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Transpector SPS Operating Manual
1.5.2 Orifice Sampling Inlet
1.5.3 Atmospheric Pressure (Capillary) Sampling
Table 1-2 Available inlets and orifices
3 mTorr (no orifice)
10 mTorr
15 mTorr
100 mTorr
360 mTorr
1 Torr (bypass)
3 Torr (bypass)
10 Torr (bypass)
30 Torr (bypass)
Table 1-3 Capillary sampling option
Process Pressure Range
(23°C ambient, no purge)
300 to 900 Torr (400 to 1199 mbar)
Capillary Size and Lengths
1/16 in. OD x 1.5 m SS capillary
1/16 in. OD x 3.0 m SS capillary
Process Gas Consumption
2.6 sccm @ 300 Torr (400 mbar)
17 sccm @ 760 Torr (1013 mbar)
30 sccm @ 900 Torr (1199 mbar)
Response Time for Composition
Changes (response to normal inert
gases)
Capillary Delay: t(1.5m) = 0.3 s
t(3.0m) = 1 s
Intermediate Volume Tau = 0.7 s
SPS Isolation time constant = 75 s
