Display Problem
Possible causes
Remedy
F116
Bearing temperature evalu-
ation faulty
● Contact Pfeiffer Vacuum Service.
F117
Pump lower part high tem-
perature
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F118
Final stage high tempera-
ture
● Faulty cooling
● Contact Pfeiffer Vacuum Service.
● Check the operating conditions
F119
Bearing high temperature
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F143
High operating fluid pump
temperature
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F168
High delay
● Rate of pressure rise
too high, venting rate
too high
● Check and adapt pump-specific venting rate
Tbl. 18:
Error and warning messages for turbopump electronic drive unit
Malfunctions
54/80
