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TOC – 4

Transpector SPS Operating Manual

4.6.1

Achieving Good Base Pressure in the SPS . . . . . . . . . . . . . . . . . . . . . . . . 4-10

Chapter 5

Theory and Application Guide

5.1

Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2

Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

5.2.1

The Ion Source. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2

5.2.2

The Quadrupole Mass Filter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

5.2.2.1

Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

5.2.2.2

The Zero Blast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

5.2.3

The Ion Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

5.2.3.1

The Electron Multiplier (EM) Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

5.2.3.2

The Continuous Dynode Electron Multiplier/Faraday Cup Detector. . . . . . . 5-9

5.3

How to Interpret The Result . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

5.3.1

Qualitative Interpretation Of Mass Spectra . . . . . . . . . . . . . . . . . . . . . . . . 5-11

5.3.1.1

Ionization Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

5.3.1.2

Isotope Ratios . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

5.3.1.3

Electron Energy Effects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

5.3.1.4

A Qualitative Interpretation Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19

5.3.1.5

Dry Etching Chemistries. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

5.3.1.6

Tungsten CVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24

5.3.1.7

Copper MOCVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25

5.3.2

Quantitative Interpretation of Mass Spectra
(Calculating Partial Pressures). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26

5.3.3

Additional Information For Interpreting Mass Spectra . . . . . . . . . . . . . . . . 5-32

5.3.3.1

Ion Source Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32

5.3.3.2

Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

5.3.3.3

Fragmentation Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

Chapter 6

Operation

6.1

Single Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.1.1

Single Inlet Ports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1

6.1.1.1

Single Inlet Process Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.1.2

Calibration Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2

6.1.2.1

High Mass FC5311 Tuning Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

6.1.3

Process Gauge (CDG) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

6.2

Heaters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

6.3

Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

6.3.1

Foreline Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Summary of Contents for Transpector SPS

Page 1: ...O P E R A T I N G M A N U A L PN 074 691 P1A Cover Page Transpector SPS Gas Analysis System ...

Page 2: ...nd product names are trademarks or registered trademarks of their respective companies Disclaimer The information contained in this manual is believed to be accurate and reliable However INFICON assumes no responsibility for its use and shall not be liable for any special incidental or consequential damages related to the use of this product Due to our continuing program of product improvements sp...

Page 3: ...Declaration Of Conformity Page 1 ...

Page 4: ...ch written notification Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE AS BUYER S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE ...

Page 5: ...eral Specifications 1 4 1 5 2 Orifice Sampling Inlet 1 5 1 5 3 Atmospheric Pressure Capillary Sampling 1 5 1 6 Physical Requirements 1 6 1 6 1 Physical Dimensions 1 6 1 6 2 Weight 1 7 1 6 3 Ventilation Requirements 1 7 1 7 Electrical Power Requirements 1 7 1 7 1 Required Supply Voltage 1 7 1 7 1 1 Acceptable Supply Voltage Range 1 7 1 7 1 2 Required Frequency 1 7 1 7 1 3 Power Rating 1 7 1 7 1 4 F...

Page 6: ...1 12 1 13 1 Operating System 1 12 Chapter 2 Installation 2 1 Installation Overview 2 1 2 2 Transpector Electronics Module Heat Guard and Cable Box Installation 2 1 2 2 1 Attach Transpector Electronics Module 2 1 2 2 2 Attach Heat Guard 2 2 2 2 3 Attach Cable Box 2 3 2 3 Pumping System Cover Installation 2 4 2 3 1 Hardware 2 4 2 3 2 Install the Cover on SPS Housing 2 5 2 4 Sniffer Installation 2 6 ...

Page 7: ...spector SPS Directly to a Host Computer 3 7 3 4 2 2 Installing Multiple Transpector SPS on an Existing Local Network 3 7 3 5 Changing the Computer IP Address 3 8 3 5 1 Windows 7 3 8 Chapter 4 How the SPS System Works 4 1 SPS Components 4 1 4 2 Theory of Operation 4 2 4 3 Instrument Overview 4 2 4 3 1 Input Output Aux I O 4 2 4 3 1 1 SPS Aux I O Connector 4 3 4 3 1 2 Two Digital Inputs 4 3 4 3 1 3 ...

Page 8: ...n Process 5 13 5 3 1 2 Isotope Ratios 5 15 5 3 1 3 Electron Energy Effects 5 17 5 3 1 4 A Qualitative Interpretation Guide 5 19 5 3 1 5 Dry Etching Chemistries 5 22 5 3 1 6 Tungsten CVD 5 24 5 3 1 7 Copper MOCVD 5 25 5 3 2 Quantitative Interpretation of Mass Spectra Calculating Partial Pressures 5 26 5 3 3 Additional Information For Interpreting Mass Spectra 5 32 5 3 3 1 Ion Source Characteristics...

Page 9: ... 2 2 Radiation 7 2 7 2 3 Electrical Voltages 7 2 7 3 Maintenance Procedures 7 3 7 3 1 Bakeout of Quadrupole 7 3 7 3 2 Spare Heating Jacket 7 3 7 4 General Instructions For All Repair Procedures 7 4 7 5 Required Tools Materials or Parts 7 4 7 5 1 Tools for Replacing the Filament Kit 7 4 7 5 2 Tools for Replacing the Ion Source 7 4 7 5 3 Tools for Replacing the Electron Multiplier 7 4 7 5 4 Parts Re...

Page 10: ...ecting to Transpector SPS 10 2 10 4 RGA Configuration SPS Tab 10 4 10 4 1 Valves and Orifices Pane 10 4 10 4 1 0 1 Inlet Calibration 10 4 10 4 2 Gauges Pane 10 4 10 4 2 1 Process Gauge 10 4 10 5 SPS Configuration Monitor 10 5 10 6 SPS Sensor Acquisition Defaults 10 8 10 6 1 What to Acquire RGAs 10 8 10 6 1 1 Acquisition Modes 10 8 10 6 1 1 1 Spectrum Mode Acquisition Parameters 10 10 10 6 1 2 Sele...

Page 11: ...elay 1 10 21 10 6 2 4 Dwell 10 21 10 6 2 4 1 Dwell Mode 10 21 10 6 2 4 2 Dwell Time 10 22 10 6 2 5 Delay 10 22 10 6 2 5 1 Delay Mode 10 22 10 6 2 5 2 Time Between Scans 10 23 10 6 2 5 3 Stabilization Time 10 23 10 6 2 6 Correction 10 23 10 6 2 6 1 Baseline 10 23 10 6 2 6 2 Peak Lock 10 24 10 6 2 7 Inlet 10 24 10 6 2 7 1 Close After 10 24 10 6 2 7 2 Duty Cycle 10 25 10 6 2 8 Heater 10 25 10 6 2 8 1...

Page 12: ... connected to Transpector SPS WARNING Risk Of Electric Shock Refer all Transpector SPS maintenance to qualified personnel 1 2 Using this Operating Manual Before using this manual please take a moment to understand the Cautions and Warnings used throughout They provide pertinent information that is useful in achieving maximum instrument efficiency while ensuring personal safety NOTE Notes provide a...

Page 13: ...ole Sensor analyzes gases by 1 ionizing the gas molecules 2 separating the ions by their mass to charge ratio and 3 measuring the quantity of ions at each mass The sensor can indicate the partial pressures of gases characteristic of processes occurring within a vacuum or other vessel and is used to investigate the nature of a process or to monitor process conditions Electronics Module Transpector ...

Page 14: ...t corrective action The exact wording of any error messages received 1 4 1 Returning Transpector SPS to INFICON Do not return any component of the Transpector SPS to INFICON without first speaking with a Customer Support Representative A Return Material Authorization RMA number must be obtained from the Customer Support Representative If a package is delivered to INFICON without an RMA number the ...

Page 15: ... 5x10 6 3 8x10 6 Minimum Detectable Partial Pressure5 1x10 13 Torr 1 3x10 13 mbar 2x10 13 Torr 2 6x10 13 mbar 4x10 13 Torr 5 3x10 13 mbar Maximum Data Rate analog scans OR selected peaks 1 8 ms per point 555 data points per second Abundance Sensitivity6 5 ppm 10 ppm 100 ppm Zero Blast7 2 ppm 25 ppm 200 ppm Detection Limit8 1 ppm 2 ppm 4 ppm Linearity9 20 Minimum Background Pressure 1x10 8 Torr 1 3...

