- 017
2.4.
Filament changing procedures
❖
If the screen turn to black suddenly and the indicator of filament value return to zero, that
means filament is broken, it’s time to change a new
filament.
❖
Click the [OFF] button, the value of HV, Bias, Filament and Contrast will return to zero.
❖
Close V1, click the [Gun] button, the color of button will change to YELLOW, V3 and V4 will
be opened.
❖
About 3-5 minutes later, open the Gun chamber and take out the Wehnelt Cap, dismantle the
filament, change a new one. Then, install the Gun cap, click the [Gun] button again, the color
of Gun button will change to grey, V2 and V3 is opened, system will pump the low vacuum.
When TMP is opened, system will pump the high vacuum, until the color of vacuum turns to
GREEN, SEM can begin to work. It is recommended to start working after vacuum degree is
better than 5.0*10
-5
Torr, otherwise the filament life will be affected.
NOTE: After changing filament, please readjust the GUN Tilt (the mechanical position of
electron gun).
NOTE: Before pumping, check the O-ring.
Summary of Contents for A63.7069
Page 21: ... 20 Control Panel ...
Page 41: ... 40 4 10 Dither ...
Page 43: ... 42 4 12 4 Pseudo Colors Source Pseudo Colors 4 13 Options ...