General Information
Chapter Five: Troubleshooting
30
Troubleshooting Chart (Continued)
Symptom
Possible Cause
Remedy
Unit produces large
pressure drop or will
not pass full flow
1. Clogged orifice and/or valve.
1. Purge unit; refer to Chapter Six:
Maintenance, page 33, for
specific information.
Unable to zero unit,
or unit is non-linear,
or has erratic flow
1. Condensation.
1. Check line temperatures.
Evacuate overnight.
2. Electronics malfunctioning.
2. Return unit to MKS for service.
3. Improper cable.
3. Check cable type. Also, check
cable for damage.
4. System pressure too high.
4. Check that the system pressure
matches the value listed on the
Calibration Data Sheet.
5. Limited downstream
conductance.
5. Reconfigure downstream
plumbing (shorten length or
increase inside diameter).
6. Oscillation
6. Adjust controller gain pot.
Refer to How To Prevent
Oscillation, page 31.
Indicated flow rate
when no flow exists
1. High downstream pressure.
1. Check system configuration.
Oscillation
1. Incorrect controller settings.
1. Refer to How To Prevent
Oscillation, page 31.
Table 8: Troubleshooting Chart
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