Head
GA10218_0101 - 5/2002
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100
9.1.7 Exhaust Oil filter
After using the machine for a longer time there can be oil accumulated
from the pump. In this case please do the following:
1. Switch off the PhoeniXL.
2. Remove the mechanical cover according to Chapter 9.1.2
3. The oil filter is located besides the rotary vane pump.
4. Unscrew the plexiglas cabinet (direction is shown by an arrow on the fil-
ter).
5. Clean or replace the filter (cat-no. 20028656)
6. Screw back the plexiglas cabinet hand tight.
7. Check the oil level of the rotary vane pump and fill it up when necessary
(see instructions for rotary vane pump).
8. Finally re-install the cover for the mechanical section.
9.2 Turbo molecular pump
For the Leybold turbo molecular pump TW 70 LS it is recommended to
change the bearings after 20.000 running hours. For details please refer to
the corresponding manual of the turbo pump ( GA 05156.0101) or contact
your local Leybold service.
9.3 Calibrated leak TL7
The Calibrated leak TL7 with the helium reservoir is used for alignement of
the mass spectrometer in the PhoeniXL as well as for calibration the leak
rate indication.
It is equipped with a solenoid valve which is actuated via the control elec-
tronics of the PhoeniXL.
Fig. 37 assembly fuses
TMP-converter
TDS
MSV
STE board
I/O board
3
6
5
1
2
4
7
8
9
10
