- 58 -
Note:
Use cotton swab to polish the 3 holes.
❖
Use liquid detergent to clean the Aperture holder, Set Screw and Fixed Shim several times.
❖
Use water to clean them several times.
❖
Use absolute alcohol to clean them again. Or place them in absolute alcohol with ultrasonic
cleaning. Finally, use dryer to dry them.
❖
Use vacuum coating machine to clean the aperture, the vacuum should be better than 1.0*10
-
3
Pa, heat the aperture until its color change to red, lasts for 10
–
16 seconds.
Note:
Heating can cause the distortion of aperture, it might have some bad effects on Astigmatism,
so the heating temperature should not too high. If the aperture is distort, please replace a new
one.
❖
Mount the aperture to the holder, mount the fixed shim, and fasten the set screw.
❖
Mount the O ring to the aperture holder, coated with a thin layer of vacuum grease. If the O
ring is broken please change a new one.
❖
When install the aperture holder to the Column, the locating pin of holder should toward to
the locating slot of the Column. Push the holder in, and rotate it clockwise.
❖
Click the [Chamber] button to pump the vacuum.
❖
After cleaning, the user should adjust the alignment of Final Aperture Assembly.
6.6.
Stop use SEM for long term
It is suggested that turn off all the switch of SEM, when the instrument stop use for a long term.
The whole instrument should be covered in order to avoid falling dust.
Note: If conditions permit, it is best to run SEM two times a week.
Summary of Contents for A63.7069
Page 21: ... 20 Control Panel ...
Page 41: ... 40 4 10 Dither ...
Page 43: ... 42 4 12 4 Pseudo Colors Source Pseudo Colors 4 13 Options ...