Page 16: ...1 3 Capillary sampling option Process Pressure Range 23 C ambient no purge 300 to 900 Torr 400 to 1199 mbar Capillary Size and Lengths 1 16 in OD x 1 5 m SS capillary 1 16 in OD x 3 0 m SS capillary Process Gas Consumption 2 6 sccm 300 Torr 400 mbar 17 sccm 760 Torr 1013 mbar 30 sccm 900 Torr 1199 mbar Response Time for Composition Changes response to normal inert gases Capillary Delay t 1 5m 0 3 ...

Page 17: ... Pumping System dimensions 588 7 x 152 x 383 mm 23 18 x 6 0 x 15 08 in when configured with CDG and 3 way valve ControllerController dimensions 195 x 207 x 89 mm 7 7 x 8 1 x 3 5 in Foreline Pump dimensions 218 x 150 x 147 mm 8 6 x 5 9 x 5 8 in NOTE See Figure 2 8 on page 2 12 for cable connections 607 mm 23 9 in 152 mm 6 0 in ...

Page 18: ...ing system and the fan in the Transpector SPS controller 1 7 Electrical Power Requirements The Transpector SPS system components that require AC power input are Controller Universal input any voltage in the range specified in section 1 7 1 1 is acceptable Personal computer Universal input any voltage in the range specified in section 1 7 1 1 is acceptable 1 7 1 Required Supply Voltage Except for t...

Page 19: ...ervice turbo molecular pump requires 10 to 25 sccm nitrogen purge gas flow through its bearings to protect the bearings from corrosion and loss of lubricant by evaporation The Transpector SPS nitrogen regulator range is 10 15 psi gauge It is set for 10 sccm flow at the factory CAUTION The corrosive service turbo molecular pump CVD Etch requires nitrogen purge gas flow whenever the system is operat...

Page 20: ...trogen pressure must be at least 58 psi gauge 4 bar 400 kPa 1 9 Exhaust Gas Exhausting gas from the turbo molecular pump is required for corrosive applications With non corrosive applications exhaust the turbo molecular pump in accordance with the facility s requirements The dry foreline pump has a 6 35 mm 1 4 in Swagelok tube adapter for an exhaust fitting Dry Compressed Air Dry nitrogen 58 100 p...

Page 21: ...17 kPa to 552 kPa WARNING Air pressure must not exceed 100 psi gauge 6 9 bar 690 kPa CAUTION Air pressure must be at least 58 psi gauge 4 bar 400 kPa 1 10 3 Moisture Content of Compressed Air Supply The compressed air supply used for inlet valve operation must be dried to the extent that changes in compressed air pressure during operation will not produce condensation in lines solenoids or valve a...

Page 22: ...rr 1 33x10 8 mbar of base pressure no sample flow after bakeout and cool down This level of vacuum requires a foreline pressure of 10 Torr 13 mbar 1 12 Environmental Requirements 1 12 1 Use Indoor use only 1 12 2 Altitude Range Up to an altitude of 2000 m 6561 ft Contact INFICON for operation at higher altitudes 1 12 3 Maximum Humidity 80 relative humidity no condensation 1 12 4 Pollution Degree P...

Page 23: ...perates Transpector SPS System Refer to section 1 4 on page 1 3 1 13 1 Operating System FabGuard Explorer software requires Windows 7 Windows 8 or Windows 10 for proper operation See Chapter 10 or the FabGuard Explorer CD for FabGuard Explorer software operation Table 1 4 Minimum computer requirements for FabGuard Explorer Parameters FabGuard Explorer Requirements Processor 2 4 GHz Dual Core Memor...

Page 24: ...pector cable box to the various Transpector SPS sub systems and the control computer See Figure 2 8 on page 2 12 6 Install the Transpector SPS foreline pump See section 2 8 on page 2 13 7 Install the software See section 2 9 Software Installation on page 2 13 2 2 Transpector Electronics Module Heat Guard and Cable Box Installation The Transpector electronics module and cable box must be mounted in...

Page 25: ...e risk of burns when the heating jacket is on a heat guard is provided for the metal surfaces between the Transpector electronics box and the Transpector SPS manifold tee 1 Loosen the single screw that attaches the calibration reference shipping bracket to remove the bracket Replace the screw 2 Attach the heat guard between the Transpector electronics module and the mounting nut using the two scre...

Page 26: ... connection and a 62 pin extended I O connection Three screws are used to stabilize the cable box on the electronics module See Figure 2 3 To connect the cable box to the electronics module 1 Insert the Ethernet jack on the cable box into the Ethernet port on the electronics module 2 Carefully insert the 15 pin Aux I O and 62 pin extended I O connectors until they are secure and the Ethernet conne...

Page 27: ...nput 24 V is supplied to the Transpector electronics box from the controller 2 3 Pumping System Cover Installation 2 3 1 Hardware Use Tool M6 hex key Use Tool 10 mm hex key Screw 10 32x 05 LG SOC HD CAP 070 0242 Washer 10 flat SS 090 019 Washer 10 split lock 090 045 Screw M6x10mm LG SOC HD CAP 144 111 Screw Holes Ethernet Connection Extended I O Aux I O Transpector 24V Input ...

Page 28: ... trench on both sides of the foreline block Use screw M6 x 10mm LG SOC HD CAP 144 111 to attach cover to each T Nut in the Transpector SPS foreline block Figure 3 Install cover 2 Connect covers together by using screw 10 32 x 0 50 070 0242 washer 10 flat 090 019 and washer 10 split lock 090 045 as shown below All cables should be covered by the cover plate 070 1136 090 019 070 0242 090 045 144 111...

Page 29: ...elok fitting on the Hexblock using the 1 4 in 6 35 mm nut and vespel ferrule supplied with the sniffer 2 5 Mounting the Pumping System The Transpector SPS system typically mounts directly to a process chamber via the CF or KF process connection at the end of the Hexblock inlet Normally there is no need to use an additional isolation valve between the Hexblock and the process chamber ...

Page 30: ... two adjustable feet and mounting hardware 2 5 1 Installing the Support Kit 1 Measure the support leg to make sure there is ample room for installation The leg may be cut to size NOTE One end of the support leg has a threaded hole for the adjustable foot When cutting the leg make sure that the threaded hole end is used for the support 2 Screw the adjustable foot fully into the bottom of the suppor...

Page 31: ...Operating Manual Figure 2 4 Adjusting leg position 8 Unscrew the adjustable foot until it supports Transpector SPS and relieves pressure from the flange 9 Tighten the lock nut on the adjustable foot against the support leg ...

Page 32: ...t Frame Atmospheric Transpector SPS systems do not need the standard support legs An atmospheric system is mounted to a support frame which also houses the Controller See Figure 2 5 Figure 2 5 Transpector SPS configured with support frame for atmospheric sampling ...

Page 33: ...Controller are Cable bundle that includes the Transpector SPS interface cable connects to the cable box on the back of the Transpector electronics module heater cable and ground strap Foreline pump power cable Controller power cable The back panel of the Controller is shown in Figure 2 6 Connections are shown in Figure 2 8 Figure 2 6 Controller rear panel SPS Interface Foreline Power Heater Fuse M...

Page 34: ... 1486 P1 is available for User I O See section 4 3 1 1 on page 4 3 for additional information about Aux I O Turbo pump cable 600 1475 P1 connects to the turbo pump controller Pirani cable 600 1474 P1 connects to the foreline gauge cable Solenoid cable 600 1476 P1 connects to the solenoid valve block as well as the digital pressure switch CDG cable 600 1473 P1 connects to the CDG gauge Transpector ...

Page 35: ...P5 15 9 GND 600 1154 Px 600 1480 Px 1 m 3 m 5 m or 10 m CABLE BUNDLE 600 1477 Gx 922 205 Gx SPSTM INLET CDG 600 1475 P1 600 1474 P1 600 1473 P1 600 1476 P1 TURBO MOLECULAR PUMP FORELINE BLOCK TURBO CTRL VALVE BLOCK PRESSURE SWITCH FAN Pirani TRANSPECTOR SPS CABLE BOX CABLE BOX BOTTOM VIEW I O 600 1472 P1 600 1473 P1 600 1476 P1 600 1485 P1 600 1486 P1 600 1474 P1 600 1475 P1 ETHERNET 600 1130 Px ...

