NF ZA57630 Instruction Manual Download Page 1

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NF Corporation

IMPEDANCE ANALYZER

ZA57630

INSTRUCTION MANUAL

(BASICS)

Summary of Contents for ZA57630

Page 1: ...NF Corporation IMPEDANCE ANALYZER ZA57630 INSTRUCTION MANUAL BASICS...

Page 2: ......

Page 3: ...IMPEDANCE ANALYZER ZA57630 INSTRUCTION MANUAL BASICS DA00068820 003...

Page 4: ...in the United States WINDOWS EMBEDDED 8 1 INDUSTRY PRO Used with permission from Microsoft Other company names and product names used in this instruction manual may be trademarks or registered tradema...

Page 5: ...ates information for preventing the possibility of death or serious personal injury from electrical shock or other hazards or damage to this instrument in the use or handling of this instrument CAUTIO...

Page 6: ...re operating this instrument 3 Panel operations This chapter explains the function operating procedure default values and measurement values for each part of the display screen Read this chapter for a...

Page 7: ...o an earth ground so that ground resistance is 100 or less This product is automatically grounded by connecting a 3 pin power plug to a power outlet with a protective ground contact Check the power su...

Page 8: ...must refer to the instruction manual Electric shock danger symbol This symbol indicates a location that presents a risk of electric shock under specific conditions Warning symbol This contains inform...

Page 9: ...terference with other devices Disposal of this product To protect the environment follow the guidelines described below for the disposal of this product a This device is equipped with a lithium batter...

Page 10: ...Settings 3 111 4 Basic Operations 4 1 4 1 Display and Operation when Power Is Turned On 4 2 4 2 Simple Operation for First Time Use 4 5 4 3 Setting Measurement Signals 4 13 4 4 Measurement Controls 4...

Page 11: ...Contents vii ZA57630 5 11 Memory 5 36 5 12 External Memory 5 36 5 13 External Input Output Function 5 37 5 14 Miscellaneous Specifications 5 39...

Page 12: ...Diagram 3 14 Figure 3 10 Equivalent Circuit of Handler Interface 3 17 Figure 3 11 AUX Connector Pin Assignment Diagram 3 17 Figure 3 12 I O Connector Equivalent Circuit of AUX Connector 3 18 Figure 3...

Page 13: ...rement of DUT with Grounding 4 7 Figure 4 3 Impedance Measurement Connection Example 3 IMPD EXT Measurement of High Impedance DUT 4 7 Figure 4 4 Impedance Measurement Connection Example 4 IMPD 3T 4 9...

Page 14: ...1 Table 4 1 Display Modes Measurement Mode IMPD EXT IMPD 3T IMPD 2T 4 20 Table 4 2 Display Modes Measurement Mode G PH 4 21 Table 4 3 Graph Axis Parameters Measurement Mode IMPD EXT IMPD 3T IMPD 2T 4...

Page 15: ...1 1 ZA57630 1 Introduction 1 1 Features 1 2 1 2 Applications 1 3 1 3 Operating Principle 1 4 1 3 1 Operating Principle 1 4 1 3 2 Measurement Modes 1 6...

Page 16: ...efficiency in research and development and the shortening of tact time on manufacturing lines 4 Two types of measurement ports provided This instrument is equipped with two types of measurement ports...

Page 17: ...and evaluation testing on the manufacturing lines of electronic components such as inductors capacitors and sensors Evaluation and research of magnetic materials and dielectrics Evaluation of C V char...

Page 18: ...orm DFT and calculates impedance Z V I of each analysis frequency component from the obtained Fourier coefficient obtained through the DFT Parameters such as inductance L capacitance C and resistance...

Page 19: ...agnitude and phase angle The voltage vector is also calculated by performing A D conversion and DFT calculation for the voltage applied to the DUT The impedance magnitude and phase angle of the DUT is...

Page 20: ...quency is possible using an N connector Measurement mode G PH Gain phase measurement mode For measuring transfer characteristics of filters and amplifiers The connector to use for measurement differs...

Page 21: ...A57630 Connection example for measurement mode IMPD 2T Connection example for measurement mode G PH PORT3 ZA57630 LCUR PORT2 LPOT HPOT PORT1 HCUR OSC DUT PORT3 ZA57630 LCUR PORT2 LPOT HPOT PORT1 HCUR...

Page 22: ...1 8 ZA57630 Blank...

Page 23: ...efore Use 2 2 2 2 Assembly and Installation 2 4 2 2 1 General Precautions for Installation 2 4 2 2 2 Installation Conditions 2 4 2 2 3 Rack Mounting 2 5 2 3 Grounding and Power Supply Connection 2 10...

Page 24: ...e product or an accessory is missing report the problem to NF Corporation or its authorized agent Checking appearance Check that there is no scratch or dent on the panel surfaces controls connectors e...

Page 25: ...e above table lists the test fixtures and test leads that can be used when this instrument is in the IMPD 3T measurement mode Any model connected to the DUT by 2 terminals will be affected by the cont...

Page 26: ...ng temperature and humidity conditions Operation 0 to 40 C 5 to 85 RH absolute humidity 1 to 25 g m3 non condensing Storage 10 to 50 C 5 to 95 RH absolute humidity 1 to 29 g m3 non condensing Place th...

Page 27: ...re to install rack rails etc to support this instrument Failure to do so may result in injury or instrument damage due to falling CAUTION Provide the rack with ventilation holes or a cooling fan for c...

Page 28: ...2 2 Assembly and Installation 2 6 ZA 57630 Figure 2 1 Rack Mount Kit Assembly Drawing JIS...

Page 29: ...2 2 Assembly and Installation 2 7 ZA 57630 Figure 2 2 Rack Mount Kit Assembly Drawing EIA...

Page 30: ...2 2 Assembly and Installation 2 8 ZA 57630 Figure 2 3 Rack Mount Dimensions JIS...

Page 31: ...2 2 Assembly and Installation 2 9 ZA 57630 Figure 2 4 Rack Mount Dimensions EIA...

Page 32: ...range of this instrument 2 Turn off the power switch of this instrument The power switch is located on the rear panel 3 Connect the power cord to the power inlet on the rear panel of this instrument 4...

Page 33: ...t the power cord can be disconnected from the inlet of this instrument provide sufficient space around the inlet and to ensure that the power plug can be disconnected from the outlet use an outlet in...

