Pfeiffer Vacuum HiCube 300 H Pro, Operating Instructions Manual

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6.3 Normal operation 38
6.4 Stand-by operation 39
6.5 Operation with gas ballast 39
6.6 Eliminate condensate load 40
6.7 Operation monitoring 41
6.7.1 Operating mode display via LED 41
6.7.2 Temperature monitoring 41
6.8 Operation with fore-vacuum valve 41
6.9 Switching off and venting 41
6.9.1 Shutting down the turbo pumping station 41
6.9.2 Venting 42
7 Maintenance 43
7.1 General maintenance information 43
7.2 Maintenance intervals and responsibilities 43
7.3 Removing components for maintenance 44
7.3.1 Carry out preparatory work 44
7.3.2 Remove turbo pump 44
7.3.3 Install turbopump 46
7.4 Change the operating fluid 46
8 Decommissioning 48
8.1 Shut down for longer periods 48
8.2 Recommissioning 48
9 Recycling and disposal 49
9.1 General disposal information 49
9.2 Dispose of turbopumps 49
9.3 Dispose of rotary vane pump 49
9.4 Dispose of multi-stage roots pumps 50
9.5 Disposing of the scroll pump 50
10 Malfunctions 51
10.1 General 51
10.2 Troubleshooting 51
10.3 Error codes 52
11 Service solutions by Pfeiffer Vacuum 55
12 Accessories 57
13 Technical data and dimensions 58
13.1 General 58
13.2 Technical data 58
13.2.1Technical data for HiCube 80 Pro 58
13.2.2Technical data HiCube 300 Pro 62
13.2.3Technical data HiCube 300 H Pro 65
13.2.4Technical data HiCube 400 Pro 68
13.2.5Technical data HiCube 700 Pro 71
13.2.6Technical data HiCube 700 H Pro 74
13.3 Dimension drawings 76
Declaration of conformity 78
Table of contents
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