Display Problem
Possible causes
Remedy
E098
Internal communication er-
ror
● Contact Pfeiffer Vacuum Service.
E107
Final stage group error
● Contact Pfeiffer Vacuum Service.
● Acknowledge only at rotation speed f = 0
E108
Rotation speed measure-
ment faulty
● Contact Pfeiffer Vacuum Service.
● Acknowledge only at rotation speed f = 0
E109
Software not released
● Contact Pfeiffer Vacuum Service.
E110
Operating fluid evaluation
faulty
● Contact Pfeiffer Vacuum Service.
● Acknowledge only at rotation speed f = 0
E111
Operating fluid pump com-
munication error
● Contact Pfeiffer Vacuum Service.
● Acknowledge only at rotation speed f = 0
E112
Operating fluid pump group
error
● Contact Pfeiffer Vacuum Service.
● Acknowledge only at rotation speed f = 0
E114
Final stage temperature
evaluation faulty
● Contact Pfeiffer Vacuum Service.
E117
Excess temperature, pump
lower part
● Faulty cooling
● Improve the cooling
● Check the operating conditions
E118
Excess temperature, final
stage
● Faulty cooling
● Improve the cooling
● Check the operating conditions
E119
Excess temperature, bear-
ing
● Faulty cooling
● Improve the cooling
● Check the operating conditions
E143
Operating fluid pump ex-
cess temperature
● Faulty cooling
● Improve the cooling
● Check the operating conditions
● Acknowledge only at rotation speed f = 0
E777
Nominal rotation speed not
confirmed
● Nominal rotation speed
not confirmed after re-
placing the electronic
drive unit
● Confirm the nominal rotation speed with
[P:777]
● Acknowledge only at rotation speed f = 0
F001
TMS heat-up time expired
● Internal timer for heat-
up monitoring exceeded
● Check the operating conditions
F003
TMS heating circuit temper-
ature sensor
● TMS temperature not in
the permissible range
b5 °C and 85
°C
● Check the operating conditions
● Contact Pfeiffer Vacuum Service.
F007
Undervoltage/power failure
● Mains failure
● Check the mains supply
F018
Operating supremacy con-
flict
● Pumping station switch-
ed on with
[P:010]
while
E74 input "start/stop" is
off (opened)
● Switch on the pumping station via E74
● Switch the pumping station off via
[P:010]
.
F021
Blocking signal invalid
● Signal of the blocking
signal monitoring out-
side the valid range
● Check the connections of the sealing gas
monitoring
● Check the parameter options of the accesso-
ry outputs
F034
Sealing gas flow low
● Signal of the sealing
gas monitoring valid but
below the set threshold
[P:791]
● Check and improve the sealing gas supply
● Check the operating conditions
F045
Motor high temperature
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F076
Electronics high tempera-
ture
● Faulty cooling
● Improve the cooling
● Check the operating conditions
F097
Invalid pump information
● Data of the pump faulty
● Acknowledging restores factory setting
F098
Incomplete pump informa-
tion
● Connection to the pump
faulty
● Contact Pfeiffer Vacuum Service.
F100
Rotation speed raised to
minimum value
● Permissible specifica-
tions for rotation speed
operation or stand-by in-
correct
● Check
[P:707]
or
[P:717]
● Obtain the valid rotation speed range from
the technical data of the Turbopump
F115
Pump lower part tempera-
ture evaluation faulty
● Contact Pfeiffer Vacuum Service.
Malfunctions
53/80