Page 34: ...l 4 Execute self calibration Tap Calibration in top menu 2 3 Select Calibration CALIBRATION and then tap the EXEC function key A CALIBRATION BOX connection confirmation message appears Tap OK and then...

Page 35: ...rry out the performance test before using this instrument for important measurements and tests The performance test should be carried out by a person who is familiar with measuring instrument specific...

Page 36: ...2 14 ZA 57630 Blank...

Page 37: ...perations 3 1 Functions and Operations of Panel Parts 3 2 3 2 Input and Output Connectors 3 8 3 3 Overview of the Operation Screens 3 19 3 4 Operation Tree 3 32 3 5 Setting Screen Reference 3 42 3 6 I...

Page 38: ...1 Front Panel LCD touch panel input Displays the setting menus and measurement results You can configure the settings by touching the screen Standby switch Metal terminal grounded to the enclosure Me...

Page 39: ...label VGA connector DC BIAS OUT connector Air exhaust vent LAN connector POWER switch RS 232 connector GPIB connector Power inlet The center pin is for the protective ground terminal Be sure to perfo...

Page 40: ...a key with this name or symbol printed on the key top Keys that do not have printed labels are identified by the names that appear above them on the panel A cursor key indicates the direction by its...

Page 41: ...ANCEL ESC This cancels the editing operation changing of a setting and returns the setting to the value before editing ENTER When this is pressed the item with the focus on it switches to the editing...

Page 42: ...ement controls STOP This stops sweep or spot measurement DOWN UP These buttons starts sweep measurement DOWN performs the sweep in the direction of upper limit lower limit and UP in the direction of l...

Page 43: ...setting parameters 0 to 9 These enter numeric values EXP This is used to enter numeric values in exponential format BS This is the backspace key Pressing this key during numeric input deletes the numb...

Page 44: ...EXT OSC Outputs a signal to drive the DUT PORT1 Measures the voltage signal applied to the DUT PORT2 Measures the signal resulting from converting the current flowing to the DUT to voltage Measuremen...

Page 45: ...ent Do not connect a charged capacitor If there is a possibility that the DUT may be charged discharge the DUT sufficiently before connecting it If the DUT is discharged to the measurement connectors...

Page 46: ...al signal There is a risk of damage to this instrument Do not connect a charged capacitor If there is a possibility that the DUT may be charged discharge the DUT sufficiently before connecting it If t...

Page 47: ...nnectors this instrument may be damaged 3 2 4 DC BIAS OUT This is an output connector for supplying DC bias to the DUT EUT Signal specifications Maximum output voltage 10 V Output impedance 600 nomina...

Page 48: ...the internal reference clock of this instrument and this instrument will operate using the external clock The accuracy of the measurement frequency is determined by the accuracy of the clock frequenc...

Page 49: ...specifications Output voltage 1 Vp p 50 Output waveform Square Output impedance 50 nominal value AC coupling Connector Rear panel BNC connector Figure 3 8 Function of 10 MHz REF OUT Connector CAUTION...

Page 50: ...parison When ZONE comparison 1 IN TRIG TRIG 26 IN RCL0 2 IN RCL1 27 IN RCL2 3 IN RCL3 28 IN RCL4 4 IN RCL5 29 IN RCL6 5 IN RCL VALID 30 OUT BIN1 P HI Y1 OUT 6 OUT BIN2 P IN Y1 IN 31 OUT BIN3 P LO Y1 N...

Page 51: ...nd secondary parameters pass OUT Signal for when at least one of the primary and secondary parameters fails When ZONE comparison Y1 OUT Y1 IN Y1 comparison result signals Y2 OUT Y2 IN Y2 comparison re...

Page 52: ...nt consumption 45 mA 5 V 100 mA 12 V 180 mA 24 V Internal DC power 5 V typ 70 mA max connected to the enclosure Also output during standby Isolation 42 Vpk each signal common vs enclosure When the int...

Page 53: ...includes signals to indicate the measurement signal output on off state of this instrument and the 4 bit logic output and 3 bit logic input and can be used for external device control When a sequence...

Page 54: ...ss high 2 6 V or more Output signal level TTL level 0 to 5 V nominal value I O equivalent circuit Figure 3 12 I O Connector Equivalent Circuit of AUX Connector Connectors when power is off The connect...

Page 55: ...This area displays the remote control status measurement status and other statuses of this instrument Figure 3 14 Status Display Area Measurement modes IMPD EXT Impedance measurement uses external cu...

Page 56: ...ith the internal reference clock permission to use an external reference clock is set but an external clock has not been detected Remote control status Nothing is displayed Local control in progress R...

Page 57: ...tion area This area is used to perform the basic operations of markers for reading measurement data Figure 3 18 Marker Operation Area Trace This switches the data trace indicated by the active marker...

Page 58: ...3 Overview of the Operation Screens 3 22 ZA 57630 operating procedures and function details refer to 3 5 6 Marker Menu in this instruction manual and 1 7 Marker Operation in Instruction Manual Advance...

Page 59: ...erarchy is called the top menu Figure 3 19 Menu Display Example Pressing the MENU key or tapping the MENU button toggles between displaying and hiding a menu The top menu has three pages and the page...

Page 60: ...the same operation as tapping the menu with the focus on it and that menu becomes the target for parameter editing Function keys The display changes depending on the open menu Tapping a button execut...

Page 61: ...the change is applied immediately The modification operation is not possible if the setting range is exceeded Figure 3 23 Numerical Settings Immediate Settings Press ENTER CANCEL or CLOSE to end the p...

Page 62: ...uttons for metric prefixes are displayed in the numerical input palette You can set the exponent portion by tapping an metric prefix button such as m or k instead of directly entering it with the EXP...

Page 63: ...lly press ENTER or tap OK Pressing CANCEL discards the operation until that point in time and returns the value to the original setting Palette operations immediate settings List operations allow you...

Page 64: ...u cancel editing the text entered edited up until that point in time will be applied The characters that can be handled by this instrument are shown below However there are some characters that cannot...

Page 65: ...630 If you tap the SHIFT button in the text input palette the character set of the palette changes Figure 3 28 Switching Text Input Palette Uppercase alphabet letter set Lowercase alphabet letter set...

Page 66: ...Figure 3 29 Execution Operations Requiring Confirmation Execution operations immediate execution The procedure is the same as for Execution operations requiring confirmation but an execution confirma...