Page 36: ...te standards such as SEMI S6 0707E for exhaust gas guidelines WARNING Proper exhaust connections must be installed when sampling toxic corrosive or any hazardous gases to protect the environment from lethal levels of gas CAUTION If a customer supplied foreline pump is used it must provide a continuous pressure below 10 Torr Figure 2 9 Two stage foreline pump components 2 9 Software Installation Re...

Page 37: ...ly set by a host or by a server on a network Dynamic IP addresses can be set through Dynamic Host Communication Protocol DHCP NOTE When using Static IP addresses on a large network e g on a company network a block of addresses should be reserved for static IP address use and prohibited from being assigned by the DHCP server host This will avoid duplicate IP address conflicts CAUTION Use static IP ...

Page 38: ...ices are on different subnets 3 3 Transpector SPS IP Address The default Transpector SPS IP address is 192 168 1 100 with a subnet mask of 255 255 0 0 NOTE When connecting to an existing local network there must be a static IP address for each Transpector RGA Contact the network administrator for IP address assignments Two methods of changing the Transpector SPS IP address are available INFICON Ma...

Page 39: ...o be installed Double click INFICONMassSpecSearch exe The IMSSU will display See Figure 3 1 Figure 3 1 INFICON mass spectrometer search utility The IMSSU detects every Transpector RGA installed on the network regardless of IP address The IMSSU will run automatically or it can be manually started by clicking Search Clears List The display shows Genus MPCPMSI for Transpector SPS sensors Serial Numbe...

Page 40: ... 3 3 Figure 3 3 TCP IP Properties window The TCP IP Properties window displays the Transpector SPS MAC Address Transpector SPS IP address Change To text box to enter a new Transpector SPS IP address DHCP On or DHCP Off selection CAUTION Set DHCP Off so the IP address cannot be automatically assigned 2 Type the new IP address in the Change To text box 3 Click Apply Transpector SPS will automaticall...

Page 41: ...e device The indicator will flash for up to 60 seconds and then illuminate Find Device Off selected within 60 seconds after selecting Find Device On will stop the search 3 3 1 4 Show Settings Click Show Settings to display multiple settings useful for troubleshooting The display shows Serial Number Gateway IP Address DHCP Status MAC Address Description Subnet Mask Name Description Structure Versio...

Page 42: ... address of the host computer used to control Transpector SPS must have a subnet mask of 255 255 0 0 and a network prefix of 192 168 x x If this is not the case change the computer IP address to match the network prefix of Transpector SPS For example giving the computer an IP address of 192 168 1 101 will allow Transpector SPS to communicate directly with the computer See section 3 5 Changing the ...

Page 43: ...be created when multiple Transpector SPS sensors are connected to a single host computer instead of an existing local area network Transpector SPS must be installed on either a router or Ethernet switch The router or switch is connected to the host computer through the LAN port of the router switch 3 4 2 2 Installing Multiple Transpector SPS on an Existing Local Network Use an Ethernet switch inst...

Page 44: ...ss to allow for communication between the host computer and Transpector SPS 3 5 1 Windows 7 NOTE Changing the IP address of the host computer requires administrator rights 1 Click Start then click Control Panel See Figure 3 4 Figure 3 4 Start menu 2 In the Network and Internet group click View network status and tasks See Figure 3 5 Figure 3 5 View network status and tasks ...

Page 45: ...hange adapter settings See Figure 3 6 Figure 3 6 Change adapter settings 4 If the host computer is connected directly to Transpector SPS through the Ethernet port of the computer right click Local Area Connection and select Properties See Figure 3 7 Figure 3 7 Changing adapter settings ...

Page 46: ... Manual 5 Click Internet Protocol Version 4 TCP IPv4 6 Click Properties See Figure 3 8 Figure 3 8 TCP IPv4 7 On the TCP IPv4 properties window click Use the following IP address See Figure 3 9 Figure 3 9 Use the following IP address ...

Page 47: ...or SPS IP address See Figure 3 10 9 In Subnet mask type 255 255 0 0 10 Click OK Figure 3 10 Changing the computer IP address 11 The IP address will now be set to the manual IP address chosen in step 7 12 Exit all menus 13 Connect to Transpector SPS 14 To change the IP address back to its default settings follow steps 1 through 6 and reset the properties to their original settings ...

Page 48: ...omponents 7 5 4 3 2 1 14 12 11 9 10 6 1 Process Pressure Gauge 2 Process Connection KF25 VCR or Swagelock 3 Transpector SPS Inlet 4 Optional Calibration Reference 5 Transpector SPS Sensor inside manifold 6 Sensor Manifold and Heater 7 SPS Transpector Electronics Module 8 Pressure Switch 9 Valve Solenoids 10 Nitrogen Regulator for nitrogen purge and valve operation 11 Integrated Foreline Block 12 U...

Page 49: ... with the source at 2E 4 Torr the pressure in the manifold is approximately 1 0E 5 Torr Pressure converters use orifices and or capillaries to reduce the partial pressure of the gas mixture typically by a fixed proportion with minimum mass discrimination An orifice a small disk with a defined hole acts as a conductance limitation When both the volume and the high vacuum pump speed are constant the...

Page 50: ...nput 2 to Pin 15 Ground will turn off the emission CAUTION Controlling emission through digital inputs bypasses all software and hardware interlocks When using digital inputs for controlling Transpector SPS emission develop an interlock that will not allow the emission to turn on if the pressure is too high for operation of Transpector SPS 4 3 1 3 One Status Relay Output One status relay output is...

Page 51: ...om the process by pressure difference provide low pressure for optimum operation of the sensor A dry pumping system comprised of a turbo molecular pump and foreline pump is used to minimize hydrocarbons in the residual gas background The turbo molecular pump provides a high compression ratio between the high vacuum side and the foreline pump side for all gases including hydrogen Hydrogen is the ma...

Page 52: ...C dual element silicone rubber pad heater with silicone rubber foam insulation The Controller supplies power to the heater The heater is software controlled at low temperature 90 C or high temperature 150 C WARNING High Temperature During or immediately after bakeout the heating jacket and metal surfaces in the vicinity of the heating jacket are hot These surfaces exceed 100 C at the maximum ambie...

Page 53: ...solenoid valves See Figure 4 3 V0 Foreline isolation valve and nitrogen purge valve on corrosive systems Automatically opened and closed by the start stop of the pumping system V1 Open for use with auxiliary valve requires 1 8 in pneumatic tubing V2 Open for use with auxiliary valve requires 1 8 in pneumatic tubing V3 Open for use with auxiliary valve requires 1 8 in pneumatic tubing V4 Open for u...

Page 54: ... the pressure of process gas to a pressure at the ion source which optimizes partial pressure measurements The pressure reduction orifices produce 2x10 4 Torr pressure in the closed ion source CIS The flow rate of gas that produces this pressure is Q T L s PCIS SCIS 2x10 4 Torr x 0 7 L s 1 4x10 4 T L s PCIS the pressure at the CIS ion source within the Transpector SPS tee region SCIS the pumping s...

Page 55: ...ilable in various sizes to cover several pressure ranges Table 4 4 show different orifices for low and high pressure range application Figure 4 4 shows pressure ranges for sampling which will assist in choosing the proper orifice for the application Table 4 4 Orifices sniffers and capillaries Typically process pressure Size of Orifices Sniffers and Capillaries Part Number 10 mTorr orifice 964 706 ...

Page 56: ...minated by the time it takes for the gas species that changes in the process to diffuse through the gas matrix and arrive at the sampling orifice This diffusion time is proportional to the process pressure and the square of the distance from the process to orifice This sampling method effectively shortens the diffusion distance from process change to the sampling orifice by drawing a small quantit...

Page 57: ...ust be baked out after initial installation or whenever the RGAsensor is exposed to air After an eight hour bakeout and cool down the base pressure must be less than 5E 7 Torr at 40 eV 200 A If not examine the background mass spectrum to look for the largest peak If the spectrum is dominated by mass 18 continued bakeout is required to reduce water vapor ...

Page 58: ...evels of impurities in process gases that are significantly lower at sub ppm levels for many components than those detected by open ion source RGA analyzers 5 2 Sensors The three main components of the Transpector SPS sensor are ion source ionizer quadrupole mass filter detector electron multiplier These components are mounted on an electrical feedthrough flange bolted to the vacuum manifold See F...

Page 59: ... SPS detects only positive ions Once a molecule is charged ionized electric fields can be used to manipulate the molecule The default filament is made of tungsten Tungsten offers the best resistance to aggressive gases particularly those containing fluorine and chlorine A yttria coated iridium filament can be used in oxygen or water vapor heavy environments oxygen or water would quickly oxidize a ...

