HST WFS - 101545 Original Instructions Manual Download

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WFS 101545 Operations Manual

SPECIFICATIONS
a.

Pump 1
Recirculating water



Gould # 5HM04N11T6PBQE



25gpm



45psi

Pump 2
Process Water

USA ONLY

Gould 3HM07N11T6PBQE



1.5hp



15gpm



75 psi max

EU ONLY Gould
3HM10N151T6PBQE



2.0 HP



15gpm



75 psi

Pump 3
Spindle Water

Gould # 3HM04N05T6PBQE



1 hp



10gpm



50psi

Chiller

The chiller operates two zones; Zone 1 Process and Zone 2 Spindle. Each zone has
approximately 1/2 of the total chiller capacity.

WFS 101545 chiller unit is specifically designed and built for use with processing
semiconductors. However, it can be applied to any process that requires refrigerated and

SPINDLE WATER

PRESSURE

FLOW

PSI

Mpa

GPM

LPM

0.31

PSI

Mpa

GPM

LPM

0.31

114

PRESSURE

FLOW

RECIRCULATING WATER

Summary of Contents for WFS - 101545

Page 1: ...01545 Operations Manual ORIGINAL INSTRUCTIONS Installation and Operation Water Filtration System WFS 101545 Serial Number _________ HST Spindles LLC 1357 Route 3A Bow NH 03304 USA www highspeedtechnologies com ...

Page 2: ...E 11 a Floor Space Page 11 b Uncrating Page 11 c Electrical Power Requirements Page 12 d Leveling the Base Page 12 e Assembly Page 13 f Facility Interface Page 16 5 OPERATOR CONTROLS Page 19 a Power On Off Selector Switch Page 19 b E Stop Push Button Page 19 c Power on Pilot Light Page 19 d Audible Alarm Page 20 e Touch Screen Page 20 f Resitivity Sensors Page 26 6 FILTER HOUSING AND ELEMENT CHANG...

Page 3: ... PROCESS FILTER HOUSINGS Page 35 5 STARTING THE SPINDLE CIRCUIT Page 35 6 STARTING THE CHILLER Page 36 7 RESERVOIR PROCESS FLOW Page 36 8 PRESSURE SETTINGS Page 36 APPENDIX Page 38 ELECTRICAL SCHEMATICS Sheet 1 Page 39 Sheet 2 Page 40 Sheet 3 Page 41 Sheet 4 Page 42 Sheet 5 Page 43 Sheet 6 Page 44 Sheet 7 Page 45 SCHEMATIC PLUMBING Sheet 1 Page 46 TROUBLE SHOOTING Page 47 DESIGN DATA LINKS Page 48...

Page 4: ...610 and higher The procedures described herein are for a generic installation and commissioning The conditions vary from one facility to another and procedures outlined herein may require modification to accommodate specific facility requirements 2 GENERAL DESCRIPTION The WFS 101545 filtration system was specifically engineered to provide temperature controlled water for wafer dicing and similar p...

Page 5: ...sal by filtering out contaminates into a removable cartridge The cartridge can be dried and the waste material can then be handled as solid waste The unit uses standard 2 5 x 20 filter elements These come in a wide variety of configurations They are available from numerous commercial sources so the end user is free to source them from their preferred vendor The end user is not forced to go to the ...

Page 6: ...2 5 cubic foot 70 8 liter resin tanks for additional filtering and or deionization The system has three water circulating loops Process Loop Spindle Loop Internal Recirculating Loop Additionally a separate Lift Station pump is provided to return process water back to the WFS a Process Loop The Process Loop recirculates temperature controlled filtered and deionized water for dicing and grinding It ...

Page 7: ... process water returned from the lift station through filters and cooling d Lift Station The lift station returns contaminated water from the dicing process to the WFS SIMPLIFIED SCHEMATIC OF THE SPINDLE CHILLER SPINDLE COOLANT CHAMBER SPINDLE MOTORS WFS 101545 SIMPLIFIED SCHEMATIC OF THE INTERNAL RECIRCULATING LOOP DIRTY CLEAN FILTER CHILLER WEIR ...

