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Engineering Data (Reference Value)
152
ZX2 User’s Manual
INTRODUCTION
MAIN
APPLICATIONS
& SETTING
METHODS
SPECIFI-
CATIONS
INDEX
SETTING
TRANSITION
CHARTS
DETAILED
SETTINGS
FLOW OF
OPERATION
CONTENTS
PREPARATION
FOR
MEASUREMENT
BASIC
SETUP
TROUBLE-
SHOOTING
Height
Double
Sheet
Detection
Positioning
Eccentricity
and Surface
Deflection
Steps
and
Warpage
Thickness
MEMO