6-2 REMOTE/AUTOMATED CONTROL
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table 6-1 selects the programs. Once the program is selected, connecting
remote enable pin 36 to common pin 7 or 8 on rear panel DB-37 connec-
tor enables it. Removing the connection between pin 36 and pin 7 or 8
returns the Auto Controller to Standby. Switching to another program while
the Auto Controller is enabled will instantly commit to running the program
that has been selected.
Table 6-1. Remote program selection using pins 16 and 34 on the DB-37.
Program Number
Pin 34
Pin 16
1
Open
Open
2
Open
Common
3
Common
Open
4
Common
Common
6.2.2 Remote Gas Channel Setpoint Description for the DB-37 Connector
The gas channel setpoints all use 0-5 volt inputs (referenced to pin 13)
that correspond with 0 to the maximum output for the MFC in sccm. A
setpoint of zero also de-energizes the gas relay on the rear panel and
sends the valve off command to the mass
fl
ow controller. The gas relays
are also de-energized and the valve off commands are sent to the mass
fl
ow controllers when the Auto Controller is in standby. This is true except
for gas channel 4, which is dedicated to the hollow cathode. The hollow
cathode gas will
fl
ow at a preprogrammed minimum
fl
ow if a setpoint value
less than this minimum is programmed. The preprogrammed minimum is
typically between 5 and 10 sccm. If necessary, this minimum can be
fi
eld
programmed to another value; see appendix. This gas
fl
ow can be disabled
for other process considerations by connecting pin 15 (gas CH4/HC off) to
one of the common pins 7 or 8 on the DB-37 connector. However, the hol-
low cathode gas should be allowed to
fl
ow for 15 minutes before and after
operating the hollow cathode. Turning the gas
fl
ow off momentarily during
this 15 minute time period is acceptable. It is often desirable to turn off the
gas momentarily to achieve a minimum pressure in the vacuum chamber
before starting a process.
The gas channel setpoints function differently depending on the operat-
ing mode selected. The Auto Gas, Manual Gas and Gas Only modes are
selected from the front panel. The functions of the gas setpoints are de-
scribed below for these three operating modes.