Page 8: ...ld 3HM04N05T6PBQE 1 hp 10gpm 50psi d Chiller The chiller operates two zones Zone 1 Process and Zone 2 Spindle Each zone has approximately 1 2 of the total chiller capacity WFS 101545 chiller unit is specifically designed and built for use with processing semiconductors However it can be applied to any process that requires refrigerated and SPINDLE WATER PRESSURE FLOW PSI Mpa GPM LPM 45 0 31 10 38 ...

Page 9: ...de titanium evaporation coils enclosed in schedule 80 PVC housing The wetted surfaces are PVC and titanium making the heat exchangers impervious to the effects of DI water Copeland FFAP 03OZ e Lift Station This is a self contained pumping system with internal reservoir and float switch It is designed to collect water from the open loop process and return it to the WFS It utilizes a Liberty 405 Sum...

Page 10: ...type of filter element to best satisfy their requirements Filter elements are customer supplied and can be sourced from a variety of providers iii Gauges Each filter housing has a pressure gauge remote mounted and displayed facing the control panel These gauges provide indication of the filter condition The filter elements should be changed when the gages indicate a pressure increase in excess of ...

Page 11: ...rs are attached to the exterior They should be inspected prior to uncrating If these indicators are missing or indicate that the crate has been subjected to damaging shock loads or tipped you should notify your carrier prior to uncrating The refrigeration unit is shipped in the smaller crate The WFS base assembly and the Isolation Valve Sub Assembly are both contained in the larger crate Inspect b...

Page 12: ... following 3 phase 40 amp circuit 230 VAC 50 hz or 220 VAC 60 hz The Lift Station requires the following 115 VAC 50 60 hz 7 5 Amps See manufactures design data in appendix d Leveling Base Prior to assembly the base must be properly leveled and supported at six 6 points Figure 4 3 shows the leveler location A standard spirit or bubble level will provide sufficient accuracy for leveling the unit FIG...

Page 13: ...pective legs accordingly Ensure all leg locknuts are tight e Assembly The Isolation Valves Sub Assembly IVSA and the Chiller must be installed on site Figure 4 4 The chiller unit is shipped in a separate crate and the Isolation Valves Sub Assembly is shipped in the same crate as the main unit i Isolation Valve Sub Assembly Installation ISVA CAUTION Use care to not damage the Resitivity Sensor wire...

Page 14: ...iller for Installation Remove the chiller from its crate and inspect for damage Remove the drip pan and the four carriage bolts from the Chiller Support Frame Install the carriage bolts into the four slots on the chiller base Install the Drip Pan Thread the Power Cord and Solenoid Control Cord through the Drip Pan See Figure 4 5 FIGURE 4 4 ...

Page 15: ...e of the metal parts use proper Personal Protective Equipment PPE CAUTION Use care when connecting the chiller unions Make sure the O Rings are properly seated Do not cross thread parts Do not over tighten NOTE Check for leaks during commissioning Carefully place the prepared chiller on the Chiller Support Frame so the four carriage bolts fall into the slots on the Support Frame FIGURE 4 5 ...

Page 16: ... the union Install washers and nuts on the carriage bolts and tighten Connect the Power Cord and the Solenoid Control Cord to the round receptacles on the bottom of the Control Panel See Figure 4 6 f Facility Interface i Plumbing Connections There are six 6 facility plumbing connections to the WFS Unit Make up Water for the Spindle Coolant Circuit Make up Water for the process Cooling circuit FIGU...

Page 17: ... a lift station The connection for the Spindle Cooling Return is 1 NPT This connection directs return water from the spindle cooling loop back to the reservoir The connection for the Process Cooling Supply is 1 1 4 NPT This provides water filtered de ionized2 and cooled by refrigeration to cool the cutting grinding or dicing process This process is normally open loop Therefore a separate Lift Stat...

