MKS P9B, Instruction Manual, Page: 30 / 112

Chapter One: General Information How This Manual is Organized
20
Control (I/O) Interfaces
The P9B MFCs are available with either analog or digital interface I/O which is specified by the user at time
of ordering.
Analog I/O is available via either a 9 pin D or 15 pin D. The 9 pin D option provides for setpoint I/O along
with a valve override function. The 15 pin D option provides for setpoint I/O, valve override and the ability
to control to an optional input. Analog I/O are covered in detail in this manual.
The digital control I/O may be via RS485 or DeviceNet. An overview of each along with connector, power
supply and switch information is included in this manual. Protocol specifics (profile) are included in separate
documentation.
Reliability
To provide excellent reliability, the design contains a low mechanical and electronic components count and
has successfully passed the following test:
STRIFE, including temperature cycling and vibration (sine and random tests)
EMC Directive 2004/108/EC for CE Mark compliance (with a metal braided, shielded cable, properly
grounded at both ends)
ODVA Compliance (DeviceNet version)
Cleanliness Features
The
P9B
uses only metal for all external seals. The metal seals eliminate gas permeation and ensure
extremely low external leakage under pressure or vacuum conditions relative to atmosphere. The internal
valve control plug is Teflon which is chemically stable and not prone to out-gassing or particle generation
.
The
MFC’s
mechanical design incorporates minimal wetted surface area and volume as well as virtual leaks,
assuring rapid dry-down. To further enhance its cleanliness, internal surfaces are precision machined to a 10
microinch Ra surface finish that are electropolished. The instrument is assembled and double-packaged in a
Class 100 clean room environment.
How This Manual is Organized
Before installing the device in a system and/or operating it, carefully read and familiarize yourself with
all precautionary notes in the Mass Flow Device Safety Information section at the front of this manual.
In addition, observe and obey all
WARNING
and
CAUTION
notes provided throughout the manual.
Chapter One: General Information
introduces the product and describes the organization of the manual.
Chapter Two: Provides an overview on the use of Mass Flow Control
Chapter Three: Installation and Configuration
Chapter Four: Analog and Digital Interface
Chapter Five: Ethernet Interface Setup and Configuration
Chapter Six: Embedded Web-Based GUI and Diagnostics
Chapter Seven: Maintenance
Chapter Eight: Troubleshooting
provides a reference should the instrument appears to malfunction.
Appendix A: Product Specifications
lists the specifications of the instrument.
Appendix B :
Model Code Explanation describes the model code.