Page 60: ...r are pulled away by the potential on the focus lens and formed into an ion beam The focus lens is also called an extractor since it extracts the ions from the region in which they are created The focus lens focuses the ion beam into the hole in the source exit lens To attract positive ions the focus lens is biased negatively with respect to the anode The potential on the source exit lens is negat...

Page 61: ...ween the center of the square array and the closest rod surface is known as the quadrupole radius r0 Ideally the rod should have a hyperbolic shape towards the center of the assembly rather than round If the ratio of the round rod radius to r0 is equal to 1 148 the resulting electric field is a reasonably good approximation of the desired hyperbolic shape Opposite rods are electrically connected t...

Page 62: ... the mass filter can be made to discriminate against both high and low mass ions The ion energy directed along the Z axis of the mass filter is dependent on the difference between the potential at which the ions were formed the anode voltage and the pole zero The ion energy is usually only slightly modified by the electric field the fringing field between the source exit aperture and the quadrupol...

Page 63: ...mass filter for a mixed beam of ions rejecting those of both high and low mass while passing those of an intermediate mass The selectivity of the mass filter is expressed in terms of resolution R which is numerically given by the ratio of the center mass M to the width M both in AMU of the pass band Since the number of the ions passed by the filter falls off gradually as the edge of the pass band ...

Page 64: ...f unseparated ions is detected called the zero blast See Figure 5 4 Zero blast will interfere with the observation of masses 1 and 2 in the higher pressure range of the RGA i e 1E 6 Torr to 5E 4 Torr when significant quantities of higher mass ions are present The zero blast contribution to the mass 2 signal intensity can be between 5 ppm and 100 ppm depending on the mass range of the RGA Figure 5 ...

Page 65: ...d surface which is at a more positive potential where additional electrons are generated This process repeats itself until a pulse of electrons emerges from the output of the EM and is collected on a Faraday Cup The result is that as many as a million electrons or more can be produced by each incident ion The current output from an EM detector is negative due to this pulse of electrons The ratio o...

Page 66: ...EM FC performance does not degrade when exposed to air and does not need to be stored under vacuum The maximum operating temperature for the CDEM FC detector is 150 C It can be baked out at 300 C with the high voltage off The CDEM FC detector is slightly slower to recover after exposure to excessive input or output currents It may take a bit longer to stabilize its gain after the high voltage is c...

Page 67: ...tamination Make sure diffusion pumped vacuum systems are properly trapped to reduce oil back streaming Make sure turbomolecular pumped systems are interlocked to eliminate mechanical pump oil back streaming through a nonspinning turbo pump EM gain reduction from these kinds of problems can range from 50 to more than 90 The initial gain of the EM is generally high enough to accommodate some degrada...

Page 68: ...um A mass spectrum is a pattern of peaks on a plot of ion intensity as a function of ion mass to charge ratio Each chemical substance has a characteristic mass spectrum Different instruments will give slightly different spectra for the same substance The particular characteristics of the ionizer mass filter detector and the manner in which the sample is introduced into the mass spectrometer all in...

Page 69: ...5 12 Transpector SPS Operating Manual Figure 5 6 Air mass spectrum N N2 O2 Ar O H2O ...

Page 70: ...ly charged ions are possible provided the incident electron has enough energy Reactions 3 through 8 are examples where the original molecule is broken into fragments at least one of which is positively charged negative ions can also be produced in this manner Only the positive ion fragments are observed the neutral uncharged fragments are not detected The mass spectrum obtained when the parent mol...

Page 71: ...cule is comprised of two atoms of the same element the typical partial pressure analyzer cannot distinguish between the singly charged one atom fragment ion and the doubly charged two atom molecular ion which will both have the same mass to charge ratio Refer to Figure 5 7 The peak at 28 AMU is the parent ion N2 It is not discernible from this spectrum if the peak at 14 AMU is from N or N2 2 The 1...

Page 72: ... 21 18 mass 131 26 89 mass 132 10 44 mass 134 and 8 87 mass 136 Isotope ratios like fragmentation patterns aid in recognizing specific materials Under normal partial pressure analyzer ionization conditions the peak height ratios for the various isotopes of an element will be the same as the ratios of their natural abundance s For example the probability of ionizing the mass 35 isotope of chlorine ...

Page 73: ... 19 100 0 Ne 20 90 92 21 0 257 22 8 82 Na 23 100 0 Al 27 100 0 Si 28 92 27 29 4 68 30 3 05 P 31 100 0 S 32 95 06 33 0 74 34 4 18 36 0 016 Cl 35 75 4 37 24 6 Ar 36 0 337 38 0 063 40 99 600 Table 5 2 Isotope ratios continued Isotope Ratios Element Mass No Relative Abundance ...

Page 74: ...s level the rate of Ar production slowly decreases Typically in mass spectrometry electron impact ionization is carried out at an electron energy of 70 eV for two reasons 70 eV is above the minimum energy required to produce at least some positive ions from any sufficiently volatile chemical species 70 eV is near the energy at which the rate of ion production is at its maximum for most of the comm...

Page 75: ...eral ppm of water vapor would require the detection of less than one ppm of current at 17 AMU This is difficult because there will be some tailing of the 510 ppm 36Ar2 peak at 18 AMU onto 17 AMU The best solution to this argon water vapor problem is to make use of a property of ions known as appearance potential The appearance potential for an ion from a given substance is the minimum electron ene...

Page 76: ...th FabGuard Explorer electron energy can be changed to a voltage ranging 10 100 eV CAUTION Below 70 eV it is necessary to limit the electron emission current to no more than 200 μA in order to not overpower the filament Overpowering the filament will result in shortened filament life 5 3 1 4 A Qualitative Interpretation Guide A partial pressure analyzer identifies unknown substances by interpretin...

Page 77: ... 11B DI 22Ne Rare 11BF3 BCl3 12 C carbon carbon monoxide F carbon dioxide F 13 CH 13 C methane F carbon isotope 14 N CH2 nitrogen methane F or Note 1 15 CH3 methane F or Note 1 16 O CH4 NH2 oxygen or carbon monoxide F ammonia 17 OH NH3 water F ammonia F 18 H2O water 19 F fluorine or freon F 20 Ar2 Ne HF argon Dl neon hydrofluoric acid 21 22 22 Ne CO2 neon DI CO2 23 24 C2 See Note 1 25 C2H See Note...

Page 78: ...hydrocarbons 42 C3H6 See Note 1 hydrocarbons 43 C3H7 CH3CO Note 1 acetone F or methyl ethyl ketone F 44 CO2 C3H8 Carbon dioxide See Note 3 45 CH3CH2O ethanol F or isopropyl alcohol F 46 CH3CH2OH ethanol P 47 C35 Cl See Note 2 48 HC35 Cl SO See Note 2 sulfur dioxide F 49 C37Cl See Note 2 50 C37 Cl CF2 C4H2 See Note 2 freon F Note 3 NOTE 1 Fragments of several hydrocarbons such as mechanical pump oi...

Page 79: ...able 5 5 is not an all inclusive list There may be other important species such as highly reactive intermediates which are not included The list of monitored masses for each process is a general guide Significant spectral overlap exists for example COF2 and SiF4 or CO CO2 and N2 which must be considered when interpreting the data Furthermore many cracking patterns for the important species are ver...

Page 80: ...9 281 38 20 18 17 32 16 28 14 257 259 86 67 105 48 52 33 71 279 281 38 20 18 17 28 14 32 16 257 259 86 67 105 48 SiO2 and boro phospho s ilicate glass CHF3 CF4 CHF3 O2 CHF3 CF4 O2 SiF4 CO2 HF H2O COF2 C2F6 51 69 69 50 32 16 85 66 47 44 28 16 12 20 18 17 47 66 119 Table 5 5 Dry etching chemistries continued Etched Material Typical Reagents Important Species Monitored Masses ...

Page 81: ...neration The presence of WOF4 may be the only indication that water vapor or oxygen are also present but not detected by the mass spectrometer because of rapid reaction with the tungsten hexafluoride Si3N4 CF4 O2 CF4 O2 SiF4 NF3 CO2 HF H2O COF2 N2 CO 69 50 31 32 16 85 66 47 52 33 71 44 20 18 17 47 66 28 14 28 12 Poly Si BCl3 Cl2 HBr Cl2 O2 BCl3 Cl2 SiCl4 HCl H2O HBr Cl2 O2 SiCl4 SiBr4 SiBrXCl 1 X ...

