14
14
Stage holder for MX63
Rotary wafer holder plate
(BH3-WHP6)
Black plate
(BH3-SP6)
Glass plate
(BH3-SPG6)
X-axis/Y-axis knobs (page 27)
Rotary wafer holder plate
For 6 or 8 inches (MX-WHPR86)
Rotary wafer holder
For 3 or 4 inches (BH2-WHR43)
For 4 or 5 inches (BH2-WHR54)
For 5 or 6 inches (BH2-WHR65)
6x6-inch stage
(MX-SIC6R2)
8x8-inch stage
(MX-SIC8R)
Coarse adjustment grip (page 27)
(with a crutch)
Coarse adjustment grip (page 27)
(with a crutch)
Summary of Contents for MX63
Page 15: ...9 MX63 MX63L 9 MX63L installation space Unit mm ...
Page 27: ...21 MX63 MX63L 21 Memo ...
Page 119: ......