
Appendix A: Product Specifications
Electrical Specifications
93
Digital I/O (DeviceNet)
Input Voltage Required
Max current at start-up (first 5 sec.)
Typical current at steady state
+11 to +25 VDC
15VDC (±5 %) @ 350 mA
15VDC (±5 %) @ 280 mA
Data Rate/Network Length
Date Rate (User selectable)
125 Kbps, 500m (1,640 ft)
250 Kbps, 250m (820 ft)
500 Kbps, 100m (328 ft)
Level of Filtering
User software adjustable
Digital Functions (flow)
Select units: counts, slm, sccm % of F.S.
Remote Zero
Set/read flow rate
Flow totalizer and run hours
Valve soft start
Monitor MFC status – valve drive level and trip points (alarm for high flow,
alarm for low flow, warning for high flow, warning for low flow)
Reset factory defaults
Report run time hours
Change user tags and device address
Device Identification Storage includes manufacturer information, model and
serial number, original factory calibration, software and hardware revision
numbers.
Digital Functions (temperature)
Set units
Read temperature
Alarm enable, Warning enable
Alarm settling time, Warning settling time
Alarm trip point high, Warning trip point high
Alarm trip point low, Warning trip point low
Zero adjust
Data Rate Switch
4 positions: 125, 250, 500K, PGM (programmable over the network)
MAC ID Switches
2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers: 7,0 to 9,9 are
software ID numbers; (6,4 to 6,9 are unused and, if selected will default to
hardware ID number 6,3)
Input Power
11 to 25 VDC per DeviceNet specifications ( @ <3.5 watts)
Network Size
Up to 64 nodes
Network Topology
Linear (trunkline/dropline) power and signal on same network cable
Visual Communication Indicators
LED network status (green/red)
LED module status (green/red)
Scrolling LED displays(Flow Gas , temperature, IP address, Full scale)
Summary of Contents for P9B
Page 1: ...1042936 001 Rev A January 2013 MKS Type P9B Digital Mass Flow Controller Instruction Manual...
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Page 10: ...List of References vi This page intentionally left blank...
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Page 23: ...13 MKS Instruments Inc MKS Calibration and Service Center...
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Page 26: ...16 MKS Instruments Inc MKS MKS Calibration and Service Center...
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Page 56: ...Chapter Four Analog and Digital Interface Digital Interface Input and Output Options 46...
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Page 86: ...Chapter Six Embedded Web Based GUI and Diagnostics Tuning the MFC for Optional PC 76...
Page 92: ...Chapter Seven Maintenance Pressure Zero Adjustment 82 This page intentionally left blank...
Page 99: ...Troubleshooting Chart Chapter Eight Troubleshooting 89 This page intentionally left blank...
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Page 105: ...Appendix A Product Specifications Electrical Specifications 95...
Page 111: ...Model Code Description 101...
Page 112: ...Model Code Description Appendix C Health and Safety Form 102 Appendix C Health and Safety Form...