Inficon Transpector MPS, Operating Manual

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Transpector MPS Operating Manual
1.4 Quick Start
Read this operating manual in full prior to operating Transpector MPS. Then, follow
the steps below to quickly start using Transpector MPS.
1
Ensure that all supplied items have been received. See Chapter 12 ,
Supplied Items .
2
Install the hardware. See section 1.16, Hardware Installation, on page 1-9 .
3
Install the communication cable. See section 1.16.3, Installing Ethernet
Communications, on page 1-15 .
4
Install the software. Refer to the FabGuard Explorer Operating Manual for
information on installing the software.
NOTE: Transpector MPS requires FabGuard Version 8.4.2 or higher for operation.
1.5 Purpose of the Transpector MPS Gas Analysis System
Transpector MPS Gas Analysis System identifies and performs a quantitative
analysis of residual gas species present inside a vacuum system. The sensor, a
quadrupole mass spectrometer, analyzes gases by:
 ionizing some of the gas molecules
 separating the ions by their mass-to-charge ratio
 measuring the quantity of ions at each mass
The ions exit the quadrupole at their specific mass-to-charge ratio and generate a
signal at the detector which allows for qualitative identification of the gas species
in the vacuum chamber. The magnitudes of these signals are proportional to the
quantity of the respective gases present inside of the vacuum system.
Transpector MPS is an important aid for detecting leaks and contaminants in
high-vacuum systems. Transpector MPS can also indicate the abundance of
process specific gases present within a vacuum or other vessel, and be used to
investigate a process at a molecular level or to monitor process conditions.