MKS P9B, Instruction Manual, Page: 9 / 112

List of References
v
List of References
The documents listed below are referenced throughout this manual.
[1] “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol”, Open
DeviceNet Vendors Association, Inc. Release 2.0. ERRATA 4.0
[2] “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library”, Open DeviceNet
Vendors Association, Inc. Release 2.0. ERRATA 4.0
[3] “Sensor/Actuator Network Common Device Model”, SEMI Standards Document E54.1-0097.
[4] “Sensor/Actuator Network Communications Standard for DeviceNet”, SEMI Standards Draft
Document E54.4-0097.
[5] “Sensor/Actuator Network Specific Device Model for Mass Flow Devices”, SEMI Standards Draft
Document #2253C.
[6] “Sensor/Actuator Network Standard”, SEMI Standards Document E54-0097.
[7] SEMI E17. Guideline for Mass Flow Controller Transient Characteristics Tests
[8] SEMI E18. Guideline for Temperature Specifications of the Mass Flow Controller
[9] SEMI E27. Standard for Mass Flow Controller and Mass Flow Meter Linearity
[10] SEMI E28. Guideline for Pressure Specifications of the Mass Flow Controller
[11] SEMI E56. Test Method for Determining Accuracy, Linearity, Repeatability, Short Term
Reproducibility, Hysteresis, and Dead Band of Thermal Mass Flow Controllers
[13] SEMI E80. Test Method Determining Attitude Sensitivity of Mass Flow Controllers
[14] SEMI E52. Practice for Referencing Gases and Gas Mixtures Used in Digital Mass Flow Controllers
[15] Supplement, Devicenet Profile, P9B MFC, Document No. 1042926-001
[16] Supplement, RS485 Command Specifications, P9B MFC, Document No. 1042928-001