MKS P9B, Instruction Manual, Page: 29 / 112

Introduction Chapter One: General Information
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Chapter One: General Information
Introduction
MKS Instruments P9B MFC represents state-of-the-art technology meeting the advanced process
requirements of next generation toolsets. This device integrates thermal flow and pressure sensor technologies
together with MKS real-time feedback control system providing typical flow control response times of about
750 milliseconds with either a normally closed or normally open valve. Incorporation of pressure
measurement along with thermal flow measurement enables a device providing multi-gas, multi-range and
pressure insensitive capabilities.
The P9B MFC includes an integrated multifunctional local display and an embedded, web-based user
interface. The device is available with full scale flow ranges of 5 sccm to 50 slm (N2 equivalent) in standard
1.125” C-seal, W-seal surface mount or ¼” VCR

form factors. Both digital and analog I/O are available
and selectable as an option
Design Features
Increases Throughput and Performance

Accurate flow control for both the calibration and the user selected gas.
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Pressure insensitivity through real time pressure measurement and feedback.

Enables better chamber matching through increased MFC accuracy of any process gas.

Increases tool uptime through reduction of “No Problem Found” MFC replacements.
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Includes embedded diagnostics software that allows users to check MFC functionality without
removing the MFC.
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E-diagnostics through embedded Ethernet interface.
Reduce Overall Costs

Reduces MFC inventory through multi-gas, multi-range availability.

Minimizes overall footprint of gas delivery module.
Easy to Integrate and Operate

Straightforward configuration and diagnostics through Ethernet user interface which:
Uses standard web browser (e.g. IE8 or Firefox) – no special software required.
Includes remote PC application.
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Easy viewing of flow rate, gas type, full scale and Ethernet address via its LED display.
This MFC’s design incorporates an advanced flow sensor, a pressure sensor, a control valve, and an
optimized bypass. The latest generation two-element sensing circuit provides accurate, repeatable
performance even in low flow ranges (< 10 sccm). A low temperature effect from ambient temperature
change and minimal attitude sensitivity effect are also ensured. Pressure measurement enables the device to
adjust dynamically to changing source pressure resulting form regulator settings and pressure transients.
Attitude sensitivity is completely accounted for with advanced attitude circuitry. The optimized sensor/bypass
arrangement minimizes the flow splitting error for gases with different properties, which dramatically
improves measurement accuracy when gases other than the calibration gas are used.