MKS 1152C Instruction Manual Download

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Table of Contents

How To Set the Temperature......................................................................................21

Temperature Indications.................................................................................23

Temperature Output Signal ............................................................................23

How To Warm Up the 1152 MFC ..............................................................................24

How To Zero the 1152 MFC ......................................................................................25

How To Configure the Output ....................................................................................26

To Display the Output in SCCM....................................................................26

Cautionary Notes........................................................................................................28

Note 1: Customer Supplied Display Equipment ............................................28

Note 2: MKS Supplied Power Supply/Display Equipment ............................28

Note 3: Set Point Command..........................................................................28

Note 4: Overrange Condition ........................................................................28

Chapter Five: Troubleshooting...............................................................................................29

General Information ...................................................................................................29

Troubleshooting Chart ...................................................................................29

How To Check Valve Operation ....................................................................31

How To Prevent Oscillation...........................................................................31

Chapter Six: Maintenance ......................................................................................................33

General Information ...................................................................................................33

Cleaning and Repair ...................................................................................................33

Appendix A: Product Specifications.......................................................................................35

System Specifications.................................................................................................35

Mechanical Specifications ..........................................................................................35

Electrical Specifications .............................................................................................36

Appendix B: Calibration Data Sheet ......................................................................................37

Typical Calibration Data Sheet ...................................................................................37

Index ......................................................................................................................................39

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Summary of Contents for 1152C

Page 1: ...nderutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos In...

Page 2: ...C Mass Flow Controller Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http www mksinst com Artisan Technology Group Quality Instr...

Page 3: ...ve and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by the purchaser shal...

Page 4: ...112802 P1 Rev C 4 97 MKS Type 1152C Mass Flow Controller Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 5: ...aratron is a registered trademark of MKS Instruments Inc Andover MA Inconel is a registered trademark of Inco Alloys International Inc Huntington WV Viton and Kalrez are registered trademarks of E I D...

Page 6: ...ed Cable Description 7 Product Location and Requirements 9 Operating Environmental Requirements 9 Setup 9 Dimensions 9 Mounting 11 Mechanical Installation 12 Electrical Information 14 Power Requiremen...

Page 7: ...Set Point Command 28 Note 4 Overrange Condition 28 Chapter Five Troubleshooting 29 General Information 29 Troubleshooting Chart 29 How To Check Valve Operation 31 How To Prevent Oscillation 31 Chapter...

Page 8: ...System Configuration 12 Figure 8 The Warning Label 18 Figure 9 Example Calibration Sheet 37 Figure 10 Example Calibration Graph 38 Tables Table 1 Interface Cables 6 Table 2 Power J9 Connector Pinout...

Page 9: ...List of Figures and Tables vi Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 10: ...for handling toxic or hazardous materials or liquids with low flashpoints Your corporate policy on handling these liquids supersedes the instructions in this manual MKS assumes no liability for the sa...

Page 11: ...e Warning label Definitions of WARNING CAUTION and NOTE messages used throughout the manual Warning The WARNING sign denotes a hazard It calls attention to a procedure practice condition or the like w...

Page 12: ...he result to a 0 to 5 VDC output signal that is equal to 0 to 100 full rated flow for the calibrated gas and temperature Caution The control valve in the 1152 Mass Flow Controller is not a positive sh...

Page 13: ...rument malfunction Appendix A Product Specifications lists the specifications of the instrument Appendix B Calibration Data Sheet shows an example of the Calibration Data Sheet that is shipped with ea...

Page 14: ...efore shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Note The 1152 MFC is supplied with Cajon 8 VCR male fittings Be sure to kee...

Page 15: ...raided shielded cable add an S after the cable type designation For example to order a standard connection cable to connect the 1152 MFC to a 260PS 1 power supply use part number CB260 3 10 for an ove...

Page 16: ...ng leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length Refer to Figures 1 and 2 page 8 A inch piece of 2...

Page 17: ...Strain Relief Figure 1 Preferred Method to Connect an Overall Metal Braided Shielded Cable Example 2 Alternate Method To Connect Cable shown on a transducer Transducer Overall Insulation if present B...

Page 18: ...1152 MFC is bag packaged in a clean room environment Keep the unit bagged prior to installation The 1152 MFC is supplied with Cajon 8 VCR type male fittings It is important to protect the fitting sea...

Page 19: ...14 15 1 2 3 4 5 6 7 8 9 SIGNAL CONDITIONER HEATER SUPPLY VALVE TEST PT FLOW SIG OUT VALVE CLOSE VALVE OPEN PWR COM 15 VDC 15 VDC SET PT INPUT TEMP OUTPUT OPTIONAL INPUT SIG COM SIG COM P1 TEST SIG P2...

Page 20: ...ll messages in Safety Procedures and Precautions page1 BEFORE attempting to install the 1152 unit Failure to adhere to these messages could result in injury to personnel 1 Close all valves between the...

Page 21: ...eratures above the flash point of the vapor may cause combustion to occur if a leak to atmosphere is present Refer to the Warning Label on the unit shown in Figure 4 page 10 for the temperature the un...

Page 22: ...able conductance Examples are ball valves or barstock type valves such as the NUPRO SS8BK Caution Ensure that the operating conditions closely match the configuration specified at the time the 1152 un...

Page 23: ...readout supply This MFC is designed to accept a 0 to 5 VDC set point signal as an input and provides a linear 0 to 5 VDC mass flow feedback signal as an output Connectors The interface connectors are...

