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Oerlikon CENTER TWO, Operating Manual

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2

GA 09.035/6.02 - 07/2011 - © Oerlikon Leybold Vacuum

Contents

Contents

1

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  4

1.1

Validity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  4

1.2

Intended use  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  5

1.3

Product versions  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  5

1.4

Safety  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  6

2

Technical data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  9

2.1

General data  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  9

2.2

Mains connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  10

2.3

Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  11

2.4

Switching functions  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  12

2.5

Outputs  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  13

2.6

Scope of delivery . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  14

2.7

Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  14

3

Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  15

3.1

Unpacking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  15

3.2

Mechanical installation  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  15

3.3

Connecting  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  18

4

Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  24

4.1

Front panel  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  24

4.2

Switching on and off  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  26

4.3

Operating modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  27

4.4

Measurement mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  27

4.5

Parameter mode  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  33

5

Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  36

5.1

Switching function parameters (

PArA SP

). . . . . . . . . . . . . . . . . .  36

5.2

Sensor parameters (

PArA SEn

)  . . . . . . . . . . . . . . . . . . . . . . . . .  39

5.3

General parameters (

PArA GEn

) . . . . . . . . . . . . . . . . . . . . . . . . .  47

5.4

Test parameters (

PArA tESt

). . . . . . . . . . . . . . . . . . . . . . . . . . . .  52

6

Computer interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  57

6.1

Basics  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  57

6.2

Communication . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .  58

Summary of Contents for CENTER TWO

Page 1: ...uy your excess underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing R...

Page 2: ...CENTER TWO CENTER THREE Multi Channel Controller Operating Manual GA 09 035 6 02 Cat No 230 003 230 004 235 003 235 004...

Page 3: ...Scope of delivery 14 2 7 Accessories 14 3 Installation 15 3 1 Unpacking 15 3 2 Mechanical installation 15 3 3 Connecting 18 4 Operation 24 4 1 Front panel 24 4 2 Switching on and off 26 4 3 Operating...

Page 4: ...ice 85 7 1 Maintenance 85 7 2 Program transfer mode 85 7 3 Calibration 87 8 Troubleshooting 90 8 1 Fault indication 90 8 2 Error messages 90 8 3 Technical support 91 9 Storage and disposal 91 9 1 Pack...

Page 5: ...eck if it is equipped with this firmware version See Chapter 5 4 2 Firmware version Pnr 52 1 1 3 Type label There is a type label attached to one side of the unit In all communication with Oerlikon Le...

Page 6: ...eybold Vacuum assumes no liability and the warranty becomes null and void if the end user or third parties Disregard the information in this document Use the product in a non conforming manner Make an...

Page 7: ...ng Manual illustrates safety notes concerning residual dangers as follows Danger indicates an imminently hazardous situation which if not avoid ed will result in death or severe injury Warning indicat...

Page 8: ...ns parts which are connected to the mains supply Make sure that no objects enter through the louvers of the unit Keep the unit dry Do not open the unit Fig 1 2 Do not insert objects through louvers an...

Page 9: ...cord ing to EN 61010 1 The disconnecting device is located at the back of the Multi Channel Control ler See Fig 1 3 8 The disconnecting device must be readily identifiable and easily reached by the us...

Page 10: ...l data 2 1 1 Mechanical data Fig 2 1 Dimensions in mm Dimensions Width 106 3 mm Height 128 5 mm 3 HE Depth 207 mm See Fig 2 1 9 Weight CENTER TWO 1 04 kg CENTER THREE 1 16 kg Use Desktop unit Control...

Page 11: ...C decreasing to max 50 above 40 C Use Indoors only Altitude max 2000 m NN Pollution degree II Protection type IP20 Manually Via 4 control buttons on the front panel Remote control Via RS232C interface...

Page 12: ...PTR 90 CERAVAC CTR 90 CTR 91 CTR 100 CTR 101 DI 200 DI 201 DI 2000 DI 2001 DI 2001 rel IONIVAC ITR 90 ITR 200 Voltage 24 VDC 5 Current 500 mA 750 mA short time Fuse 900 mA via PTC element Self resett...

