Maintenance and service
GA 09.035/6.02 - 07/2011 - © Oerlikon Leybold Vacuum
89
6
Connect pin 2 (Signal) and pin 12 (Signal-GND) of a 15-pin D-Sub plug
with a high-precision voltage source. See Chapter 3.3.4 SENSOR,
Pin 2 = +10.000 V
Pin 12 = GND
7
Put the D-Sub plug with the voltage source connections onto the sensor
connection of the respective channel
8
Use the serial interface to send the command CAF,a to the unit. For the
parameter a, use:
0 = Channel 1
1 = Channel 2
2 = Channel 3
The calibration factor of the respective channel is determined and stored in the
EEPROM. Now the channel is calibrated.
