3-4 INSTALLATION
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Copyright © 2010 by Kaufman & Robinson, Inc., 1306 Blue Spruce Drive, Unit A, Fort Collins, CO 80524
Tel: 970-495-0187, Fax: 970-484-9350, Internet: www.ionsources.com
• Insert the other end of the short BLACK wire into one of the (-) negative
connectors located on the rear panel of the Discharge Power Supply and
tighten the screw above the appropriate connector.
• Attach the ring terminal end of the operating cable GREEN/YELLOW wire
into the ground stud of the Discharge Power Supply.
• Attach the ground connections using the GREEN/YELLOW wire with the four
ring terminals as follows; Connect the four ring terminals to the four ground
studs on the Auto Controller rear panel, the Keeper Power Supply rear pan-
el, the Emission Power Supply rear panel and the Discharge Power Supply
rear panel. Tighten the nuts on the ground studs. Connect the remaining
green striped yellow wire to the chassis system ground for the electrical
cabinet that the power supplies are installed in.
• Attach the three RS-485 cables to the connector labeled “RS-485 X 4” lo-
cated on the back panel of the Auto Controller as shown in
fi
gure 3-2. The
RS-485 connectors are not device speci
fi
c, so they can be plugged into any
of the RS-485 connectors.
• Attach the other ends of the three RS-485 cables to the connectors labeled
“RS-485” located on the power supply back panels, one for the Keeper, one
for the Emission and one for Discharge as shown in
fi
gure 3-2.
• Attach the ion source MFC cable to the connector labeled “MFC 1” located on
the back panel of the Auto Controller. Attach the other end to the MFC for
the ion source. The pin descriptions for the DB-15 Female connectors are
shown below in table 3-3.
• Attach any additional ion source MFC cables to the connectors labeled “MFC
2”, “MFC 3” located on the back panel of the Auto Controller. Attach the
other ends of these cables to the corresponding MFC’s for the ion source.
• Attach the hollow cathode MFC cable to the connector labeled “MFC 4” lo-
cated on the back panel of the Auto Controller. Attach the other end to the
MFC for the hollow cathode. The pin descriptions for the DB-15 Female
connectors are shown below in table 3-3.
• The mass
fl
ow controller is de
fi
ned by the ion-source application. The mass
fl
ow controller should be mounted as close as possible to the vacuum
chamber. See the MFC manual. If an additional positive shut off valve is
to be used with the MFC’s, they should be located directly downstream of
the MFC (between the MFC and the vacuum chamber wall. Additionally, if a