Page 67: ...ER1 to MARKER8 and MARKER1 can be used be used as the normal marker and MARKER2 to MARKER8 can be used as normal markers markers or TRKG markers A marker is a marker to read the information of the X Y...

Page 68: ...TER key Confirm the settings Up down left right keys Move the cursor and change numerical values Modify knob Select menus change parameters move markers etc SCREEN COPY key Execute an LCD screen copy...

Page 69: ...surement signal amplitude limit ALC Set the automatic level control ALC Enable or disable TOLERANCE Set the permissible error RETRY TIMES Set the maximum number of retries CORRECTION FACTOR Set the co...

Page 70: ...EQ TRIGGER Set sequence measurement trigger SWEEP ITEM Set the sweep item SWEEP UPPER Set the sweep upper limit SWEEP LOWER Set the sweep lower limit RESOLUTION Set the sweep resolution SLOW SWEEP Aut...

Page 71: ...Set the maximum X axis value X MIN Set the minimum X axis value Y1 MAX Set the maximum Y1 axis value Y1 MIN Set the minimum Y1 axis value Y2 MAX Set the maximum Y2 axis value Y2 MIN Set the minimum Y2...

Page 72: ...E Set the marker search values X Set the X search value Y1 Set the Y1 search value Y2 Set the Y2 search value X Set the X search value Y1 Set the Y1 search value Y2 Set the Y2 search value SAVE Save t...

Page 73: ...ement range RANGE PORT2 3 Set the port 2 measurement range RANGE 4 Set the impedance measurement range OVER LEVEL PORT1 3 Set the level for port 1 over level detection OVER LEVEL PORT2 3 Set the level...

Page 74: ...Set the message terminator LAN Set Ethernet DHCP Select the method to determine the IP address IP ADDRESS Set the IP address DEFAULT GATEWAY Set the default gateway SUBNET MASK Set the subnet mask DNS...

Page 75: ...le Z0 2 Set characteristic impedance ELEC LENGTH 2 Set the electrical length OPEN_PEXT CORR 2 Set open correction SHORT_PEXT CORR 2 Set short correction LOAD_PEXT CORR 2 Set load correction FUNCTION 2...

Page 76: ...piezoelectric equivalent circuit estimation C0 MODE 1 Select the method to determine the C0 value FREQ RESOLN 1 Set the frequency resolution PZT CONST 1 Calculate the piezoelectric constant REL PERMT...

Page 77: ...Y1 lower limit Y2 HI 1 Set the Y2 upper limit Y2 LO 1 Set the Y2 lower limit IMMED SET 1 Set the deviation ACTION 1 Comparison action BEEP 1 Turn the beep on off Other Other settings BEEP Turn the be...

Page 78: ...mediate settings Numerical settings requiring confirmation Numerical settings List operations immediate settings List operations requiring confirmation Palette operations immediate settings Text setti...

Page 79: ...PORT1 and PORT2 connectors are used IMPD 3T Measure the impedance Measurement is performed using a test fixture for an LCR meter The HCUR HPOT LPOT and LCUR connectors are used IMPD 2T Measure the imp...

Page 80: ...ncy limit to FREQUENCY MKR FREQ Copy the frequency of the active marker to FREQUENCY CURR FREQ Copy the current measurement signal frequency to FREQUENCY EDIT Set the frequency with the numerical inpu...

Page 81: ...that set here will not be output even when ALC is enabled Setting procedure Numerical settings immediate settings Numerical settings Functions of function keys SWEEP MAX LIMIT Copy the sweep upper amp...

Page 82: ...eys ALC RETRY TIMES Set the maximum number of retries This sets the maximum number of retries number of retry measurements for ALC Amplitude adjustment stops when the maximum number of retries set her...

Page 83: ...eep DC BIAS HV BIAS Set the HV DC bias This enables or disables high voltage bias HV bias Setting procedure List operations immediate settings OFF Disable HV bias ON Enable HV bias Supplementary expla...

Page 84: ...ORT SET Set the AUX connector port This sets the digital output port value that is output from the AUX connector on the rear panel Setting procedure Numerical settings immediate settings Numerical set...

Page 85: ...time the output is actually turned off Please note that at 10 Hz it takes up to 105 seconds about 27 8 hours at the longest FREQ CHNG MODE Set the phase for when the frequency changes This sets wheth...

Page 86: ...This is set when the reference clock with which this instrument is operating is output from the 10MHz REF OUT connector on the rear panel This is used to make the frequency accuracy common among this...

Page 87: ...CS Series capacitance F CP Parallel capacitance F D Dissipation factor unitless number QC Quality coefficient of capacitor unitless number LS Series inductance H LP Parallel inductance H QL Quality co...

Page 88: ...tary explanation The V1 V2 V and I measurement items are the voltage and current amplitude values measured by this instrument The impedance and gain are calculated and displayed based on these measure...

Page 89: ...r 0 1 ms whichever is the largest Functions of function keys EDIT Set the measurement start delay time with the numerical input palette MODIFY Modify the measurement start delay time with the knob or...

Page 90: ...mentary explanation When the measurement mode is G PH the handler interface cannot be set to the trigger source REPEAT Set the repeat mode If repeat is on the measurement is repeated For sweep measure...

Page 91: ...nce measurement EDIT Set the maximum sequence number with the numerical input palette MODIFY Modify the maximum sequence number with the knob or cursor keys SEQ TRIGGER Set the trigger for sequence me...

Page 92: ...0 Hz to 36 MHz resolution of 10 Hz When an measurement signal amplitude sweep or a DC bias sweep is performed the setting range differs depending on the DUT drive amplifier gain setting set based on t...

Page 93: ...ls on automatic high density sweep refer to 1 5 Automatic High Density Sweep in Instruction Manual Advanced Setting procedure List operations immediate settings OFF Disable the automatic high density...

Page 94: ...whichever is the largest Y The setting range is 1a to 999 GS and the resolution is 3 digits or 1 aS whichever is the largest The setting range is 0 001 to 179 999 and the resolution is 0 001 dBR The s...

Page 95: ...keys RESONANT TRACK TARGET PHASE Set the phase for resonant frequency This sets the phase for resonant frequency Usually 0 should be used but you can also set the phase shift portion depending on the...

Page 96: ...FACTOR Set the correction factor This sets the correction factor tracking sensitivity for resonant frequency tracking Usually 100 is no problem but tracking control may be unstable depending on the D...