Page 13: ...H2 or a variable correction factor in the range 0 10 9 99 A D converter Resolution 16 bit Number of switching functions CENTER TWO 4 CENTER THREE 6 Assignment Can be configured any way Delay time Fil...

Page 14: ...les Electrical 105 cycles at maximum load Connection D Sub 25 pins female See Fig 3 8 21 Number 1 per channel Voltage range 0 10 VDC Deviation from displayed value 50 mV Internal resistance 47 Relatio...

Page 15: ...with 3 character mnemonics Bidirectional data flow Signals Only TXD and RXD used Baud rate 9600 19200 38400 Connection D Sub 9 pins female See Fig 3 10 23 Designation Number Multi Channel Controller...

Page 16: ...ed operation Send a damage report to the haulage company or the insurer 3 2 Mechanical installation The Multi Channel Controller can be used as follows As a desk top unit mounted in a control panel or...

Page 17: ...he required location 3 2 2 Control panel mounted In order to mount the unit in a control panel the following cutout is required Fig 3 2 Control panel cutout in mm 1 Insert the Multi Channel Controller...

Page 18: ...according to the EN 60204 1 regulations for switching cabinets Take appropriate measures to restore the required protection class of the rack Fig 3 3 Mounting the unit in a rack Note In order to redu...

Page 19: ...ram transfer mode F RS232C connection G Mains connection disconnecting device H Mains switch I Ground screw J RELAY connection K Screw for internal protective conductor Do not loosen this screw Intern...

Page 20: ...r extension cables with protective ground only Plug the mains cable into wall sockets with protective ground only No mains fuse The Multi Channel Controller is not equipped with a mains fuse The wall...

Page 21: ...ransmitters which are not designed for use with the Multi Channel Con troller may damage the unit Operate the Multi Channel Controller with proper transmitters only See Chapter 2 3 1 Sensor connection...

Page 22: ...tact NC break contact normally closed NO make contact normally open Note Pin 25 is used for supplying relays with a higher breaking capacity The supply contact is protected at 200 mA with a PTC elemen...

Page 23: ...ig nal pins Analog outputs for the signals of the individual channels Recorder output This is a programmable analog output which can be as signed to one of the three channels HV EMI Used to switch the...

Page 24: ...on the interface may be used for firmware updates See Chapter 7 2 Program transfer mode 85 Pin assignment Fig 3 10 RS232C appliance socket D Sub 9 pin 1 Connect the serial interface of the computer wi...

Page 25: ...NTER TWO is not equipped with the switching points SP5 and SP6 item A and the display for the channel 3 item F Fig 4 1 Front panel of the CENTER THREE A Switching function indicator B Parameter mode C...

Page 26: ...uttons CH The CH button is used to select a channel This may be necessary e g if you want to switch a particular transmitter on or off or if you want to modify the sensor parameters The number of the...

Page 27: ...urement mode Adapt parameters if a transmitter type has changed meanwhile 4 2 2 Switching off 1 Switch the mains switch off See Fig 3 4 18 item H 4 2 3 Waiting time Delay time After switching off the...

Page 28: ...rious parameters You can check the parameter settings or modify them using the arrow buttons This allows you to configure the Multi Channel Controller See Chapter 4 5 Parameter mode 33 Program transfe...

Page 29: ...ressure Er Hi Significantly above the permissible range The FAIL indicator flashes The error signal relay switches Upper limit Above the permissible range The upper limit of the measuring range is dis...

Page 30: ...H button The unit selects the next channel The number of the selected channel is flash ing for a few seconds 4 4 3 2 Selecting parameter mode 1 Press the PARA button Fig 4 3 Pressing the PARA button T...

Page 31: ...d for approximately 1 second Fig 4 4 Press the UP button for 1 second The transmitter on the selected channel is switched on The HV indicator is illuminated The display shows the pressure reading or a...

