Appendix B: Calibration Data Sheet
Typical Calibration Data Sheet
37
Appendix B: Calibration Data Sheet
Typical Calibration Data Sheet
Each 1152 MFC is shipped with a Calibration Data Sheet, as shown below. This sheet contains
important information on the specific application for which the 1152 MFC was designed.
1152C FLOW CALIBRATION DATA
CUSTOMER:
SERIAL #:
GAS: DIBUTYLETHER
CALIBRATION GAS: N
2
DATE: 11/01/96
MODEL: 1152C-804K
SP:
OPERATING
TEMPERATURE: 50
°
C
1152C P1 TORR P2 TORR Flow N
2
Theoretical
Vout (VDC) (sccm) Flow
DIBUTYETHER
(SCCM)
0
0.500
1.000
1.500
2.000
2.500
3.000
3.500
4.000
4.500
5.000
4.814
5.114
5.364
5.590
5.822
6.038
6.260
6.450
6.650
6.828
7.056
0.00
0.19
0.42
0.63
0.86
1.08
1.31
1.53
1.74
1.97
2.20
0.00
0.40
0.80
1.20
1.60
2.00
2.40
2.80
3.20
3.60
4.00
MFC STD: 1359C-00010RV S/N:
INLET PRESSURE: 24.00 Torr
PROCESS PRESSURE: 5.000 Torr CHECKED BY:
SM#:
4.974
4.974
4.974
4.976
4.984
4.988
4.988
4.994
4.998
5.008
5.014
Figure 9: Example Calibration Sheet
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