Page 97: ...the graph title This sets the graph title Setting procedure Text settings requiring confirmation Text settings Up to 63 characters can be entered Functions of function keys EDIT Set the title with th...

Page 98: ...and Y2 axis Setting procedure Palette operations immediate settings There are formats that cannot be selected depending on the setting of the X axis format For details refer to 4 5 Setting Sweep Meas...

Page 99: ...V I The Y1 axis is voltage amplitude Vrms and the Y2 axis is current amplitude Arms When the measurement mode is IMPD 3T and IMPD 2T FREQUENCY Z The Y1 axis is frequency Hz and the Y2 axis is phase of...

Page 100: ...equalizing are performed DISPLAY TRACE Set the display of data DISPLAY TRACE MEAS Set the display of measurement data DISPLAY TRACE REF1 Set the display of reference data 1 DISPLAY TRACE REF2 Set the...

Page 101: ...data Y1 DATA MAX SCALE Set the maximum Y1 axis value according to the data Y1 DATA MIN SCALE Set the minimum Y1 axis value according to the data Y2 DATA SCALE Set the Y2 axis range according to the d...

Page 102: ...lay the phase with 360 subtracted Supplementary explanation This function is valid when the phase display range is UNWRAP APERTURE Set the number of moving average data points aperture This sets the n...

Page 103: ...ADATION Automatically set the reference data trace colors by changing the gradation This automatically sets the colors of the REF1 to REF8 reference data traces based on the color of the MEAS trace by...

Page 104: ...MARKER1 to 8 MARKER8 and the setting resolution is 1 Functions of function keys EDIT Set the active marker with the numerical input palette MODIFY Modify the active marker with the knob or cursor keys...

Page 105: ...ve to the position of the next larger Y value of X X BOTTOM Move to the position where the X value is the minimal If there are multiple positions the marker moves to the position where the X value is...

Page 106: ...f the next smaller Y1 value of Y1 PEAK NEXT Y1 PEAK Move to the position of the next larger Y1 value of Y1 PEAK Supplementary explanation The marker that moves is the active marker SEARCH Y2 Execute a...

Page 107: ...2 Execute a marker search for BPF BW3 Execute a marker search for BEF For details on BW searches refer to 1 7 Marker Operations in Instruction Manual Advanced AUTO SEARCH Set to search automatically w...

Page 108: ...value SEARCH VALUE Y1 Set the Y1 search value SEARCH VALUE Y2 Set the Y2 search value SEARCH VALUE X Set the X search value SEARCH VALUE Y1 Set the Y1 search value SEARCH VALUE Y2 Set the Y2 search va...

Page 109: ...ce 1 REF2 Read the values of reference data trace 2 REF8 Read the values of reference data trace 8 MARKERn SEQ Set marker n target sequence number n 1 to 8 This sets the sequence number 1 to 32 of the...

Page 110: ...T Set the reference data copy destination with the numerical input palette MODIFY Modify the reference data copy destination with the knob or cursor keys MEAS TRACE COPY EQU CORR MEM Copy to equalizin...

Page 111: ...correction data For the equalizing open correction short correction and load correction operating procedures refer to 1 8 Error Correction in Instruction Manual Advanced AUTO STORE Set automatically...

Page 112: ...s displays the conditions excerpt set at the time the current active data MEAS DATA or REF DATA was measured Please note that the displayed setting conditions are not the current settings of this inst...

Page 113: ...ome measurement conditions are indicated as NaN Not a Number depending on the data For example MEASURE TIME is indicated as NaN for the data of equivalent circuit estimation results refer to 1 11 Equi...

Page 114: ...Set auto range 10 to 1 M Set a fixed range When the measurement mode is IMPD 2T the setting range is AUTO and 1 to 1 k OVER LEVEL PORT1 Set the level for port 1 over level detection OVER LEVEL PORT2...

Page 115: ...set this to STOP and also set OSC ON OFF SYNC to SYNC AC DC or SYNC AC measurement signal output turns off automatically upon over level detection WTG FAC PORT1 Set the PORT1 weighting factor WTG FAC...

Page 116: ...e operations Perform operations such as saving and loading the setting information of this instrument CONDITION FILE USB MEMORY Switch to the menu for performing measurement condition file operations...

Page 117: ...from the internal memory or a USB memory device Setting procedure Execution operations requiring confirmation Functions of function keys DELETE Delete a measurement condition file CONDITION FILE RENAM...

Page 118: ...folder DATA FILE Perform data file operations This performs operations such as saving and loading the measurement data DATA FILE USB MEMORY Switch to the menu for performing data file operations for...

Page 119: ...l memory or a USB memory device Setting procedure Numerical settings requiring confirmation Numerical settings Execution operations requiring confirmation Functions of function keys LOAD Load referenc...

Page 120: ...tended end load correction data The load destination numbers can be modified in the above Calibration menu DATA FILE DELETE Delete a data file This deletes a data file from the internal memory or a US...

Page 121: ...annot be accessed If removed from the USB port and then reinserted it will be recognized again and become able to be accessed SCRN COPY FILE NUMBER Set the screen copy file numbering This sets the ini...

Page 122: ...Apply the setting changes to the hardware Even if the remote relationship setting is changed it will not take effect in the hardware until the INTERFACE APPLY function key is pressed SELECT Select th...

Page 123: ...ge is 0 to 30 and the setting resolution is 1 Functions of function keys EDIT Set the address with the numerical input palette MODIFY Modify the address with the knob or cursor keys INTERFACE RS 232 S...

Page 124: ...the IP address INTERFACE LAN DEFAULT GATEWAY Set the default gateway INTERFACE LAN SUBNET MASK Set the subnet mask INTERFACE LAN DNS Set the DNS server These settings specify the IP address of this i...

Page 125: ...a handler trigger Setting procedure List operations immediate settings UP Start up sweep measurement with a trigger DOWN Start down sweep measurement with a trigger SPOT Start spot measurement with a...

Page 126: ...URE Start correction data measurement when measurement mode is IMPD 3T and IMPD 2T only COPY TO REF8 Copy the open correction data to reference data 8 REF8 EDIT Set the open correction data number wit...

Page 127: ...R Set load correction This sets the load correction function It can be set when the measurement mode is IMPD EXT IMPD 3T and IMPD 2T LOAD CORR FUNCTION Set load correction Enable or disable the load c...