Page 32: ...Keep the DOWN button pressed for approximately 1 second Fig 4 5 Press the DOWN button for 1 second The transmitter on the selected channel is switched off The HV indicator is dark The display shows th...

Page 33: ...itters See Tab 4 2 32 Tab 4 2 Transmitter identification Note In the case of ITR transmitters the software version number of the sen sor is also shown e g 1 20 Display Significance ttr THERMOVAC TTR t...

Page 34: ...tton is pressed for 10 seconds The PARA indica tor is dark 4 5 2 Parameter groups The parameter mode gives you access to various parameters You can check the parameter settings or modify them using th...

Page 35: ...n the transmitter on the currently selected channel only There is an individual set of parameters for each channel See Chapter 5 2 Sensor parameters PArA SEn 39 General parameters PArA GEn These param...

Page 36: ...s to select the required parameter group The name of the parameter group is displayed 4 Press the PARA button to select the required parameter The name and the value of the parameter are displayed 5 U...

Page 37: ...k of the switching functions 1 4 The CENTER THREE contains a total of six switching function relays i e the switching functions 1 6 are available in this unit Threshold values The switching behavior o...

Page 38: ...eresis prevents the switching function from rapidly switching on and off when the pressure is close to one of the threshold values 5 1 2 Configuring switching functions Prerequisite The parameter grou...

Page 39: ...anges Tab 5 2 Adjustment range of the upper threshold values This means that the hysteresis amounts to 10 of the lower threshold value logarithmic transmitters or to 1 of the full scale range linear t...

Page 40: ...the selected channel See Tab 5 3 39 Tab 5 3 Available sensor parameters 5 2 1 Measurement filter FiLt The measurement filter improves measurements when the signal is noisy or disturbed The filter affe...

Page 41: ...example nor Normal This is the default setting It offers a good compromise between the response time and the sensitivity to noise Fig 5 3 Measurement with filter set to nor example SLo Slow The Multi...

Page 42: ...factor is displayed 3 Use the arrow buttons the modify the correction factor The value of the parameter is changed The COR indicator is illuminated You can adjust the correction factor of a transmitt...

Page 43: ...ly specified offset value will be subtracted from each pressure reading This allows to conveniently mea sure the relative pressure with respect to a reference pressure The offset correction affects th...

Page 44: ...nus several digits are displayed 5 2 5 Degas function dEGAS Ionization transmitters with a hot cathode are sensitive with regard to deposi tions on the electrodes These depositions can cause signal fl...

Page 45: ...t parameter t on is used to specify the switch on threshold The transmitter is switched on when the pressure on channel 3 falls below the switch on threshold 5 2 7 Switch on threshold t on This parame...

Page 46: ...tter deactivation parameter is set to CH 1 CH 2 or CH 3 See Chapter 5 2 8 Transmitter deactivation S oFF 44 The t off parameter is used to specify a switch off threshold The transmitter is switched of...

Page 47: ...ters 5 2 12 Pirani range extension PrE Extend the display and the setpoint adjustment range Tab 5 8 PrE parameter values Display Significance oFF Normal operation on Range extension Display down to 5...

Page 48: ...es etc Tab 5 9 unit parameter values The unit of measurement is indicated on the display See Fig 4 1 24 item C Note The pressure unit Torr can be locked In this case torr is not available for selectio...

Page 49: ...he dEF parameter 2 Press both the UP and the DOWN button at the same time The display shows SEt All parameters are reset to the default values 5 3 5 Recorder output Ao The recorder output is a program...

Page 50: ...re value will result in the maximum output voltage The available characteristic curves will be described in the following In each case it is shown how to calculate the pressure p in mbar from the reco...

Page 51: ...mea suring ranges The total measuring range of the sensor combination is repre sented logarithmically in the range 0 10 V LoGC3 Logarithmic representation matched to the following sensor combination...

