- 44 -
panel manually, lamp of V3 will be turned on.
❖
Wait until the vacuum display reaches over 8.0*10
-2
Torr again, press the
“
TMP ON
”
button at
the vacuum control panel, the lamp of TMP will be turned on, vacuum system come into the
high vacuum working status. About 5 mins the vacuum indication turns green, the system can
begin to work. At this moment, the display of Vacuum will reach over 4.9*10
-5
Torr.
❖
Before switch the “AUTO/MAN”
to AUTO, please make sure
all
the switch of vacuum control
panel are turned OFF.
❖
Generally, the vacuum system should be worked in AUTO mode, the operation of Manual
mode should follow the Service Engineer‘s
guide.
NOTE: It is not suggest that the user works in Manual mode.
5.3.
Final Aperture Alignment and Selection
5.3.1.
Check the Alignment of Final aperture
1.
Adjust the magnification to 500X-800X, acquire a relatively clear image. Use [Active Area]
scanning at a high speed scanning rate, and select a “characteristic point” on image. At the same
time, remember the position of this point.
2.
Focus the image by adjusting the coarse button, and observe the movement of image between
the focus and defocus. If the “characteristic point” do not move and almost stay in the original
position when focusing or defocusing, which means the Final aperture is in well alignment. If not,
it is need to do alignment.
5.3.2.
Final Aperture Alignment
1.
Adjust the magnification to 500X-800X, acquire a relatively clear image. Use [Active Area]
scanning at a high speed scanning rate, and select a
“
characteristic point
”
on image. At the same
time, remember the position of this point.
Summary of Contents for A63.7069
Page 21: ... 20 Control Panel ...
Page 41: ... 40 4 10 Dither ...
Page 43: ... 42 4 12 4 Pseudo Colors Source Pseudo Colors 4 13 Options ...