Page 82: ...terest Chemical Type Monitoring Mass WF6 reagent 279 H2 reagent 2 SiH4 reagent 30 31 32 Ar reagent 40 N2 reagent 28 interference from SiH4 HF product 20 at 35 eV O2 contaminant 32 interference from SiH4 H2O contaminant 18 at 35 eV WOF4 by product 257 Table 5 7 Copper MOCVD materials of interest Chemical Types Monitoring Mass CuI hfac tmvs reagent 201 63 H2 reagent 2 Ar reagent 40 tmvs product 100 ...

Page 83: ...re analyzer The substance dependent part is called the material factor Mab The instrument dependent part is called the analyzer factor Ab and depends primarily on the ion mass b Therefore the original equation 4 can therefore be rewritten as follows 5 The material factor Mab depends on the fragmentation pattern for the particular substance the fragmentation pattern for a reference gas usually nitr...

Page 84: ...a Base by Heller and Milne and an extensive library of spectra is available from the National Institute of Standards and Technology Table 5 8 lists the fragmentation factors FF for the major peaks for selected substances NOTE Actual fragmentation factors vary significantly depending especially on the ionizer electron energy and mass filter turning For best accuracy measure fragmentation factors wi...

Page 85: ...92 24 40 87 krypton Kr 39 07 20 13 84 45 65 04 86 13 63 03 benzene C6H6 82 10 78 43 83 10 trichlorethylene C2HCl3 51 09 130 17 52 09 methane CH4 95 16 50 08 16 44 132 16 15 39 97 10 carbon dioxide CO2 14 09 60 08 44 86 13 05 28 06 12 02 water H2O 16 05 17 01 18 77 12 01 17 21 methanol CH3OH 16 02 carbon monoxide CO 31 31 28 87 32 21 xenon Xe 12 08 29 07 132 26 16 04 28 04 129 26 29 01 131 22 neon ...

Page 86: ...essure of the substance of interest The ratio of the gauge reading to the known true pressure is the relative ionization probability To determine the true pressure use a gauge which is gas species independent e g a capacitance manometer or a gauge with a known sensitivity factor e g a spinning rotor gauge Table 5 9 Ionization Probabilities For Some Common Substances Substance Formula Relative Ioni...

Page 87: ...t mass 28 for nitrogen is the EM output current divided by the Faraday mode output current under otherwise identical conditions The multiplier gain is a strong function of the high voltage applied The sensitivity of the instrument S is the Faraday mode ion current from a given pressure of pure nitrogen measured at mass 28 and is typically expressed in A Torr cyclohexane C6H12 6 4 propane C3H8 3 7 ...

Page 88: ... as the relative ion gauge sensitivity as shown in dimensionless TFb transmission factor the fraction of total ions at mass b which pass through the mass filter relative to ions with a mass of 28 AMU nominally TFM 28 M dimensionless DFab detection factor for mass b ions from substance a relative to nitrogen at 28 AMU assumed to be 1 00 for Faraday detectors but varies for EM detectors dimensionles...

Page 89: ...er Significant temporary pumping effects will frequently occur following degassing the ion source Reactions involving gas molecules on surfaces of the analyzer can result in a change of composition Gases can either be consumed by the surfaces or produced by the surfaces One example of gas consumption is the reaction of oxygen with a hot filament particularly when tungsten filaments are used The ty...

Page 90: ...voltages are varied during the sweep through the mass range Most instruments are designed to operate with a constant peak width constant M which results in a resolution which is proportional to the mass This characteristic provides a good degree of peak separation throughout the mass spectrum but results in an ion transmission efficiency i e the fraction of all ions of the selected mass entering t...

Page 91: ...ypass Used in high pressure applications above 1 Torr The bypass connects to the interstage of the turbo molecular pump via a bypass tube which pulls gas from the process directly to the orifice This can cut the response time down from several minutes to less than ten seconds for a 100 Torr process The bypass inlet typically consumes approximately 17 sccms of process gas NOTE When sampling lighter...

Page 92: ... Process Connections 6 1 2 Calibration Option A single source of gas mixture will accomplish two calibration functions Mass scale calibration Partial pressure reference levels NOTE Selection of the appropriate gas mixture components is dictated by the mass range desired Test Mix 1 composition is listed in Table 6 2 The method of delivery is a flow reference with a remote on off valve V5 The gas fl...

Page 93: ...cated at the inlet of the high vacuum pump CAUTION A bakeout must be performed if FC5311 Tuning Reference Gas is sampled Up to 24 hours of pumping may be required to remove all trace levels The perfluorophenanthrene liquid in the FC5311 Tuning Reference has a high molecular weight and a vapor pressure of 100 Pa 1 Torr at 22 C 71 6 F The mass spectrum is given as mass and characteristic peak intens...

Page 94: ... is resistant to high pressure surges Table 6 3 Mix 2 FC5311 reference mass spectrum 70 eV peak intensity ranging 1 100 Mass Intensity Mass Intensity 55 1 83 219 2 66 56 1 09 231 4 06 57 2 97 243 7 66 69 100 255 2 09 70 1 17 267 2 55 93 5 97 286 2 09 94 1 27 293 7 65 100 11 09 305 1 14 112 1 50 317 2 27 119 16 80 331 1 12 124 1 49 343 1 17 131 47 08 367 1 88 143 5 26 405 4 23 155 3 05 455 18 30 16...

Page 95: ...customer supplied Turbo Molecular Pump either standard or corrosive Inlet arrangement the type of inlet and or orifice Calibration reference 6 3 1 Foreline Pump The system controlled foreline pump configuration is selected when there is an INFICON supplied foreline pump If a customer supplied foreline pump is used to back other vacuum equipment a check valve can be used to temporarily isolate the ...

Page 96: ...henever corrosive gases are being sampled The purge valve is automatically opened when the Transpector SPS turbo molecular pump is operating The corrosive service high vacuum pump requires 10 to 25 sccm of purge gas flow through the bearing region to protect the bearings from corrosion and loss of bearing lubricant by evaporation The regulator is preset at the factory using a MFC to produce 10 scc...

Page 97: ...urned on and closes when the pump is shut down Over pressurization is avoided by pressure relief of the foreline pump valves Over pressure exits the exhaust There is no software control of the nitrogen purge valve it is coupled with foreline pump operation 6 5 Filament Control 6 5 1 Interlock On pump down emission will automatically turn on when the turbo molecular pump reaches full speed 90 000 R...

Page 98: ...can be used to infer the target gas pressure in the CIS that produces the total pressure measurement Using the process gas pressure measured by the CDG or other gauge and the conductance of the orifice in use the PCIS Hi P and PCIS Lo P values can be calculated to use the automatic TW 32 Total Pressure Calibration software 6 5 3 Filament Lifetime Tungsten filament material is used in corrosive app...

Page 99: ...gen or water vapor partial pressure in Torr The graph predicts a filament lifetime of approximately 200 seconds at 1 Torr the maximum pressure at which Transpector can maintain electron emission Figure 6 1 Tungsten Filament MTBF At 1 Torr at the filament the pressure inside the anode cylinder will be approximately five times higher assuming the bulk of the gas load is entering the Transpector SPS ...

Page 100: ...ment would be destroyed instantly Figure 6 2 Transpector SPS over pressure trip calculations 6 6 Pneumatic Digital Pressure Switch and Pressure Gauge The Pneumatic Digital Pressure Switch and Pressure Gauge provide a visual display of the air or nitrogen pressure provided to the pneumatic block ensure proper pressure for the Transpector SPS to function If the pressure has decreased below 58 psi 3 ...

Page 101: ...tal pressure switch and gauge 6 6 1 Setup Procedure This setup procedure assumes no pressure is applied psi is the pressure unit Figure 6 4 depicts the location of the display and controls Figure 6 4 Location of display and controls Pneumatic Digital Pressure Switch and Gauge ...

Page 102: ...or Mode The default is Sor Red on 7 To change the Display Color Mode press or Operating Mode 8 Press The display will show the current operating mode The default is und 9 To change the Window Mode press or to select und Window Mode Output Mode 10 Press The display will show the current Output Mode The default is nC normally closed 11 Press or to change the Output Mode NOTE The no normally open mod...

