OPTO-EDU A63.7069, Instruction Manual

Page: 11 / 59

- 010
The automatic vacuum system mainly includes Turbo Molecular Pump, Mechanical Pump, Cold
Cathode Gauge, connecting pipeline, damping device, various valves, and various gauges etc.
More details are as follows:
❖
Turbo Molecular Pump is used to acquire high vacuum for the system.
❖
Mechanical pump is used to acquire low vacuum for the system and foreline vacuum for
Turbo Molecular Pump.
❖
Connecting pipeline is used for the connections between vacuum components.
❖
Various valves are used for vacuum control. e.g., V1 and V3 can separate electron gun from
chamber; when the chamber is venting, the electron gun can keep in vacuum state; V2 is
used to acquire low vacuum in chamber and TMP. When V3 is open, it can also acquire low
vacuum of electron gun at the same time.
❖
Cold Cathode Gauge (CCG) measure vacuum in real time and assist valves to realize vacuum
control.
❖
Air compressor supplies power to each pneumatic valve.
The vacuum control part is installed on the rear of main frame. The whole process from low
vacuum to high vacuum is fully automatically controlled by software. The system can realize the
vacuum real-time measurement and can be displayed on the software interface.
Operations of vacuum system are very simple: the operators only need to press buttons on the
software interface, the vacuum system can work automatically. The system can also be operated
in manual mode while being maintained.
High voltage interlock is realized by opening and closing V1 and TMP in order to avoid damage of
instrument by high voltage discharge when the vacuum is low.
Caution: When using LaB
6
electron gun, ion pump must be installed on the pipeline through
vacuum system to the column. The vacuum of electron gun can reach 1.0*10
-10
Torr in normal
working condition, which can ensure the high brightness and long lifetime of LaB
6
electron source.