Pfeiffer Vacuum HiCube 300 H Pro Operating Instructions Manual Download Page 5

Page: 5 / 80

List of tables

Tbl. 1:

Stickers on the product

Tbl. 2:

Abbreviations used in this document

Tbl. 3:

Limits of use for turbopump stations

Tbl. 4:

Pumping station component combination options

Tbl. 5:

Requirements for the dimensioning of high vacuum connection supplied by
the customer

Tbl. 6:

Reduction of the pumping speed when using a splinter shield or protective
screen

Tbl. 7:

Pre-set accessory connections to electronic drive unit TC 400

Tbl. 8:

Available Pfeiffer Vacuum transmitters for connection to a DCU

Tbl. 9:

Factory setting of key parameters on delivery

Tbl. 10:

Description of the key functions of the DCU

Tbl. 11:

Pre-set switching thresholds for stand-by operation with ACP and HiScroll
backing pumps

Tbl. 12:

LED display and meaning at the DCU

Tbl. 13:

Factory settings for delayed venting in turbopumps

Tbl. 14:

Preset accessory connections

Tbl. 15:

Tightening torque for fixation of turbopumps

Tbl. 16:

Troubleshooting

Tbl. 17:

Warning and error messages when using the DCU

Tbl. 18:

Error and warning messages for turbopump electronic drive unit

Tbl. 19:

Conversion table: Pressure units

Tbl. 20:

Conversion table: Units for gas throughput

Tbl. 21:

Technical data HiCube 80 Pro, DN 40 ISO-KF

Tbl. 22:

Technical data HiCube 80 Pro, DN 40 ISO-KF

Tbl. 23:

Technical data HiCube 80 Pro, DN 63 ISO-K

Tbl. 24:

Technical data HiCube 80 Pro, DN 63 ISO-K

Tbl. 25:

Technical data HiCube 80 Pro, DN 63 CF-F

Tbl. 26:

Technical data HiCube 80 Pro, DN 63 CF-F

Tbl. 27:

Technical data HiCube 300 Pro, DN 100 ISO-K

Tbl. 28:

Technical data HiCube 300 Pro, DN 100 ISO-K

Tbl. 29:

Technical data HiCube 300 Pro, DN 100 CF-F

Tbl. 30:

Technical data HiCube 300 Pro, DN 100 CF-F

Tbl. 31:

Technical data HiCube 300 H Pro, DN 100 ISO-K

Tbl. 32:

Technical data HiCube 300 H Pro, DN 100 ISO-K

Tbl. 33:

Technical data HiCube 300 H Pro, DN 100 CF-F

Tbl. 34:

Technical data HiCube 300 H Pro, DN 100 CF-F

Tbl. 35:

Technical data HiCube 400 Pro, DN 100 ISO-K

Tbl. 36:

Technical data HiCube 400 Pro, DN 100 ISO-K

Tbl. 37:

Technical data HiCube 400 Pro, DN 100 CF-F

Tbl. 38:

Technical data HiCube 400 Pro, DN 100 CF-F

Tbl. 39:

Technical data HiCube 700 Pro, DN 160 ISO-K

Tbl. 40:

Technical data HiCube 700 Pro, DN 160 ISO-K

Tbl. 41:

Technical data HiCube 700 Pro, DN 160 CF-F

Tbl. 42:

Technical data HiCube 700 Pro, DN 160 CF-F

Tbl. 43:

Technical data HiCube 700 H Pro, DN 160 ISO-K

Tbl. 44:

Technical data HiCube 700 H Pro, DN 160 ISO-K

Tbl. 45:

Technical data HiCube 700 H Pro, DN 160 CF-F

Tbl. 46:

Technical data HiCube 700 H Pro, DN 160 CF-F

Tbl. 47:

Dimensions HiCube 80 Pro

Tbl. 48:

Dimensions HiCube 300 Pro

Tbl. 49:

Dimensions HiCube 400 Pro

Tbl. 50:

Dimensions HiCube 700 Pro

List of tables

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Summary of Contents for HiCube 300 H Pro

Page 1: ...OPERATING INSTRUCTIONS EN Translation of the Original HICUBE PRO Turbo pumping stations...

Page 2: ...pfeiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and...

Page 3: ...n 21 4 2 Transport lock 22 4 3 Store pumping station 22 5 Installation 23 5 1 Preparing for set up 23 5 2 Setting up the pumping station 23 5 3 Anchor pumping station 24 5 4 Connecting the high vacuum...