Page 24: ...ignal J15 Connector Pinout Pin Number Assignment 1 Valve Test Point 2 Flow Signal Output 3 Valve Close Override 4 Valve Open Override 5 Power Common 6 15 VDC 7 15 VDC 8 Set Point Input 9 Temperature O...

Page 25: ...of the unit as shown in Figure 4 page 10 Test Point Signals Test Point Assignment 1 Pressure 1 2 Pressure 2 3 Reserved 4 Reserved 5 Reserved 6 Valve Test Point 7 Reserved 8 Flow Output Table 4 Test Po...

Page 26: ...system depends heavily on the proper system integration The system consists of Source heater Source feed lines 1152 MFC System Operating Temperature Select a system operating temperature that is high...

Page 27: ...ed to the instrument The span is adjusted for a 5 000 VDC output at the equivalent nitrogen flowrate for the specified source material Label The Warning label shown in Figure 8 appears on the side of...

Page 28: ...he control valve At set point initiation when the set point exceeds 10 mV the 1152 MFC will quickly increase the drive current to the control valve The current will continue to increase until the flow...

Page 29: ...Analog Interface Signals Chapter Three Overview 20 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 30: ...C for the standard unit and 90 to 150 C for the high temperature option The temperature switch is a ten position thumbwheel switch SW 1 visible through the vent slots in the enclosure Refer to Figure...

Page 31: ...0 5 50 150 6 60 Heater Off 7 70 Heater Off 8 80 Heater Off 9 90 90 Table 5 Operating Temperature Settings Note The 1152 MFC is calibrated at a temperature specified at the time the unit was ordered If...

Page 32: ...De Energized At Operating Temperature Green Energized Above Operating Temperature Off De Energized Refer to Table 2 page 14 for the relay pin assignments Table 6 Temperature Status Indicators Temperat...

Page 33: ...ric pressure and is reading an overrange condition When the process chamber is brought to process pressure the output will be near zero The ambient heater takes 4 to 5 hours to reach control temperatu...

Page 34: ...erature of the unit 1 Bring the process chamber located at the outlet of the 1152 MFC up to the process pressure listed on the Calibration Data Sheet sent with the 1152 MFC For example many TEOS syste...

Page 35: ...00 sccm TEOS F S Output 5 000 VDC The equation becomes 3 22 V x 300 sccm 193 sccm TEOS 5 000 V Using an MKS Readout 1 Determine the rated Full Scale flow rate of the instrument 2 Refer to Table 7 page...

Page 36: ...or pot the number to the left of the decimal point is the number that is set in the window of the pot and the numbers to the right are set on the dial of the pot Example If the instrument being used h...

Page 37: ...C takes the flow signal from the 1152 MFC zeroes it with the front panel zero pot and sends it back to the controller section of the 1152 unit on pin 10 of the Signal J15 connector Refer to Table 3 pa...

Page 38: ...age 3 Valve does not open 3 Refer to How To Check Valve Operation page 31 4 Electronics malfunctioning 4 Return unit to MKS for service Controller does not maintain set point 1 Improper zero adjustmen...

Page 39: ...per cable 3 Check cable type Also check cable for damage 4 System pressure too high 4 Check that the system pressure matches the value listed on the Calibration Data Sheet 5 Limited downstream conduct...

Page 40: ...s on a common manifold When several 1152 MFC s are mounted with their downstream fittings connected to a common manifold without regard to pressure developed oscillations have occurred Back pressure m...

Page 41: ...General Information Chapter Five Troubleshooting 32 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 42: ...2 unit Failure to adhere to these messages could result in injury to personnel 1 Pump any condensable material out of the 1152 unit 2 Use a dry inert purge gas to purge 1152 unit thoroughly at operati...

Page 43: ...Cleaning and Repair Chapter Six Maintenance 34 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Page 44: ...elded Power J9 Signal J15 9 pin Type D 15 pin Type D Fittings Cajon 8 VCR male Leak Rate to atmosphere 1 x 10 9 scc He sec Maximum Closed Conductance Through the Valve 1 F S or 1 sccm whichever is gre...

Page 45: ...Point Override Open 0 to 5 VDC from 20K ohm source4 TTL Active Low TTL Active Low Outputs Flow Output Relay Contact Ratings 0 to 5 VDC into 10K ohms 2 Amp 28 VDC 1 Amp 120 VAC Resistive Due to continu...

Page 46: ...ATING TEMPERATURE 50 C 1152C P1 TORR P2 TORR Flow N 2 Theoretical Vout VDC sccm Flow DIBUTYETHER SCCM 0 0 500 1 000 1 500 2 000 2 500 3 000 3 500 4 000 4 500 5 000 4 814 5 114 5 364 5 590 5 822 6 038...

Page 47: ...2 00 2 50 3 00 3 50 4 00 4 50 5 00 x x x x x x x x x x 0 19 0 42 0 63 0 86 1 08 1 31 1 53 1 74 1 97 2 20 0 40 0 80 1 20 1 60 2 00 2 40 2 80 3 20 3 60 4 00 1152C Vout Dibutylether x N2 33447 ljs 11 01...

Page 48: ...rature 17 18 Fast wake up 19 Fittings 9 Flash point 12 21 Full scale range 17 G Gauge factor 27 H Heating 12 High Temperature option 14 I Interface cables 6 L LED 23 M Maintenance 33 Manual organizati...

Page 49: ...ns 1 2 Set point 19 Source material 17 Specifications 35 36 T Temperature 9 17 21 24 Temperature control 12 Temperature status 23 Troubleshooting 29 V Valve 31 Valve position 15 16 W Warm up 24 Warnin...

Page 50: ...uipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentat...

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