Appendix B: Calibration Data Sheet
38
1152C FLOW CALIBRATION DATA
Serial #:
FLOW SCCM
5.00
4.00
3.00
2.00
1.00
0.00
0.00 0.50 1.00 1.50 2.00 2.50 3.00 3.50 4.00 4.50 5.00
x
x
x
x
x
x
x
x
x
x
0.19
0.42
0.63
0.86
1.08
1.31
1.53
1.74
1.97
2.20
0.40
0.80
1.20
1.60
2.00
2.40
2.80
3.20
3.60
4.00
1152C Vout
Dibutylether
x
N
2
33447/ljs/11-01-96
Figure 10: Example Calibration Graph
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