Page 4: ...46 8 Decommissioning 48 8 1 Shut down for longer periods 48 8 2 Recommissioning 48 9 Recycling and disposal 49 9 1 General disposal information 49 9 2 Dispose of turbopumps 49 9 3 Dispose of rotary v...

Page 5: ...80 Pro DN 40 ISO KF 60 Tbl 23 Technical data HiCube 80 Pro DN 63 ISO K 60 Tbl 24 Technical data HiCube 80 Pro DN 63 ISO K 61 Tbl 25 Technical data HiCube 80 Pro DN 63 CF F 62 Tbl 26 Technical data Hi...

Page 6: ...F F hexagon head screw and through hole 29 Fig 11 Flange connection CF F stud screw and tapped hole 30 Fig 12 Flange connection CF F stud screw and through hole 30 Fig 13 Example backing pump exhaust...

Page 7: ...he Pfeiffer Vacuum Download Center 1 1 2 Variants These instructions apply to HiCube Eco line turbo pumping stations HiCube 80 Pro HiCube 300 Pro HiCube 300 H Pro HiCube 400 Pro HiCube 700 Pro HiCube...

Page 8: ...plate The rating plate is located on the rear of the electronics housing Mandatory disconnect mains plug The sticker indicates that the mains plug is to be disconnected from the device prior to insta...

Page 9: ...ide ISO Flange Connector in accordance with ISO 1609 and ISO 2861 LC Display Liquid crystal display LCD LED Light emitting diode MVP Diaphragm vacuum pump PE Protective earth earthed conductor P xxx E...

Page 10: ...ortant information about the product or about this docu ment 2 2 Safety instructions All safety instructions in this document are based on the results of the risk assessment carried out in accordance...

Page 11: ...vacuum connection Wear protective gloves during installation Do not start the turbopump with open vacuum connections Always carry out the mechanical installation before electrical connection Prevent a...

Page 12: ...Toxic process gases should be safely conveyed away via an exhaust line WARNING Risk of poisoning from incorrect use of the gas ballast system The gas ballast system of the scroll pump is vacuum seale...

Page 13: ...ating fluid contamination When changing the operating fluid there is a health hazard due to contact with poisonous substances Illegal disposal of toxic substan ces causes environmental damage Wear sui...

Page 14: ...nterior through the surrounding space Potentially dangerous gases can escape There is a risk of very serious injuries including death and extensive property damage Take suitable safety precautions on...

Page 15: ...max 2000 m Rel air humidity max 80 at T 31 C up to max 50 at T 40 C Installation surface flatness 5 degrees Protection class I Overvoltage category II Permissible protection degree IP20 Degree of poll...

Page 16: ...on in an incorrect gas mode Venting with impermissible high venting rates Use for pressure generation Use in areas with ionizing radiation Operation in explosion hazard areas Use in systems in which s...

Page 17: ...r with wheel brake 4 Electronics housing 12 Fastening hook or security hook 5 Transport handle 13 Frame 6 Exhaust connection 14 Cladding casing sheathing 7 Mains connection 15 Electronic drive unit TC...

Page 18: ...1 2 Drive Electronic drive unit of the turbopump Electronic drive unit of the backing pump 3 1 3 Cooling Air cooling Water cooling optional At excessively high temperatures the electronic drive unit...

Page 19: ...0 TC 400 TC 110 TC 400 TC 400 PT 0203 BN PT 0204 BN Air cooling yes yes yes yes PT 0500 BN Backing Pump Multi stage roots pump ACP 15 ACP 18 ACP 15 ACP 18 ACP 15 ACP 18 ACP 15 ACP 18 123884 O 112369 O...

Page 20: ...F optional only for CF F PT 0233 BN Control adapter for accesso ries yes yes yes yes PT 0521 BN Tbl 4 Pumping station component combination options 3 4 Scope of delivery HiCube Pro turbo pumping stat...

Page 21: ...equipment Packing We recommend keeping the transport packaging and original protective cover General information regarding safe transport 1 Observe the weight specified on the packaging 2 Where possib...

Page 22: ...issioning at the installation location 4 2 Transport lock Backing pumps in HiCube line turbopump stations are secured against damage during transport Handling the transport lock 1 Release the backing...

Page 23: ...during assembly Ensure that flange components during installation are grease free dust free and dry 5 2 Setting up the pumping station WARNING Risk of cuts on moving sharp edged parts when reaching in...

Page 24: ...occurs in case the turbopump rotor blocks suddenly Required aids 3x lashing straps of adequate length and loading capacity width approximately 3 cm On site attachment points to retain the lashing stra...