Page 128: ...ALUE Specify the load standard values Set the frequency and load standard values Up to 30 sets of load standard values 30 frequencies can be set When the parameter is selected and the knob is turned c...

Page 129: ...e to 75 EDIT Set the characteristic impedance value unit with the numerical input palette MODIFY Modify the characteristic impedance value unit with the knob or cursor keys The setting range is 1 00 t...

Page 130: ...ation becomes OFF PORT EXT SHORT_PEXT CORR Set short correction at port extension tip This sets the short correction function at port extension tip It can be set when the measurement mode is IMPD EXT...

Page 131: ...ion tip is enabled this instrument will operate with open correction and short correction at port extension tip both forcibly enabled internally even if those functions were set to off disabled PORT E...

Page 132: ...equency The setting range is 1 0 T to 1 0 T and the setting resolution is 6 digits or 1 a 10 18 whichever is larger for the port extended end load standard values SLOPE COMP Set the slope compensation...

Page 133: ...is IMPD EXT and G PH Setting procedure Execution operations requiring confirmation Functions of function keys EXEC Start self calibration When self calibration is started the cable connection confirm...

Page 134: ...it estimation refer to 1 11 Equivalent Circuit Estimation in Instruction Manual Advanced EQUIV CKT FITTING CKT TYPE Select the equivalent circuit Setting procedure List operations immediate settings C...

Page 135: ...TING FIT Execute equivalent circuit estimation and save the results Setting procedure Text settings requiring confirmation Numerical settings Execution operations immediate execution Functions of func...

Page 136: ...ivalent circuit estimation using the fine fitting algorithm RESN FREQ DISP Display the characteristic frequency FIT NORMAL has an inferior fit accuracy but is capable of a fit with a certain degree of...

Page 137: ...ncy resolution of this time and then displayed on the graph PZT PZT CONST Calculate the piezoelectric constants PZT PZT CONST PZT CONSTANT Display the piezoelectric constant calculation dialog box Thi...

Page 138: ...nction keys EDIT Set the core cross sectional area unit mm2 with the numerical input palette MODIFY Modify the core cross sectional area unit mm2 with the knob or cursor keys REL PERMB MAG PATH LENGTH...

Page 139: ...t mm of one turn of the coil with the knob or cursor keys REL PERMB WIRE RESISTIVITY Set the winding wire resistivity Setting procedure Numerical settings requiring confirmation Numerical settings Fun...

Page 140: ...Advanced for details on the handler interface BIN Set BIN sorting LIMIT comparison This sets the BIN sorting or LIMIT comparison performed in spot measurement BIN FUNCTION Set the sorting function to...

Page 141: ...comparison performed in sweep measurement ZONE FUNCTION Set the comparison function to ON or OFF Setting procedure List operations immediate settings OFF Disable zone comparison ON Enable zone compari...

Page 142: ...s of function keys NA Set as not applicable for comparison EDIT Set the comparison values with the numerical input palette MODIFY Modify the comparison values with the knob or cursor keys ZONE IMMED S...

Page 143: ...the date and time with the knob or cursor keys The date is displayed in the yyyy mm dd format and time in the hh mm ss format The time is in the 24 hour format The setting range is 1970 to 2099 for y...

Page 144: ...vice INITIALIZE Restore this instrument to the factory default settings For details on the factory default state refer to 3 6 Initial Settings TOUCH PANEL ADJ Adjust the touch panel position This perf...

Page 145: ...ng Screen Reference 3 109 ZA 57630 The setting range is 0 to 100 and the setting resolution is 1 The higher the value the higher the brightness Even if this is set to 0 the screen will not completely...

Page 146: ...o sweep The parameter set here becomes the X axis of the graph The setting is the same as SWEEP ITEM in 3 5 4 Sweep Menu SWEEP UPPER Set the sweep upper limit The setting is the same as SWEEP UPPER in...

Page 147: ...l settings refer to Table 3 4 Initial Settings Whether each parameter is a resume target measurement data save target and sequence target are also displayed The Y and N in the table below have the fol...

Page 148: ...ABLE Y Y N N 10MHz REF OUT DISABLE ENABLE DISABLE Y Y N N Measure PRMTR1 PRMTR6 IMPD EXT IMPD 3T IMPD 2T Z Z Y Y R X G B CS CP D QC LS LP QL RS RP S S S D S S S D V1 1 V2 1 V 2 I 2 FREQUENCY STATUS NA...

Page 149: ...AMPLITUDE 0 to 999 GVrms 1 mVrms DC BIAS 999 G to 999 GV 0 V TIME However SWEEP UPPER SWEEP RESOLN LIN LOG LOG Y Y Y Y 3 to 2000 100 Y Y Y Y SLOW SWEEP ON OFF OFF Y Y N N TYPE IMPD EXT IMPD 3T IMPD 2...

Page 150: ...2 LIN Y1 LIN Y2 LIN Y Y N N IMPD EXT IMPD 3T IMPD 2T Z Z Y Y R X G B CS RS CS D CS QC CP RP CP D CS QC LS RS LS QL LP RP LP QL S D S S S D S S V1 V2 1 V I 2 FREQUENCY Z X X B Z Z Y Y Y N G PH dBR R a...

Page 151: ...Y N N PLOT COLOR MEAS Y1 0x000000 to 0xFFFFFF 0xA2142F Y Y N N MEAS Y2 0x000000 to 0xFFFFFF 0x0072BD Y Y N N REF1 Y1 0x000000 to 0xFFFFFF 0xD95319 Y Y N N REF1 Y2 0x000000 to 0xFFFFFF 0x4DBEE E Y Y N...

Page 152: ...0 T to 1 0 T 1 0 Y Y N N Y1 1 0 T to 1 0 T 1 0 Y Y N N Y2 1 0 T to 1 0 T 1 0 Y Y N N X 1 0 T to 1 0 T 1 0 Y Y N N Y1 1 0 T to 1 0 T 1 0 Y Y N N Y2 1 0 T to 1 0 T 1 0 Y Y N N MARKER1 MODE OFF NORMAL O...

Page 153: ...N Y PORT2 AUTO 7 Vrms 5 Vrms 2 Vrms 1 Vrms 500 mVrms 200 mVrms 100 mVrms 50 mVrms 20 mVrms 10 mVrms AUTO Y Y N Y IMPD 3T AUTO 1 M 100 k 10 k 1 k 100 10 AUTO Y Y N Y IMPD 2T AUTO 1 k 100 10 1 OVER LEVE...

