- 016
2.3.
Specimen Changing Procedures
❖
Click the [OFF] button, the value of HV, Bias, Filament and Contrast will return to zero.
❖
Close V1, click the [Chamber] button, the color of button will change to YELLOW, V4 will be
opened. About 3-5 minutes later, pull out sample stage, change a sample, push the stage in,
click the [Chamber] button again, the color of Chamber button will change to grey, system will
pump the low vacuum, and the vacuum value will displayed on control panel.
NOTE: Before pumping, check the O-ring.
❖
After pumping the low vacuum, V3 and TMP will be opened, system will pump the high
vacuum automatically. When the color of vacuum changes to GREEN, SEM can begin to
work. It is recommended to start working after vacuum degree is better than 5.0*10
-5
Torr,
otherwise the filament life will be affected.
Summary of Contents for A63.7069
Page 21: ... 20 Control Panel ...
Page 41: ... 40 4 10 Dither ...
Page 43: ... 42 4 12 4 Pseudo Colors Source Pseudo Colors 4 13 Options ...