Page 25: ...ble axial load on the high vacuum flange2 1000 N equivalent to 100 kg 1000 N equivalent to 100 kg 1000 N equivalent to 100 kg 1000 N equivalent to 100 kg Flatness 0 05 mm 0 05 mm 0 05 mm 0 05 mm Minim...

Page 26: ...row the entire turbopump or shattered pieces from its interior through the surrounding space Potentially dangerous gases can escape There is a risk of very serious injuries including death and extensi...

Page 27: ...lange onto ISO K ISO flange connections For the connection of flanges in ISO KF or ISO K design twisting may occur in the event of sudden blockage of the rotor despite correct installation Leak tightn...

Page 28: ...e on the high vacuum flange of the turbopump 4 Fasten the turbopump onto the counter flange in accordance with the diagram using the collar flange snap ring and centering ring 5 Utilize all prescribed...

Page 29: ...h hole Stud screw with tapped hole Stud screw with through hole NOTICE Leaks may occur due to the incorrect installation of CF flanges Inadequate cleanliness when handling CF flanges and copper gasket...

Page 30: ...ig 12 Flange connection CF F stud screw and through hole Connection of the stud screw and through hole 1 For the connection of the turbopump use only the approved mounting kits from Pfeiffer Vacuum 2...

Page 31: ...condensate drain at the lowest point of the exhaust line 1 2 Fig 13 Example backing pump exhaust connection 1 Exhaust connection 1 2 internal thread 2 Protective cover Procedure 1 Remove the protecti...

Page 32: ...ly use other application specific operating fluids after consultation with Pfeiffer Vacuum Use of operating fluids Only applies to HiCube Pro with rotary vane pump as backing pump The operating fluid...

Page 33: ...le 2 Screw the filling hose onto the operating fluid bottle 3 Unscrew and remove the filler screw from the rotary vane pump 4 Fill operating fluid according to the rotary vane pump operating instructi...

Page 34: ...n Y connec tor Pre set configuration 1 2 1 2 Y Connector for Accessories Acc A A1 Y 1 Fan temperature control led A2 Y 2 Backing pump Acc B B1 Y 1 Venting valve B2 Y 2 Heating Tbl 7 Pre set accessory...

Page 35: ...g manual selection CMR 264 364 CMRx64 following manual selection CMR 365 CMRx65 following manual selection MPT 200 AR PKR2xx PCR 280 TP PCR PKR 251 261 360 361 PKR2xx PPT 200 AR TP PCR RPT 200 AR TP P...

Page 36: ...ectric shocks obtained from working with or on the unit Ensure safe integration into an emergency off safety circuit Do not carry out your own conversions or modifications on the unit 2 1 Fig 18 Power...

Page 37: ...operation 1 intermittent operation Scroll 1 intermittent operation 1 intermittent operation 1 intermittent operation P 035 Cfg Acc A1 Configuration acces sory connection A1 Air cooling 4 4 4 Water coo...

Page 38: ...age In the case of processes with toxic media there is a risk of injury and danger of death due to poisoning Note the corresponding regulations for handling toxic substances Toxic process gases should...

Page 39: ...W 20 W HiPace 300 TC 400 50 W 70 W HiPace 400 TC 400 65 W 110 W HiPace 700 TC 400 65 W 110 W Tbl 11 Pre set switching thresholds for stand by operation with ACP and HiScroll backing pumps Alternative...

Page 40: ...temperature If necessary an external gas supply is closed Procedure 1 If necessary connect an existing shut off unit to the vacuum side 2 Observe the permissible inlet pressure 3 Turn the selector swi...

Page 41: ...peed switchpoint and so result in switching off of the turbopump At a non permissibly high temperature 75 C of the backing pump the motor rotation speed is reduced to nominal rotation speed to prevent...

Page 42: ...ximum 3 Wait for pressure equalization to atmospheric pressure in the vacuum system 4 Close the venting screw again Use a Pfeiffer Vacuum venting valve The Pfeiffer Vacuum venting valve is an optional...

Page 43: ...taminate affected parts before carrying out maintenance work Wear protective equipment WARNING Risk of cuts on moving sharp edged parts when reaching into the open high vacuum connec tion Incorrect ha...

Page 44: ...the TC Preset accessory Acc A1 Air cooling Acc B1 Venting valve DO2 Backing pump HiCube 80 Pro only Tbl 14 Preset accessory connections 7 3 1 Carry out preparatory work 2 1 Fig 19 Electrical connecti...