Page 154: ...FLOW CONTROL NONE SOFT HARD NONE N Y N N TERMINATOR CR LF LF CR LF N Y N N LAN DHCP ENABLE DISABLE ENABLE N 1 Y N N IP ADDRESS 0 0 0 0 to 255 255 255 255 192 16 0 2 N 1 Y N N GATEWAY 0 0 0 0 to 255 25...

Page 155: ...TD FMT CS D CP D RP CP RS LS RS X Z CS D Y Y N Y LOAD STD VALUE 1 0 T to 1 0 T 1 0 Y Y N Y PORT EXTENSION ON OFF OFF Y Y N Y Z0 1 00 to 999 50 0 Y Y N Y ELEC LENGTH 0 000 to 999 999 m 0 000 m Y Y N Y...

Page 156: ...T CONSTANT PZT CONSTANT Disk Radial Disk Thickness extensional Rod Axial Plate Length extensional Plate Thickness shear Disk Radial Y Y N N l 0 to 999 999 mm 10 0 mm Y Y N N a 0 to 999 999 mm 10 0 mm...

Page 157: ...Y Y N N Y1 HI NA 999 999 Gto 999 999 G NA Y Y N N Y1 LO NA 999 999 Gto 999 999 G NA Y Y N N Y2 HI NA 999 999 Gto 999 999 G NA Y Y N N Y2 LO NA 999 999 Gto 999 999 G NA Y Y N N IMMED SET SWEEP 999 999...

Page 158: ...S S D S S V1 V2 1 V I 2 FREQUENCY Z X X B Z Z Y Y N N G PH dBR R a b dBR GD R GD V1 V2 FREQUENCY R dBR b dBR SWEEP ITEM FREQUENCY AMPLITUDE DC BIAS TIME FREQUE NCY Y Y N N SWEEP UPPER FREQUENCY 10 to...

Page 159: ...on Startup 4 4 4 2 Simple Operation for First Time Use 4 5 4 2 1 Common Operations 4 5 4 2 2 Measuring Impedance Measurement Mode IMPD EXT 4 6 4 2 3 Measuring Impedance Measurement Mode IMPD 3T 4 9 4...

Page 160: ...ate Check that an appropriate power supply is being supplied to the power cord connected to the power inlet and that the power switch is set to the position Press the standby switch The standby switch...

Page 161: ...tage or by setting the power switch to the position standby switch operation is not necessary However the settings when the power is restored will not be in the state immediately before the power inte...

Page 162: ...are configured and self diagnosis is performed If an error is detected an error message is displayed If that happens turn off the power switch on the rear panel wait at least five seconds and then tur...

Page 163: ...ettings For details on the settings that are reset refer to 3 6 Initial Settings SETUP Key Press the SETUP key on the front panel or tap the SETUP button to display the Setup menu This shortcut menu a...

Page 164: ...correction and load correction For details on short correction and load correction refer to 1 8 Error Correction in Instruction Manual Advanced When the measurement signal output is amplified by a DU...

Page 165: ...nt detection enables the detection of a micro current of nA order or pA order in magnitude which is difficult to measure with a shunt resistor or current probe so a high impedance DUT can be measured...

Page 166: ...voltage probe current detection resistor current probe etc Set the following items in the Range menu WTG FAC PORT1 Set the reciprocal of the conversion ratio of the voltage probe WTG FAC PORT2 Set the...

Page 167: ...iations due to contact resistance using an actual DUT before use Set up this instrument and perform measurement in the following order 1 Set the measurement mode to IMPD 3T in the Mode menu 2 Reset th...

Page 168: ...urement mode Figure 4 5 How to Check Operation Using 100 RESISTOR IMPD 3T The measurement result of impedance Z and phase Z are normal if they are roughly in the following ranges 1 MHz or less Z 100 2...

Page 169: ...ent in the following order 1 Set the measurement mode to IMPD 2T in the Mode menu 2 Reset the settings and then connect the DUT 3 Tap SETUP or press the SETUP key and then change each setting item as...

Page 170: ...ress the SETUP key and then change each setting item as necessary DISPLAY MODE Y Set the graph Y axis item SWEEP ITEM Set the sweep item SWEEP UPPER Set the sweep upper limit SWEEP LOWER Set the sweep...

Page 171: ...ent Synchronous Driving in Instruction Manual Advanced Setting the frequency The following describes how to set the measurement signal frequency The frequency can be set in the range of 10 Hz to 36 MH...

Page 172: ...he bottom of the LCD to set the amplitude setting SWEEP MIN AMPTD Set the amplitude to the sweep lower amplitude limit SWEEP MAX AMPTD Set the amplitude to the sweep upper amplitude limit MKR AMPTD Se...

Page 173: ...enables directly setting it as the signal amplitude to apply to the DUT If the DUT drive amplifier gain is set to K 0 to 3 K Vrms will become the setting range The amplitude limit setting range and mu...

Page 174: ...setting range is limited to a maximum of 0 74 V 5 3 1 42 2 When HV bias is used the settings for the measurement signal amplitude converted to the peak value and DC bias are limited to a total of 42 V...

Page 175: ...4 3 Setting Measurement Signals 4 17 ZA57630 For details on advanced measurement signal settings other than the above refer to 1 4 Measurement Signal Control in Instruction Manual Advanced...

Page 176: ...controlled with the MEASURE keys on the front panel DOWN key Start down sweep measurement SPOT key Start spot measurement UP key Start up sweep measurement STOP key Stop measurement Example of screen...

Page 177: ...l amplitude voltage or current DC BIAS Sweep the DC bias ZERO SPAN Zero span sweep In the case of the measurement signal amplitude sweep whether voltage amplitude or current amplitude sweeping is perf...

Page 178: ...ted differ depending on the measurement mode If a setting other than one in this table is set nothing will be displayed in the graph LIN indicates the linear axis and LOG the logarithmic axis Furtherm...

Page 179: ...BR Nichols plot R a b Nyquist plot 1 LOG can be set only when SWEEP ITEM is FREQUENCY or AMPLITUDE 2 When SWEEP ITEM is ZER SPAN 3 Can be set only when SWEEP ITEM is FREQUENCY The axis setting paramet...

Page 180: ...plex relative permeability real part None S Complex relative permeability imaginary part None 1 V1 V2 V and I are the voltage and current values measured by this instrument Whereas impedance Z and oth...

