Chapter Six: Maintenance
General Information
33
Chapter Six: Maintenance
General Information
Periodically check for wear on the cables and inspect the enclosure for visible signs of damage.
Otherwise, no maintenance is required on the instrument for normal use. However, when used in
a harsh environment, use the following procedure to determine if any compromise in
performance or seal integrity has occurred. The following procedure should be carried out prior
to returning the unit for service to prevent any unnecessary return of the instrument.
Warning
Read and follow all safety messages listed in
Safety
Procedures and Precautions, page 1, BEFORE attempting to
service the 1152 unit. Failure to adhere to these messages
could result in injury to personnel.
1. Pump any condensable material out of the 1152 unit.
2. Use a dry, inert purge gas to purge 1152 unit thoroughly at operating temperature.
3. Check the calibration of the instrument.
Refer to How To Zero the 1152 MFC, page 25, for details on setting the zero.
4. Check control response and stability of the instrument.
Cleaning and Repair
If, after performing the checks listed above, it is determined that cleaning is necessary,
disassembly of the instrument will be required. You must send the unit back to MKS for
disassembly and cleaning. Prior to any return, the instrument MUST be purged of all
contaminants.
Warning
All returns to MKS Instruments must be free of harmful,
corrosive, radioactive, or toxic materials.
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