Chapter Five: Troubleshooting
General Information
29
Chapter Five: Troubleshooting
General Information
The 1152 MFC is optimized at the factory for specific application parameters. Consult the MKS
Applications group if your application changes.
Warning
Read and follow all safety messages listed in
Safety
Procedures and Precautions, page 1, BEFORE attempting to
troubleshoot the 1152 unit. Failure to adhere to these
messages could result in injury to personnel.
Troubleshooting Chart
Troubleshooting Chart
Symptom
Possible Cause
Remedy
No output
1. System pressure too high.
1. Check system pressure.
2. Improper cable.
2. Check cable type. Also, check cable
for damage.
3. Valve does not open.
3. Refer to How To Check Valve
Operation, page 31.
4. Electronics malfunctioning.
4. Return unit to MKS for service.
Controller does not
maintain set point
1. Improper zero adjustment.
1. Zero MFC output as described in How
To Zero the 1152 MFC, page 25.
2. Unstable process system
pressure.
2. Stabilize system process pressure
control loop.
3. Insufficient delivery
pressure.
3. Raise temperature of source material.
Controller does not
function
1. Condensation.
1. Check line temperatures. Evacuate
lines overnight.
2. Valve override function
applied.
2. Disconnect the valve override
function. Refer to Table 3, page 15,
for the pin assignments.
3. Electronics malfunctioning.
3. Return unit to MKS for service.
Table 8: Troubleshooting Chart
(Continued on next page)
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