Page 181: ...p Series resistance RP Z cos p Parallel resistance QL None tan p Quality coefficient inductor QC None tan p Quality coefficient capacitor D None 1 tan p Dissipation factor capacitor D None S S Dissip...

Page 182: ...Hz are R unitless and respectively Furthermore each parameter is defined as follows p 180 rad angular frequency 2 f rad s Table 4 6 Display Parameter Conversion Formulas Measurement Mode G PH Display...

Page 183: ...ed by tapping the parameter buttons in the spot measurement result screen If you select NA that parameter will be hidden only PRMTR3 to 6 The types and formulas of parameters other than STATUS are the...

Page 184: ...r level information 0 to 15 Blank Measurement range FIX When fixed range AUTO When auto range The over level information is a decimal number from 0 to 15 with the following value added When voltage de...

Page 185: ...5 6 Measurement Connectors Measurement Mode G PH 5 14 5 7 Measured Signal Control Section 5 18 5 8 Measurement Accuracy 5 20 5 9 Measurement Processing Section 5 31 5 10 Display Section 5 35 5 11 Mem...

Page 186: ...ally DUT drive amplifier probe etc can be used Measurement mode IMPD 3T Impedance measurement mode Test fixture and test leads for LCR meters can be used Measurement mode IMPD 2T Impedance measurement...

Page 187: ...citance 1 a to 999 999 G F and 0 F resolution 6 digits or 1 aF RS RP resistance 1 a to 999 999 G and 0 resolution 6 digits or 1 a Z Y phase of impedance phase of admittance 180 180 000 to 179 999 reso...

Page 188: ...S S common to S S S S S S in 5 2 1 Measurement Mode IMPD EXT FREQUENCY common to FREQUENCY in 5 2 1 Measurement Mode IMPD EXT 5 2 3 Measurement Mode G PH Gain dBR gain dB 999 999 dB to 999 999 dB res...

Page 189: ...LC is OFF Connector BNC connector front panel HCUR OSC Frequency Setting range 10 Hz to 36 MHz Setting resolution 10 Hz Accuracy 10 ppm when using internal reference clock Measurement signal amplitude...

Page 190: ...UT drive amplifier gain setting K There is a following restriction between the measurement signal amplitude setting and normal DC bias setting Measurement signal amplitude setting Vrms 1 42 Normal DC...

Page 191: ...ly Setting range 1 00000E 15 to 999 999E 09 Setting resolution 6 digits or 1E 15 Remark This function corrects the conversion ratios of the voltage probe current probe shunt resistance etc for measure...

Page 192: ...a voltage and ALC is OFF Connector BNC connector front panel HCUR OSC Frequency Setting range 10 Hz to 36 MHz when HV DC bias is off 1 kHz to 36 MHz when HV DC bias is on Setting resolution 10 Hz Acc...

Page 193: ...han the setting range of the measurement signal amplitude depending on product variations or DUT impedance Output limit Setting range Voltage 10 Vrms to 3 00 Vrms Current 100 nArms to 60 mArms Setting...

Page 194: ...no load There is a following restriction between the measurement signal amplitude setting and HV DC bias setting Measurement signal amplitude setting Vrms 1 42 HV DC bias setting V 42 0 Setting resol...

Page 195: ...and ALC is OFF Connector N connector front panel PORT3 Frequency Setting range 10 Hz to 36 MHz when HV DC bias is off 1 kHz to 36 MHz when HV DC bias is on Setting resolution 10 Hz Accuracy Common to...

Page 196: ...ed constantly will be narrower than the setting range of the measurement signal amplitude depending on product variations or DUT impedance Output limit Setting range Voltage 10 Vrms to 3 00 Vrms Curre...

Page 197: ...ent is common for the measurement signal amplitude and normal DC bias The normal DC bias and HV DC bias cannot be used at the same time HV DC bias Setting range 40 0 V to 40 0 V when no load There is...

Page 198: ...front panel HCUR OSC Frequency Setting range 10 Hz to 36 MHz Setting resolution 10 Hz Accuracy Common to Frequency in 5 3 1 Front Panel HCUR OSC Measurement signal amplitude Setting range 0 to 999 GV...

Page 199: ...on between the measurement signal amplitude setting and normal DC bias setting Measurement signal amplitude setting Vrms 1 42 Normal DC bias setting V 5 0 K Setting resolution 3 digits or MDC V whiche...

Page 200: ...mV 200 mV 310 mV 500 mV 780 mV 1 V 1 6 V 2 V 3 1 V 5 V 7 8 V 7 V AUTO 11 V Input weighting factor PORT1 and PORT2 can be set individually Setting range 1 00000E 15 to 999 999E 09 Setting resolution 6...

Page 201: ...ting resolution Common to Normal DC bias in 5 3 1 Front Panel HCUR OSC Accuracy Common to Accuracy in 5 3 3 Rear Panel Normal DC Bias Output Output impedance 600 nominal value Remark Normal DC bias se...

Page 202: ...ts until the measurement signal phase becomes 0 and then output turns off Remark Regardless of the setting output always turns on at phase 0 Frequency change mode ASYNC The frequency changes immediate...

Page 203: ...ep time Frequency From 0 5 ms point 500 ms is added when frequency changes across 1 kHz frequency 1 kHz frequency 1 kHz 5 ms is added when frequency changes across 30 kHz frequency 30 kHz frequency 30...

Page 204: ...acy Upper row Impedance Z measurement mode IMPD EXT Middle row Gain measurement mode G PH Lower row Phase Measurement range rms Measurement frequency Hz f 1 M 1 M f 10 M 10 M f 36 M 7 V 100 mV 0 12 0...

Page 205: ...8 1 40 0 12 dB 0 72 5 V Same as above Same as above Same as above 2 V Same as above Same as above Same as above 1 V Same as above Same as above 1 20 0 10 dB 0 60 500 mV Same as above Same as above Sam...

Page 206: ...igh Impedance measurement accuracy Accuracy of Z AZ AZ A B U KZ KY KV KB KT Accuracy of phase angle of impedance PZ when 10 kHz f 30 kHz and measurement range is 1 k PZ 0 573 1 5 A 1 5 B U KZ KY KV KB...