Page 52: ...0 V is equivalent of p 1000 mbar The switching point between the transmitters is 10 2 mbar PM411 Nonlinear characteristic curve of the output as with the PM 411 board 5 3 6 Error signal relay Err r Th...

Page 53: ...r is switched on The parameter group tESt is selected The PARA indicator is illuminated During normal operation During normal operation it is also possible to activate the parameter group tESt from th...

Page 54: ...parameter values 5 4 5 Parameter setup lock LoC This parameter affects the parameter mode When the lock is activated the user can inspect but not modify parameter values Tab 5 15 LoC parameter values...

Page 55: ...nter if the test fails repeatedly 5 4 8 EEPROM test EE t Test the parameter memory Press the UP button to start the test Tab 5 18 EEPROM test Please contact your local Oerlikon Leybold Vacuum service...

Page 56: ...ID Ad i For each channel display a signal in volts which is caused by a resistor inside the connected transmitter This signal is used for identification of the connected transmitter Press the UP butt...

Page 57: ...characters via the keyboard Each of the input characters is returned to the terminal from the Multi Channel Controller The data transfer between the two units is visible on the terminal screen only P...

Page 58: ...ets are not actually used in the command Angle brackets Abbreviations enclosed by angle brackes identify control characters The entire expession including the brackets is replaced by a numerical value...

Page 59: ...nal the end of the message The Multi Channel Controller checks every message it receives Afterwards it sends a positive or a negative acknowledgement to the Host In a symbolic representation this proc...

Page 60: ...R ACK CR LF S ENQ R 0 0 0 CR LF Inquiring parameters of the switching function 1 S SP1 CR LF R ACK CR LF S ENQ R 0 2 0000E 01 5 0000E 00 CR LF Inquiring parameters of the switching function 2 S SP2 0...

Page 61: ...wo digits of the mantissa are always zero Linear transmitters CTR use all digits of the mantissa Input The above data may be input either in the exponential format or in the fixed point format The inp...

Page 62: ...Full scale range Full scale range of linear transmitters CTR DI GAS Gas type correction HVC High vacuum circuit on off Switch the high vacuum cir cuit of transmitters on off ITR Read a data string fr...

Page 63: ...3 SP4 Setpoint 4 Switching function 4 SP5 Setpoint 5 Switching function 5 SP6 Setpoint 6 Switching function 6 SPS Setpoint status Switching function status TAD Test A D converter Test the A D converte...

Page 64: ...hannel 2 2 Channel 3 b Characteristic curve 0 Logarithmic LoG 1 Logarithmic LoG A 2 Logarithmic LoG 6 3 Logarithmic LoG 3 4 Logarithmic LoG 0 5 Logarithmic LoG 3 6 Logarithmic LoGC1 7 Logarithmic LoGC...

Page 65: ...CK CR LF The acknowledgement is immediately followed by the continuous measure ment transmission The measurements are always output in the exponential format R b c ccccE cc d e eeeeE ee f g ggggE gg C...

Page 66: ...type is set to Other gas See Chapter 6 3 14 GAS 70 d Status of channel 2 see above e eeeeE ee Reading of transmitter 2 in current unit of mea surement f Status of channel 3 see above g ggggE gg Readi...

Page 67: ...R transmitters in the pressure range p 10 4 mbar is reduced by one digit 6 3 7 DGS Degas See Chapter 5 2 5 Degas function dEGAS 43 S DGS a b c CR LF R ACK CR LF S ENQ R a b c CR LF Note The degas func...

Page 68: ...LF Note The error status is a binary number It may be combined by the logical operator OR Example 1001 Device error and syntax error Parameters Significance a Error relay allocation 0 All errors 1 De...

Page 69: ...R ACK CR LF S ENQ R a b c CR LF 6 3 12 FSR Full scale range Full scale range of linear transmitters CTR DI See Chapter 5 2 3 Measuring range FS 42 S FSR a b c CR LF R ACK CR LF S ENQ Parameters Signi...