Page 45: ...ring 6 ACP or HiScroll backing pump control cable re mote Procedure 1 Remove all power supply plugs from the electronic drive unit 2 Remove the fore vacuum connection from the turbopump 3 Avoid damag...

Page 46: ...e 700 Hexagon socket M8 20 6 pieces 30 Nm Tbl 15 Tightening torque for fixation of turbopumps 7 4 Change the operating fluid WARNING Health hazard and risk of environmental damage from toxic contamina...

Page 47: ...ing 3 Switch on the vacuum pump with the vacuum flange open for a maximum of 5 seconds Drain remaining operating fluid 1 Unscrew the drain screw Be careful with the O ring 2 Gently tilt the vacuum pum...

Page 48: ...4 years combined operation and downtimes Observe the maintenance instructions and inform Pfeiffer Vacuum Service NOTICE Risk of damage to vacuum pump as a result of operating fluid aging The operatin...

Page 49: ...cing natural resource wastage and preventing pollution 9 1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle Dispose of our products according to the follow...

Page 50: ...materials 4 Recycle the non contaminated components 5 Dispose of the product or components in a safe manner according to locally applicable regula tions 9 5 Disposing of the scroll pump Pfeiffer Vacuu...

Page 51: ...perty damage Take suitable safety precautions on site for the compensation of the occurring torques Before installing a vibration compensator you must first of all contact Pfeiffer Vacuum Malfunctions...

Page 52: ...f 0 E002 Overvoltage Incorrect power supply pack used Check the power supply pack type Check the mains voltage E006 Run up fault Run up time threshold set too low Gas flow in recipient through leaks o...

Page 53: ...n speed f 0 F001 TMS heat up time expired Internal timer for heat up monitoring exceeded Check the operating conditions F003 TMS heating circuit temper ature sensor TMS temperature not in the permissi...

Page 54: ...Contact Pfeiffer Vacuum Service Check the operating conditions F119 Bearing high temperature Faulty cooling Improve the cooling Check the operating conditions F143 High operating fluid pump temperatu...

Page 55: ...ity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum represen...

Page 56: ...duct in suitable stable transport containers only e Maintain applicable transport conditions ERKL RUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send...

Page 57: ...ies We recommend Please refer to the accessories list for the individual components in their respective operat ing instructions or online at Accessories portfolio for hybrid bearing turbopumps Accesso...

Page 58: ...with 100 helium concentration 10 s measurement duration Sound pressure level at distance to vacuum pump 1 m mbar bar Pa hPa kPa Torr mm Hg mbar 1 1 10 3 100 1 0 1 0 75 bar 1000 1 1 105 1000 100 750 P...

Page 59: ...non condensing 5 85 non condensing 5 85 non condensing Shipping and storage tem perature 10 55 C 10 55 C 10 50 C 10 50 C 10 50 C Weight 64 kg 87 kg 67 7 kg 72 7 kg 71 7 kg Tbl 21 Technical data HiCube...

Page 60: ...ump at 50 Hz 14 m h 27 m h 6 1 m h 12 1 m h 18 1 m h Input volt age s 200 230 V AC 50 60 Hz 200 230 V AC 50 60 Hz 200 230 V AC 50 60 Hz 200 230 V AC 50 60 Hz 200 230 V AC 50 60 Hz Input voltage tolera...

Page 61: ...be 80 Pro HiCube 80 Pro HiCube 80 Pro HiCube 80 Pro Connection flange in DN 63 CF F DN 63 CF F DN 63 CF F DN 63 CF F DN 63 CF F Connection flange out G 1 2 G 1 2 G 1 2 G 1 2 G 1 2 Turbopump HiPace 80...

Page 62: ...AC 50 60 Hz Input voltage toler ance 10 10 10 10 Motor for region Asia Europe Asia Europe Asia Europe Asia Europe Power consumption max 430 W 1030 W 680 W 680 W Sound pressure lev el 50 dB A 50 dB A 5...

Page 63: ...sing Shipping and storage tempera ture 10 55 C 10 55 C 10 50 C 10 50 C 10 50 C Weight 67 kg 90 kg 72 kg 77 kg 76 kg Tbl 27 Technical data HiCube 300 Pro DN 100 ISO K Type designa tion HiCube 300 Pro H...

Page 64: ...ll 18 Final pres sure without gas ballast 5 10 10 hPa 5 10 10 hPa 5 10 10 hPa 5 10 10 hPa 5 10 10 hPa Pumping speed for N2 260 l s 260 l s 260 l s 260 l s 260 l s Pumping speed back ing pump at 50 Hz...