Page 103: ...er representing the upper pressure limit Follow the same procedure refer to step 16 to set the upper limit to 100 psi 6 6 2 How to Test for Proper Settings With zero pressure applied the display will show 0 pressure small negative numbers are acceptable and the display will be colored red NOTE The following test assumes the pressure unit is psi Apply a pressure of slightly greater than 58 psi and ...

Page 104: ...nge 1 In Measurement Mode press for five seconds UnL unlocked is displayed 2 Press or to change UnL to LoC 3 Press to return to Measurement Mode To unlock the settings so that they can be changed 1 In the Measurement Mode press for five seconds LoC locked will display 2 Press or to change LoC to UnL 3 Press to return to Measurement Mode ...

Page 105: ...tion 1 4 How to Contact INFICON on page 1 3 7 2 Safety Considerations WARNING If Transpector SPS is used in a manner not specified by the manufacturer the protection provided by Transpector SPS may be impaired WARNING Transpector SPS maintenance should only be performed by qualified personnel WARNING There are no user serviceable parts inside the Transpector electronics or the controller modules W...

Page 106: ... 3 Electrical Voltages Transpector SPS does not present electrical hazards when enclosed and grounded according to the specifications given in the installation instructions WARNING Risk Of Electric Shock The Transpector electronics and controller modules should never be operated with their covers removed Hazardous electrical voltages present a shock hazard Such operation should not be attempted ex...

Page 107: ... Sensor Filament Replacement on page 7 17 and do section 7 7 3 Transpector Sensor Ion Source Replacement on page 7 19 If the problem remains contact INFICON Refer to section 1 4 How to Contact INFICON on page 1 3 CAUTION When heating the sensor above 200 C the electronics module and the signal contact must be removed from the sensor 7 3 2 Spare Heating Jacket INFICON offers a heating jackets to he...

Page 108: ... fingers CAUTION Use clean tools for sensor disassembly and assembly 7 5 Required Tools Materials or Parts 7 5 1 Tools for Replacing the Filament Kit 3 mm nut driver 1 16 in flat blade screwdriver 7 5 2 Tools for Replacing the Ion Source 1 16 in flat blade screwdriver 2 Phillips head screwdriver Precision pliers 7 5 3 Tools for Replacing the Electron Multiplier 1 16 in flat blade screwdriver Phill...

Page 109: ...ragms in the Foreline Pump 7 6 1 Replacement Interval The foreline pump diaphragm disks valve seals valve disks and O rings must be replaced every 8000 hours of operation 7 6 2 Diaphragm Kit PN 923 418 G1 Figure 7 1 Diaphragm kit contents Valve Disk Valve Seal Thick Thin Diaphragm Disk O ring O ring Diaphragm Disk Valve Seal Valve Disk Thin O ring Thick O ring ...

Page 110: ...1 Using two 9 16 in open end wrenches remove the interstage tubing between the two pump heads See Figure 7 2 Figure 7 2 Removing the interstage tubing 2 Using a 1 Phillips screw driver remove the cam cover from the top side of the foreline pump See Figure 7 3 Figure 7 3 Removing the cam cover Interstage Tubing Cam Cover ...

Page 111: ...ery substance indicates bearing wear requiring pump replacement 4 The diaphragm disks are screwed into the cams See Figure 7 4 Figure 7 4 Foreline pump cams 5 Unscrew the head covers of the foreline pump using a 3 mm hex key See Figure 7 5 Figure 7 5 Removing the head cover Spacers Diaphragm Disk Cams Head Cover ...

Page 112: ...7 8 Transpector SPS Operating Manual 6 Remove the foreline pump head cover and diaphragm plate See Figure 7 6 Figure 7 6 Diaphragm and diaphragm plate Thin O ring Diaphragm Plate Diaphragm Head Cover ...

Page 113: ...ad cover See Figure 7 7 NOTE Take note of the orientation of the valves in the head cover and diaphragm plate They must be reassembled in exactly the same orientation Figure 7 7 Diaphragm plate separated from head cover Valve Seal Valve Disk Head Cover Diaphragm Plate Thick O ring ...

Page 114: ...an both sides of the diaphragm plate and the foreline pump head cover with methanol and lint free wipes Pay special attention to the sealing surfaces grooves inside of the head cover and on either side of the diaphragm plate CAUTION Read and understand the entire Methanol Material Safety Data Sheet MSDS Follow the precautions specified in the MSDS Diaphragm Plate Diaphragm Side Diaphragm Plate Val...

Page 115: ...0 Rotate the diaphragm disk counterclockwise to unscrew the diaphragm disk from the cam If necessary carefully use a flat head screwdriver to pry up the diaphragm disk See Figure 7 9 Figure 7 9 Unscrew diaphragm disk Rotate Counterclockwise ...

Page 116: ...on the new replacement diaphragm in exactly the same order as they were on the old diaphragm See Figure 7 11 CAUTION The spacers cam diaphragm disks and electric motor are balanced at the manufacturer for optimal performance Therefore one side of the diaphragm may have a different number of spacers than the other in order to achieve balance To maintain the balance the original spacers must be tran...

Page 117: ...diaphragm 13 Clean the channel that the diaphragm disk is seated in with methanol and lint free wipes See Figure 7 12 14 Screw the diaphragm disk with original spacers into the cam screw hole See Figure 7 12 CAUTION Screw in the diaphragm disk tightly A loose disk can damage the pump ...

Page 118: ...he thin O ring into the groove on the diaphragm side of the diaphragm plate See Figure 7 13 Figure 7 13 Thin O ring 16 Carefully place the diaphragm plate over the diaphragm head so that the screw holes line up See Figure 7 14 Diaphragm Disk with Spacers Cam Screw Hole Clean Channel Thin O ring ...

Page 119: ... 20 Perform steps 5 19 again for second pump head 21 Replace the cam cover 22 Replace the interstage tubing See Figure 7 15 Figure 7 15 Reassembled interstage tubing 7 7 Transpector Sensor Maintenance Sensors must be cleaned by qualified factory personnel only Refer to section 1 4 How to Contact INFICON on page 1 3 for assistance Maintenance of the Transpector SPS sensor is limited to filament ion...

Page 120: ... 16 A failed filament will measure open while an intact filament will measure 0 8 Figure 7 16 Sensor pinout NOTE Although the following measurements may measure below 30 M with the filament assembly and ceramic shield in place they must be above 30 M when measured with the filament assembly and ceramic shield removed Table 7 2 Pin assignment Pin Assignment Pin Assignment 1 PP 8 GND 2 EM HV 9 RF 3 ...

Page 121: ...measurement between the filament pins if the filament has not failed 7 7 2 Transpector Sensor Filament Replacement 1 Remove the ceramic sealing disk by carefully pulling the wire hold downs away from the edges of the disk and pulling off the sealing disk 2 Remove spring 3 Remove the filament lead screw A loosen the filament lead screw B and remove the filament leads from the filament See Figure 7 ...

Page 122: ...s holding the filament assembly in place Be careful do not to lose the two ceramic sealing disk wire hold downs See Figure 7 18 Figure 7 18 Removing sensor filament assembly 5 Carefully remove the filament assembly See Figure 7 19 Figure 7 19 Filament assembly removed Nuts ...

Page 123: ...l the wire hold downs CAUTION To avoid cracking the ceramic plate do not overtighten the three nuts 9 Reattach the filament leads and tighten the filament lead screws 10 Reinstall spring and ceramic sealing disk 7 7 3 Transpector Sensor Ion Source Replacement 1 Remove filament lead screw A1 loosen filament lead screw A2 and loosen the three screws B in the ion source lead connectors See Figure 7 2...

Page 124: ...away from the sensor 3 Remove the three ion source retaining screws around the bottom of the ion source assembly See Figure 7 21 one screw is not visible in the figure They hold the ion source onto the quadrupole assembly Figure 7 21 Ion source retaining screws Screws ...

Page 125: ...rce by reversing the above steps See Figure 7 22 Figure 7 22 Ion Source and quadrupole assembly 5 Using an ohm meter check that the filament is not shorted to ground or to any of the ion source plates and that the two filament leads show a filament resistance of approximately 1 at the feedthrough approximately 0 5 at the lead connectors ...

Page 126: ...osen filament lead screw A2 and loosen the three screws B in the ion source lead connectors Using the 1 5 x 50 mm hex driver unscrew the screws C that secure the two RF leads Make sure to remove the lock washers as well There are a total of seven leads that must to be loosened See Figure 7 23 Figure 7 23 Detach leads 2 Gently pull the electrical leads away from the sensor CAUTION Do not bend the l...