Page 207: ...f 30 k 30 k f 50 k 50 k f 100 k 1 M 1 50 2 00 0 80 0 60 100 k 0 30 0 20 0 25 0 10 0 70 0 70 0 40 0 40 10 k 0 15 0 03 0 14 0 02 0 15 0 06 0 20 0 03 1 k 0 10 0 01 0 09 0 01 0 09 0 01 0 14 0 02 100 0 13...

Page 208: ...s When the measurement signal amplitude setting is 2 1 mArms refer to KV of 2 1 10 3 71 149 m Vrms Measurement frequency 1 kHz Measurement range Zr Signal level Vrms 100 m V 300 m 300 m V 500 m 500 m...

Page 209: ...800 m 800 m V 1 00 V 1 00 1 00 V 3 00 10 k 5 0 1 8 1 5 1 0 1 0 3 0 1 k 4 5 1 5 1 5 1 1 1 0 4 0 100 4 0 1 2 1 5 1 0 1 0 4 0 10 1 0 1 0 1 0 1 0 1 0 1 8 1 MHz Measurement frequency 2 MHz Measurement ran...

Page 210: ...0 2 0 1 0 2 1 k 0 1 0 1 0 1 100 0 3 0 3 0 3 10 0 5 0 5 0 5 The KB when the HV DC bias is enabled is as shown in the table below HV DC bias Measurement range Zr Measurement frequency Hz 1 k f 30 k 30 k...

Page 211: ...which measurement accuracy is high Impedance measurement accuracy Accuracy of Z AZ AZ A B U KZ KY KV KB KT Accuracy of phase angle of impedance PZ PZ 0 573 AZ Remark The measurement accuracy when AZ e...

Page 212: ...02 ZX 100 kHz f 36 MHz f kHz 2 10 4 ZX KY Residual admittance coefficient Frequency range KY f 30 kHz ZX 1 106 30 kHz f 1 MHz f kHz ZX 3 106 1 MHz f 36 MHz f kHz ZX 2 106 KV Signal level coefficient W...

Page 213: ...0 m 800 m V 1 00 1 00 V 3 00 1 k 1 5 1 0 1 1 1 0 1 1 100 1 6 1 0 1 1 1 0 1 2 10 1 5 1 0 1 0 1 0 1 0 KB DC bias coefficient When the HV DC bias is enabled KB 0 1 The KB when the normal DC bias is outpu...

Page 214: ...X 0 1 AZ sin X DX 0 1 RP RS G S S AZ QX 0 1 AZ cos X QX 0 1 Q Qx2 Pe 1 QX Pe QX 10 or QX Pe 0 1 Here phase angle error Pe rad PZ 57 3 The measurement accuracy of Q is the actual value and not the valu...

Page 215: ...tual measurement time The measurement time may become longer than the set time due to auto ranging and other processing Measurement delay function This function delays the start of measurement after t...

Page 216: ...ing the first down sweep is performed over the range set in the upper limit condition file number the next down sweep is performed over the range set in the next condition file number down upper limit...

Page 217: ...3T and IMPD 2T Calculates the following piezoelectric related constants from the frequency sweep measurement results Piezoelectric constant calculation Calculates the piezoelectric constants piezoelec...

Page 218: ...l measurements Characteristic impedance Setting range 1 00 to 999 setting resolution 3 digits Electrical length Setting range 0 000 to 999 999 m setting resolution 0 001 m Open correction Corrects the...

Page 219: ...ayed on a graph and the data at a marker position is displayed as a numerical value Number of markers Max 8 Marker search function Search items Max Min Search for the maximum and minimum values Peak B...

Page 220: ...ort correction at port extension tip 32 sets load correction at port extension tip 32 sets equalizing 32 sets Except for data not saved in the internal storage are retained even if the power is turned...

Page 221: ...ntrol None software X ON X OFF hardware RTS CTS External monitor For connecting a projector or external monitor etc Connector Rear panel analog VGA connector mini D sub 15 pin female Signal 800 600 do...

Page 222: ...2T Signal isolation All I O signals are optically isolated withstand voltage 42 V Input signal Trigger setting condition file number Output signal Sorting results BIN1 to BIN14 Expansion connector Thi...

Page 223: ...25 g m3 no condensation Altitude 2000 m or less Storage 10 to 50 C 5 to 95 RH However absolute humidity 1 to 29 g m3 no condensation Pollution degree 2 indoor use External dimensions 430 W 177 H 350 D...

Page 224: ...5 14 Miscellaneous Specifications 5 40 ZA57630 Figure 5 1 External dimensions...

Page 225: ...d them carefully By accepting this agreement or using the software you agree to all of these terms and consent to the transmission of certain information during activation and for Internet based featu...

Page 226: ...atures can be switched off or you can choose not to use them How does Microsoft use your information Microsoft uses the information it collects through the software features to upgrade or fix the soft...

Page 227: ...ervice POS application A POS application is a software application which provides any of the following functions process sales and service transactions scan and track inventory record or transmit cust...

Page 228: ...of licenses you need You may only use such hardware or software if you have a license for each copy of the software you are using f Device Connections You may permit a maximum of twenty 20 computers o...

Page 229: ...32 bit version of Windows Embedded 8 1 Industry Pro then you should revert back to the original BIOS settings If you do not revert back to these BIOS settings when switching back to the 64 bit versio...

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Page 234: ...ivity then Teredo will periodically contact the Microsoft Teredo service over the Internet The only information sent to Microsoft is standard computer information and the name of the service requested...

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Page 236: ...e software on the device or on a disc or other physical media your proof of license is the genuine Microsoft certificate of authenticity label with the accompanying genuine product key and proof of pu...

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Page 238: ...al indirect or incidental damages This limitation applies to anything related to the software services content including code on third party Internet sites or third party programs and claims for breac...

Page 239: ...lso specific terms linked in this agreement you will read the terms for that service before using the service You understand that by using the service you ratify this agreement and the linked terms Th...

Page 240: ...XVI ZA57630 Blank...

Page 241: ...duct by a company organization or individual not approved by NF D Failure caused by abnormal voltage or the influence of equipment connected to this product E Failure caused by the influence of supply...

Page 242: ......

Page 243: ...ithout notice Information provided in this manual is intended to be accurate and reliable However we assume no responsibility for any damage regarding the contents of this manual We assume no responsi...

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Page 246: ...http www nfcorp co jp NF Corporation 6 3 20 TsunashimaHigashi Kohoku ku Yokohama223 8508JAPAN...

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