Page 70: ...r 8 0 50 mbar 9 0 50 Torr 10 1 mbar 11 1 Torr 12 2 mbar 13 2 Torr 14 5 mbar 15 5 Torr 16 10 mbar 17 10 Torr 18 20 mbar 19 20 Torr 20 50 mbar 21 50 Torr 22 100 mbar 23 100 Torr 24 200 mbar 25 200 Torr...

Page 71: ...b c CR LF Note When Other gas is selected the gas type dependence of the measure ments will be corrected by a variable correction factor See Chapter 6 3 5 COR 65 Parameters Significance a Filament for...

Page 72: ...of the ITR CTR 100 CTR 101 are transferred digitally A data string consists of 8 bytes hexadecimal numbers which are separated from each other by a comma See Reference 6 The data strings of the trans...

Page 73: ...linear transmitters CTR See Chapter 5 2 4 Offset oFS 42 S OFC a b c CR LF R ACK CR LF S ENQ R a b c CR LF Parameters Significance a Parameter setup lock 0 Off default 1 On Parameters Significance a O...

Page 74: ...CR LF 6 3 20 PNR Program number Firmware version number See Chapter 5 4 2 Firmware ver sion Pnr 52 S PNR CR LF R ACK CR LF S ENQ R a CR LF Parameters Significance a aaaaE aa Offset value of transmitte...

Page 75: ...tension See Pirani range extension PrE S PRE a b c CR LF R ACK CR LF S ENQ R a b c CR LF Parameters Significance a Status of channel 1 0 Measurement data ok 1 Underrange 2 Overrange 3 Transmitter erro...

Page 76: ...CR LF R ACK CR LF S ENQ R b c d CR LF Parameters Significance a Status of channel 1 0 Measurement data ok 1 Underrange 2 Overrange 3 Transmitter error 4 Transmitter switched off 5 No Transmitter 6 Ide...

Page 77: ...Note Parameters which have been changed manually control buttons are saved in the EEPROM automatically The SAV command is not required in this case b c d Queued error messages 0 No error 1 Watchdog ha...

Page 78: ...d 6 3 27 SP1 Setpoint 1 Switching function 1 See Chapter 5 1 Switching function parame ters PArA SP 36 S SP1 a b bbbbE bb c ccccE cc CR LF R ACK CR LF S ENQ R a b bbbbE bb c ccccE cc CR LF Parameters...

Page 79: ...36 S SPS CR LF R ACK CR LF S ENQ R a b c d e f CR LF b bbbbE bb Lower threshold value in the current unit of mea surement c ccccE cc Upper threshold value in the current unit of mea surement Parameter...

Page 80: ...st di t 55 S TDI a CR LF R ACK CR LF S ENQ R a CR LF Parameters Significance a aaaa ADC channel 1 Reading of transmitter 1 in volts 0 0000 11 0000 b bbbb ADC channel 2 Reading of transmitter 2 in volt...

Page 81: ...ACK CR LF S ENQ R aaaa CR LF The control character ENQ starts the test It takes approximately one sec ond to complete the test 6 3 32 TEP Test EPROM Test the EPROM See Chapter 5 4 7 EPROM test EP t 54...

Page 82: ...le relay or sev eral relays at a time Relay test In this test the relays switch irrespective of the actual pressure This may cause unintended switching of devices Unplug the RELAY connection before pe...

Page 83: ...e computer Note The keyboard status is a binary number It may be combined by the log ical operator OR Example 0011 DOWN and UP pressed at the same time Parameters Significance a Test status 0 Off 1 On...

Page 84: ...LF S ENQ R aaaa CR LF The control character ENQ starts the test It takes approximately one sec ond to complete the test 6 3 38 TRS Test RS232C interface Test the RS232C interface See Chapter 5 4 13 R...

Page 85: ...nt unit 47 S UNI a CR LF R ACK CR LF S ENQ R a CR LF 6 3 40 WDT Watchdog control See Chapter 5 4 3 Watchdog control dt C 53 S WDT a CR LF R ACK CR LF S ENQ R a CR LF Parameters Significance a Unit of...