Page 127: ...ng the 2 0 x 75 mm hex driver unscrew three screws one is hidden in the figure holding the sensor assembly to the feedthrough Gently remove the sensor assembly from the feedthrough See Figure 7 24 Figure 7 24 Removing the sensor assembly Screws ...

Page 128: ...ld screws one is hidden in the figure holding the EM assembly inside of the sensor assembly See Figure 7 25 Figure 7 25 Removing the screws holding the EM 5 Gripping the bottom of the EM assembly gently remove the EM assembly from the sensor assembly See Figure 7 26 Figure 7 26 EM assembly Screws ...

Page 129: ...n the bottom of the old detector assembly See Figure 7 27 Figure 7 27 Removing the ceramic shield 7 Install the ceramic shield removed in step 6 onto the new Electron Multiplier assembly 8 Install the new Electron Multiplier assembly into the sensor can Ceramic Shield ...

Page 130: ...ng the sensor back into the feedthrough ensure that the two pins on the bottom of the detector align with the two pins on the feedthrough See Figure 7 28 Figure 7 28 Pin location 10 Reverse steps 1 4 to reassemble the Transpector SPS sensor Detector Pins ...

Page 131: ...cation problems do the following Is the Ethernet cable connected to the Transpector electronics module and the host computer either directly or through a router switch Does the Transpector sensor IP address have the same network prefix as the host computer Is Port 80 open on the host computer Is there an IP address conflict between the Transpector sensor and another network device NOTE Refer to Ch...

Page 132: ...ure switch Verify incoming pneumatic pressure is between 58 and 100 psi Turbo molecular pump does not reach operating speed Foreline pressure too high due to gas leak or forepump diaphragm failure Find Leak s Replace diaphragm refer to section 7 6 on page 7 5 Turbo molecular pump bearing drag excessive Replace pump Foreline pressure too high due to water vapor in foreline hose Run pump down and pu...

Page 133: ...N for repair Power indicator on Transpector cable box does not illuminate Controller is not on Refer to section 2 2 1 Attach Transpector Electronics Module on page 2 1 Transpector SPS control cable is disconnected Check control cable at controller end and at cable box end No communication to HOST computer Sensor IP address not compatible with network Refer to Chapter 3 Connecting Transpector SPS T...

Page 134: ...module not fully engaged on sensor Make sure that the Transpector SPS electronics module is pushed completely on sensor Cable box not fully seated on Transpector electronics module Ensure cable box is fully seated on Transpector electronics module ANODE error Defective sensor anode shorted Check sensor with Ohm meter for shorts See sensor pin out diagram Fix or replace sensor Electronics failure R...

Page 135: ... in local proximity Verify that the internal fan is providing adequate airflow Electronics failure Return to INFICON for repair Overpressure Total pressure plate current exceeded trip threshold Reduce pressure at the ion source to less than 5E 4 Torr Total pressure plate is contaminated Replace ion source Process pressure too high for sampling orifice Reduce process pressure Install proper orifice...

Page 136: ... INFICON for repair DEC Communications Error Incorrect DEC response detected Reset electronics module Return electronics module to INFICON for repair Peakfind Error No peak at target mass Upload original configuration file Return electronics module to INFICON for repair Filament potential error Insufficient vacuum Verify pressure is less than 5E 4 Torr at the ion source Filament broken Verify inte...

Page 137: ...ain focus voltage Reset electronics module Return electronics module to INFICON for repair No spectra Emission is OFF Turn emission ON EM is ON when operating Turn EM OFF Contaminated sensor Degas or service sensor Replace sensor Electronics failure Return to INFICON for repair Pressure too low for FC Use EM detector EM voltage too low Increase voltage Transpector SPS electronics module not fully ...

Page 138: ...ectron energy ion energy focus emission current Improper calibration Ensure that the total pressure gauge used for sensitivity calibration was properly calibrated Electronics failure Return to INFICON for repair EM has low gain Replace sensor or EM Poor peak shape Sensor contaminated Degas sensor Bake out sensor Service sensor Ion source pressure too high Verify pressure is less than 5E 4 Torr at ...

Page 139: ...ing problems See FabGuard Explorer Operating Manual PN 074 528 P1 for additional information High noise level System grounding Verify that vacuum system is grounded Electronics failure Return to INFICON for repair Transpector SPS electronics module not mounted properly on sensor Ensure Transpector SPS electronics module is fully seated on sensor EM defective Replace EM assembly or sensor Scan spee...

Page 140: ...able Parts The following consumable parts should be readily available Table 9 1 Consumables Part Number Description 059 196 4 VCR gasket 964 706 G6 10 mTorr orifice with gasket 964 706 G8 15 mTorr orifice with gasket 964 706 G5 100 mTorr orifice with gasket 964 706 G7 360 mTorr orifice with gasket 964 706 G4 1 Torr orifice with gasket 964 706 G9 3 Torr orifice with gasket 964 706 G3 10 Torr orific...

Page 141: ...0 G2 SPS Coated Filament Kit 964 711 G1 SPS Tungsten Ion Source Kit 964 711 G2 SPS Tungsten Ion Source Kit with Anode Liner 964 712 G1 SPS Coated Ion Source Kit 964 712 G2 SPS Coated Ion Source Kit with Anode Liner 923 418 G1 Replacement Diaphragm Kit for Two Stage Pump Table 9 3 Replacement spare parts INFICON Part Number Description 964 403 P1 SPS Manifold Heater 032 0079 Turbo Molecular Pump wi...

Page 142: ...ough recipes manual control of components and status information It provides basic residual gas analyzer features including trend analysis bar graph leak check and analog selected peak modes NOTE Additional information concerning FabGuard Explorer is located in the FabGuard Explorer Operating Manual PN 074 528 P1 This chapter assumes that the Transpector SPS Gas Analysis System is properly install...

Page 143: ...orer 2 When FabGuard Explorer is opened for the first time the message shown in Figure 10 1 will display Figure 10 1 Transpector connection prompt 3 Click Yes 4 The Connection Type message is displayed Select MP RGA HTTP as the connection type and Click OK See Figure 10 2 Figure 10 2 Transpector connection type ...

Page 144: ...Type the Transpector IP address in the IP box See Figure 10 4 7 Type the port number in the Port box 8 Click Add OK Figure 10 4 Device IP address NOTE Transpector MP sensors ship with a default IP address of 192 168 1 100 and a default Port of 80 If this IP address is not compatible with your network the IP address can be changed using the INFICON Mass Spectrometer Search Utility 9 Click Add OK ...

Page 145: ... the correct orifice value However if an orifice is changed the new configuration must be entered in the RGA Configuration 10 4 1 0 1 Inlet Calibration Defines the V5 Calibration valve If a standard calibration gas is installed select Ar standard If a high mass tuning reference gas is installed select FC5311 standard If V5 is not installed select No Valve Figure 10 5 Inlet calibration 10 4 2 Gauge...

Page 146: ...ource instruments Sensor window because of the pumping and inlet systems on the Transpector SPS Figure 10 7 Transpector SPS configuration monitor 1 Pump down the system 1a Click Pump Down inlets closed to start the foreline and turbo pumps and open the foreline valve 1b The foreline Valve Status indicator will change color from dark blue to green 1c The Turbo Pump Speed will increase to 90 000 rpm...

Page 147: ...nitor is run The Emission button will be dark blue It will progress to yellow and finally green to signify that the EM is on See Figure 10 8 Figure 10 8 Emission status 5 Click Multiplier to turn on the electron multiplier The Multiplier button will be colored dark blue It will progress to yellow and finally green to signify that the EM is on See Figure 10 9 Figure 10 9 Multiplier status 6 Click E...

Page 148: ... bottom pane of the Configuration Monitor window is representative of the Transpector SPS In Figure 10 11 an Transpector SPS with a CDG and V5 Calibration Gas is depicted Figure 10 11 Configuration monitor window Transpector SPS System GUI Determine which valve to open NOTE The full CPM valve set is configurable in FabGuard however the Transpector SPS will ship with no Hexblock valves shown on the...

Page 149: ...e configuration Use these data acquisition parameters in any data collection method 10 If the data is unsatisfactory repeat this procedure with different parameters CAUTION CIS Pressure Torr is calibrated in the factory at 40 eV electron energy at 200 µA emission current Changing electron energy and or emission current will cause incorrect CIS pressure readings 10 6 Transpector SPS Sensor Acquisit...