Page 65: ...e humidity of air 5 85 non condensing 5 85 non condensing 5 85 non condensing 5 85 non condensing Shipping and stor age temperature 20 55 C 20 55 C 20 55 C 20 55 C Weight 67 kg 92 kg 74 kg 76 kg Tbl 3...

Page 66: ...H Pro HiCube 300 H Pro Connection flange in DN 100 ISO K DN 100 ISO K DN 100 ISO K DN 100 ISO K Connection flange out G 1 2 G 1 2 G 1 2 G 1 2 Turbopump HiPace 300 H HiPace 300 H HiPace 300 H HiPace 3...

Page 67: ...t volt age s 200 230 V AC 50 60 Hz 200 230 V AC 50 60 Hz 200 230 V AC 50 60 Hz 200 230 V AC 50 60 Hz 200 230 V AC 50 60 Hz Input volt age toler ance 10 10 10 10 10 Motor for re gion Asia Europe Asia E...

Page 68: ...C Weight 73 5 kg 98 5 kg 80 5 kg 82 5 kg Tbl 34 Technical data HiCube 300 H Pro DN 100 CF F 13 2 4 Technical data HiCube 400 Pro Type des ignation HiCube 400 Pro HiCube 400 Pro HiCube 400 Pro HiCube...

Page 69: ...Turbopump HiPace 400 HiPace 400 HiPace 400 HiPace 400 Backing pump Duo 11 M Duo 20 M Pascal 2010 Pascal 2021 Final pressure without gas bal last 1 10 7 hPa 1 10 7 hPa 1 10 7 hPa 1 10 7 hPa Pumping sp...

Page 70: ...1900 W Sound pres sure level 50 dB A 50 dB A 50 dB A 50 dB A 50 dB A Cooling method standard Air Air Air Air Air Relative hu midity of air 5 85 non condensing 5 85 non condensing 5 85 non condensing 5...

Page 71: ...flange out G 1 2 G 1 2 G 1 2 G 1 2 G 1 2 Turbopump HiPace 700 HiPace 700 HiPace 700 HiPace 700 HiPace 700 Backing pump ACP 15 ACP 28 HiScroll 6 HiScroll 12 HiScroll 18 Final pres sure with out gas bal...

Page 72: ...C 50 60 Hz Input voltage tol erance 10 10 10 10 Motor for region Asia Europe Asia Europe Asia Europe Asia Europe Power consump tion max 750 W 1350 W 1000 W 1000 W Sound pressure level 50 dB A 50 dB A...

Page 73: ...echnical data HiCube 700 Pro DN 160 CF F Type designation HiCube 700 Pro HiCube 700 Pro HiCube 700 Pro HiCube 700 Pro Connection flange in DN 160 CF F DN 160 CF F DN 160 CF F DN 160 CF F Connection fl...

Page 74: ...0 7 hPa 1 10 7 hPa 1 10 7 hPa Pumping speed for N2 685 l s 685 l s 685 l s 685 l s 685 l s Pumping speed backing pump at 50 Hz 14 m h 27 m h 6 1 m h 12 1 m h 18 1 m h Input volt age s 200 230 V AC 50...

Page 75: ...tive humidity of air 5 85 non condensing 5 85 non condensing 5 85 non condensing 5 85 non condensing Shipping and storage tempera ture 20 55 C 20 55 C 20 55 C 20 55 C Weight 77 1 kg 102 1 kg 84 1 kg 8...

Page 76: ...G 1 2 G 1 2 G 1 2 Turbopump HiPace 700 H HiPace 700 H HiPace 700 H HiPace 700 H Backing pump Duo 11 M Duo 20 M Pascal 2010 Pascal 2021 Final pressure without gas ballast 1 10 10 hPa 1 10 10 hPa 1 10 1...

Page 77: ...mensions HiCube 300 Pro HiCube 300 Pro Flange DN 100 ISO K DN 100 CF F A 716 mm 728 mm B 195 mm 207 mm Tbl 48 Dimensions HiCube 300 Pro Dimensions HiCube 400 Pro HiCube 400 Pro Flange DN 100 ISO K DN...

Page 78: ...nd applied national standards and specifications DIN EN ISO 12100 2011 DIN EN 62061 2013 DIN EN 1012 2 2011 DIN EN 61326 1 2013 DIN EN ISO 13857 2008 DIN EN 1127 1 2019 DIN EN ISO 2151 2009 DIN EN 505...

Page 79: ...79 80...

Page 80: ...PT0265 ed F Date 2010 P N PT0265BEN...

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