Page 86: ...s however recommended that you make a note of the settings before updating See Section Default parameters 92 7 2 1 Preparations and selection 1 Switch the Multi Channel Controller off 2 Connect the RS...

Page 87: ...ntroller You can monitor the individual steps on the PC screen After approximately 1 min ute the transfer is completed 7 2 3 Restarting Proceed as follows after the firmware has been transferred compl...

Page 88: ...slope of one and runs through the origin i e Factor 1 slope of the line Offset 0 intersection with the y axis The curves of real A D converters differ slightly from these ideal values Cali brating the...

Page 89: ...on voltage source for 10 volts 10 000 V Calibration offset 1 Unplug the transmitter of the respective channel 2 Connect pin 2 Signal and Pin 12 Signal GND of a 15 pin D Sub plug with a wire strap See...

Page 90: ...3 4 SENSOR 20 Pin 2 10 000 V Pin 12 GND 7 Put the D Sub plug with the voltage source connections onto the sensor connection of the respective channel 8 Use the serial interface to send the command CAF...

Page 91: ...em error Or The Multi Channel Controller has been switched off and on without sufficient delay Press PARA to acknowledge The Multi Channel Con troller will acknowledge automatically after 2 s if the w...

Page 92: ...l packaging The packaging is required for storing the Multi Channel Controller and for shipping it to an Oerlikon Leybold Vacuum service center 9 2 Storage The Multi Channel Controller may only be sto...

Page 93: ...parameters Display Default User SP L 1 10 11 mbar SP H 9 10 11 mbar FiLt nor GAS n2 Cor 1 00 FS 1000 mbar oFS oFF 0 0000E 00 mbar S on HAnd 1 00E 03 mbar S oFF HAnd 1 00E 03 mbar unit bAr bAud 9600 Pr...

Page 94: ...ter CTR 91 GA 09 040 Oerlikon Leybold Vacuum GmbH D 50968 K ln 6 Operating Manual IONIVAC Transmitter ITR 90 GA 09 420 Oerlikon Leybold Vacuum GmbH D 50968 K ln 7 Operating Manual THERMOVAC Transmitte...

Page 95: ...bold Vacuum GmbH D 50968 K ln 13 Operating Manual CERAVAC Transmitter CTR 100 17200257_002_00 Oerlikon Leybold Vacuum GmbH D 50968 K ln 14 Operating Manual CERAVAC Transmitter CTR 101 130002066_002_A0...

Page 96: ...ents 60 64 Number formats 60 Protocol 58 Receiving 58 Sending 58 Computer interface 23 57 Resetting 75 Testing 56 83 Connections CONTROL 22 Ground 19 Mains connection 19 RELAY 21 RS232C 23 SENSOR 20 C...

Page 97: ...Error signal relay 51 Recorder output 48 Unit of measurement 47 Ground connection 19 H Hysteresis 37 I I O test 55 81 Identifying transmitters 32 81 Intended use 5 L Literature 93 Lower threshold valu...

Page 98: ...32C 23 SENSOR 20 Pirani range extension 46 Product versions 5 R RAM test 54 83 Range extension 46 Recorder output 48 63 RELAY connection 21 Residual dangers 6 RS232C connection 23 RS232C test 56 83 S...

Page 99: ...PROM test 54 80 Firmware version 52 73 I O test 55 81 Keyboard test 82 Parameter setup lock 53 72 RAM test 54 83 RS232C test 56 83 Selection 52 Torr lock 53 83 Watchdog control 53 84 Threshold values...

Page 100: ...Appendix GA 09 035 6 02 07 2011 Oerlikon Leybold Vacuum 99...

Page 101: ...4 327 5700 Fax 1 724 325 3577 info vacuum ex oerlikon com Oerlikon Leybold Vacuum GmbH Bonner Strasse 498 Bayenthal 50968 K ln GERMANY Tel 49 0 221 347 1234 Fax 49 0 221 347 1245 sales vacuum oerlikon...

Page 102: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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