinter shield DN 63
3
6
15
16
Protective screen DN 63
1
1
4
4
Splinter shield DN 100
5
7
24
24
Protective screen DN 100
2
2
10
8
Splinter shield DN 160
6
9
20
23
Protective screen DN 160
1
2
6
7
Tbl. 6:
Reduction of the pumping speed when using a splinter shield or protective screen
Procedure
► With ISO flanges, use centering rings with protective screen or splinter shield.
► For CF flanges, always insert protective screen or splinter shield with the clamping lugs pointing
towards the rotor in the high vacuum flange.
5.4.3 Using the vibration compensator
Pfeiffer Vacuum vibration compensators are suitable for use on vibration-sensitive systems.
WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensator in the
event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.
When using a vibration compensator, this will probably lead to the turbopump being sheared off in
use. The energy that this would release could throw the entire turbopump or shattered pieces from its
interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.
► Take suitable safety precautions on-site for the compensation of the occurring torques.
► Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
Installing the vibration compensator
1. Install the vibration compensator only with vertical passage.
2. Consider the flow resistance.
3. Secure the turbopump additionally to the high vacuum flange.
4. Observe the fastening of the ISO flanges.
5.4.4 Connecting the turbopump externally
Depending on the configuration, the turbopump can be operated independently from the pumping sta-
tion.
Dismantling the turbopump
Please see the descriptions for removing a turbopump from the pumping station
ter “Removing components for maintenance”, page 44)
Procedure
1. Follow the installation instructions for the turbopump in the associated operating instructions for
the individual components.
2. Use the appropriate cable set from the scope of delivery.
– Other lengths available on request.
3. Extend the fore-vacuum line or utilize a line of the required length.
Installation
26/80