Page 150: ...10 9 Transpector SPS Operating Manual Figure 10 13 What to Acquire Spectrum Selected Masses Bins mode allows data collection of specific masses Figure 10 14 What to Acquire Selected Masses ...

Page 151: ...op scanning Points per amu The number of points per amu ppamu that the RGA will monitor Setting a Stop Mass value outside of the sensor s range will create an error For example if a 200 amu sensor is installed FabGuard Explorer will not allow a 250 amu Stop Mass Increasing the number of ppamu will increase the total time it takes to perform a full scan In FabGuard Explorer there are four different...

Page 152: ...lected Masses Mode It is possible to define specific masses of interest in Selected Masses Mode Transpector SPS advanced sensor functions can be tracked as individual bins in this data acquisition mode See Figure 10 16 Figure 10 16 Selected masses mode ...

Page 153: ...equire monitoring of carbon monoxide Since carbon monoxide has the same mass as nitrogen 28 amu the identity of mass 28 must be changed from nitrogen to carbon monoxide in the Identity list Dwell time can be changed in the Dwell list In the Relay list thresholds can be set up to open or close relays based on the signal of the mass bin See Figure 10 17 Figure 10 17 Mass properties CAUTION Editing a...

Page 154: ... 19 Remove Figure 10 20 Remove All 10 6 1 2 2 Adding Masses FabGuard Explorer allows masses to be added to the mass list for the sensor Dwell Time for New Bins When collecting data with Bin Independent dwell times the Dwell Time for New Bins can be set to any value NOTE The dwell time for each mass can be changed by editing the mass This new dwell time will be used for all newly created masses Fig...

Page 155: ...ss Adds a mass to monitor by identifying a specific mass in amu either defining it manually or using the auto select function to name the mass After entering the mass value in the Mass box and selecting the Identity click Add Figure 10 22 Add mass ...

Page 156: ...hat shares a mass with a compound that has previously been added FabGuard Explorer can only associate each mass with one chemical compound For instance if air is added to the active mass list and then nitrogen added afterwards an error will display because two masses have already been assigned 14 amu and 28 amu Figure 10 24 Sensor bin already exists Add Advanced Sensor Information Adds bins that m...

Page 157: ...w to Acquire SPS The How to Acquire menu for the SPS see Figure 10 26 is similar to the Open Ion Source RGAs However there are a number of differences due to the additional valve assembly and pumping system of the SPS Figure 10 26 How to acquire SPS ...

Page 158: ...y after the run is started Maximum Signal starts the run after the sensor sees a defined maximum signal The signal is set by the Data Threshold See section 10 6 2 2 2 Pressure Above starts the run immediately after an increase in the internal RGAtotal pressure above the user defined Data Threshold Emission must be ON prior to recipe start for this mode to function Pressure Below starts the run imm...

Page 159: ...s not turned on data will not be collected Figure 10 30 Emission As Is uses the current status of the filament Off starts the data acquisition with the filament off On starts the data acquisition with the filament on 10 6 2 2 4 Multiplier Defines the mode of the electron multiplier when the run starts See Figure 10 31 Figure 10 31 Multiplier As Is uses the current status of the EM Off starts the d...

Page 160: ...ops the run immediately after a decrease in the internal RGA total pressure below the user defined Data Threshold Analog 1 Above stops the run after an increase in voltage above the user defined Data Threshold Analog 1 Below stops the run after a decrease in voltage above the user defined Data Threshold Number of Points stops the run after collecting a user defined number of scans 10 6 2 3 2 Data ...

Page 161: ...ission Defines the mode of the filament when the run stops It is recommended to turn off the filament if the sensor will be exposed to high pressures following a run See Figure 10 35 Figure 10 35 Emission As Is uses the current status of the filament Off stops the data acquisition with the filament off On stops the data acquisition with the filament on 10 6 2 3 5 Multiplier Defines the mode of the...

Page 162: ...mines how the dwell is chosen for each data point This option is changeable only when in Selected Masses mode See Figure 10 37 Figure 10 37 Dwell mode Bin Independent uses the same dwell time for each data point Bin Specific is only available when running in Selected Masses mode This choice allows for each mass to have a specific dwell time This methodology is desirable if a peak of interest has a...

Page 163: ...y selectable when Bin Independent is chosen as the Dwell Mode See Figure 10 38 Figure 10 38 Dwell time 10 6 2 5 Delay Defines whether FabGuard Explorer will add additional wait time after the sensor has completed a full scan 10 6 2 5 1 Delay Mode Figure 10 39 Delay mode Minimum sets the Time Between Scans to its minimum value After the sensor has completed a scan no additional wait time will be ad...

Page 164: ...mount of time FabGuard Explorer waits after the Start Mode condition has been met before setting the Emission and EM to their specified Start states and beginning data acquisition For example if the recipe starts based on an analog input and an additional wait time is desired before the Emission is turned on 10 6 2 6 Correction Defines the type of Baseline correction used by FabGuard Explorer if a...

Page 165: ... Peak Lock should only be disabled if extremely fast data acquisition is needed and the peak position is carefully set 10 6 2 7 Inlet Defines the inlet that is opened for the run and whether it is closed after the data acquisition is over See Figure 10 43 Figure 10 43 Inlet None does not open any valves for the data acquisition This would give data that is only representative of the background of ...

Page 166: ...e To use the duty cycle feature the Open time and Close time must be defined See Figure 10 45 Figure 10 45 Duty cycle 10 6 2 8 Heater The Heater parameter controls the Transpector SPS heating jacket while the RGA is acquiring data The heater can be set to As Is Off Low 90ºC or High 150ºC Figure 10 46 Heater 10 6 2 8 1 Off After Selecting Yes from the Off After list will turn the heater off at the ...

Page 167: ... a vacuum apparatus when no gases are being deliberately introduced Bakeout A bakeout is the process of heating a vacuum chamber above the ambient temperature in order to accelerate the desorption of species such as water vapor and hydrocarbons which are adsorbed onto the inner surfaces of the vacuum chamber Center Voltage The center voltage is the DC potential to which the quadrupole rod RF and d...

Page 168: ...otential times the electron charge Electron Multiplier An electron multiplier is a in situ amplifier which is used to increase the sensitivity of a mass spectrometer When a high voltage is applied to an electron multiplier positive ions are accelerated into the multiplier causing the release of a large number of electrons per incident ion at the output Emission Current The emission current is the ...

Page 169: ...ier The gain of an electron multiplier is the ratio of incident ion current to electron current output The gain of the multiplier is a strong function of the bias potential applied across it Ion An ion is a molecule or atom which has either lost or added one or more electrons Those molecules which have lost electrons are positive ions Those molecules which have added electrons are negative ions Io...

Page 170: ... relationship between an ion current and the total or partial pressure giving rise to that current A mass spectrometer is said to have good linearity when the ion current is proportional to the pressure over a specified pressure range within a specified tolerance Typically but not always the ion current will be linear with pressure at the low end of an instrument s pressure range At some pressure ...

Page 171: ...en element which have the same number of neutrons For example 99 985 of all naturally occurring hydrogen atoms have no neutrons giving an atomic mass of approximately 1 while 0 015 have one neutron giving an atomic mass of approximately 2 There is a third isotope of hydrogen which contains two neutrons giving an atomic mass of 3 but this isotope is unstable with such a short radioactive half life ...

Page 172: ...sed to determine the quantities and chemical nature of gases present in a vacuum system The instrument is typically a mass spectrometer equipped with an open ion source Resolution Resolution is the ability of a mass filter to select between nearby masses It is typically measured as the mass of the peak divided by the width of a given mass peak at 10 or 50 of the peak maximum intensity Secondary El...

Page 173: ...o of ion current detected at the exit end of the mass filter set to transmit a given mass to the current of ions of the same mass entering the filter from the ion source Typically the transmission factor for nitrogen ions at 28 AMU is set equal to 1 The transmission factor at other masses is given relative to that for nitrogen Viscous Flow Viscous flow is that motion of gas molecules wherein the c...

Page 174: ...91 P1A 2017 INFICON Chapter 12 Bibliography For further information on partial pressure analyzers see Partial Pressure Analyzers and Analysis M J Drinkwine and D Lichtman American Vacuum Society Monograph Series or A User s Guide to Vacuum Technology J F O Hanlon John Wiley and Sons 1989 The latter book also contains a wealth of information on related topics including gas flow pressure gauges pump...

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