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Transpector SPS Operating Manual
7.7.1 How to Determine if a Filament Kit Replacement is Required
Do these steps to determine if a filament replacement is required.
1
Measure the resistance of the filament while the sensor is under vacuum by
measuring the resistance between pins
3
and
10.
). A failed
filament will measure open while an intact filament will measure 0.8
Figure 7-16 Sensor pinout
NOTE:
Although the following measurements may measure below 30 M
with the
filament assembly and ceramic shield in place, they must be above 30 M
when measured with the filament assembly and ceramic shield removed.
Table 7-2 Pin assignment
Pin
Assignment
Pin
Assignment
1
PP
8
GND
2
EM HV
9
RF+
3
Filament
10
Filament
4
Reserved
11
Reserved
5
Anode
12
Focus
6
RF-
13
TP
7
GND
1
2
3
4
5
6
7
8
9
10
11
12
13
