4-2 INITIAL OPERATION
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
4.3.1.1 Program Select
The Auto controller is shipped with four programs stored. Pressing and
releasing the white Program Select button will increment to the next
program as indicated by the numbered red LED’s on the left side of the
Program Select button. The program values will be displayed on the front
panels for each program. Program 1 may already be selected when the
unit is powered on, if it is not, then press and release the program select
button until the red LED for program 1 is on for the initial operation.
The other programs can still be viewed after the Auto Controller is
enabled with one of the programs running. When a program is running
and “Program Select” is pressed, the setpoint values of the next program
will be displayed for two seconds before switching to that program. This
gives time to review the programs before deciding which one to run.
Pressing again within two seconds moves to the next program, etc.
Cycling around to the program that’s currently running will continue
operation without change. Otherwise, the parameters will be ramped to
the newly selected program.
4.3.1.2 Gas Setpoints
There are four gas channels. Pressing and releasing the Gas Channel
Select button will increment to viewing the gas setpoint in sccm, for the
next gas channel for each program. In the Auto Gas mode, the gas is
automatically adjusted to maintain constant discharge current and
voltage once the ion source is running. The setpoints act as the starting
point from which the gas is adjusted. When more than one gas is blended
together, a constant ratio of the gas is adjusted based on the initial gas
setpoints to maintain the discharge voltage and current for gas channels
1, 2 and 3.
Gas channel 4 is reserved for the Hollow cathode. The setpoint on
this MFC is the operating
fl
ow for the hollow cathode. Additionally, the
gas for the hollow cathode is always
fl
owing at this setpoint value or
a preprogrammed minimum
fl
ow regardless of the enable/standby
selection on the front panel. This is to insure that the minimum gas
fl
ow
requirement of 15 minutes before starting and after running is met. The
Auto Controller can be switched off if it is necessary to turn off the gas
fl
ow for other process requirements when operating from the front panel.
Note that the Keeper, Emission and Discharge will all display HLP 7
when the Auto Controller is turned off. This is to indicate that they have
lost communication with the Auto controller. These HLP 7 messages will