Page 18: ...eft of the bus bar See Figure 4 8 CAUTION Installation wiring must comply with local and national electrical codes WARNING Only qualified and licensed personnel should install facility wiring WARNING Electrical Shock hazard NOTE All pumps and the chiller have been phased together If pump rotation is not correct during commissioning change wire phase ONLY AT FACILITY CONNECTION FIGURE 4 8 ...

Page 19: ... four components Power ON OFF selector switch Power On Pilot Light E Stop detented push button Touch Screen HMI a Power ON Off Selector Switch This switch activates the control power This turns control power on WARNING This switch DOES NOT turn off AC power within the control cabinet High Voltage AC current is still on inside the cabinet even when this switch is in the OFF position Disconnect powe...

Page 20: ...e provides certain specific information and provides control or settings i Page Selection Each page displays the five different page selections at the bottom An operator can go to any page at any time Two pages are used to program the various set points WATER TEMP and SET POINTS One page is used to start the pumps and provide alarm condition HOME PAGE One Page displays the data from all the transd...

Page 21: ...and Pump 3 are both running If the Chiller Enable button is selected when either of these pumps are not running a yellow indicating message will appear notifying the need to first start these pumps NOTE The chiller has an automatic BUMP START feature that may cause the chiller to start momentarily and stop three times before starting continuous operation This is normal AUTO START STOP After initia...

Page 22: ...PRESSED This notification simply lets the operator know that the E Stop button is depressed and needs to be manually pulled out before the system can be started iii Water Temp The water temperature for the Zone 1 Recirculating Water and the Zone 2 Spindle Water is set on this page The controls for each zone are labeled The page also displays an analog indication of the actual water temperatures Se...

Page 23: ...ill stop when the water temperature drops below 67oF 70 3 The set point range is from 1o to 10oF Factory default is 3o NOTE There may be a delay before the cooling cycle stops even after the temperature is below the TEMP DELTA The Chiller compressor will run only if the following conditions are met Recirculating Pump PUMP 1 is running Spindle Water Pump PUMP 3 is running CHILLER is enabled or ON T...

Page 24: ... to the various set points v Set Points The SET POINT page can be accessed from any other page simply by touching the SET POINTS button at the bottom of the current page It also provides a digital display of the current process status See Figure 5 8 FIGURE 5 7 FIGURE 5 8 ...

Page 25: ...ocess water was 75oF the TEMP ALARM could be set for that temperature and would trigger an alarm if it was exceeded Factory Set Points RECIRC TEMP 80oF RECIRC PRESSURE 63 PSI PROCESS LOW FLOW 7 GPM PROCESS PRESSURE 63 PSI SPINDLE LOW FLOW 7 GPM SPINDLE TEMP 80oF vi Alarms Audible alarms are triggered when a parameter is outside of the ALARM SET POINT operating window or if a leak is detected The A...

Page 26: ...hange set the bottom slide switch to ON during those operations f Resitivity Sensors Two 2 Resilite RES7130 resistivity sensors are provided to monitor water condition to the Process Circuit These sensors have a fixed setting of 1 Meg Ohm They will indicate resistivity in excess of 1 Meg Ohm with a green light If resistivity becomes less than 1 Meg Ohm the light will change to red These sensors pr...

Page 27: ... parts Wing Nuts Six wing nuts hold down the top cover O Ring The top cover seals on a 3 5 x 180 mm Buna O Ring Cartridge Nuts Three cartridge nuts center and seal the top of the filter cartridges Tie Rods Three tie rods span the filter cartridge and with the Cartridge Nut hold the elements firmly in place Centering Crosses Three centering crosses prevent the bottom of the cartridge elements from ...

Page 28: ...ge nuts iii If there are existing filter cartridges installed remove them iv Install new filter elements Make certain that the bottom of the cartridge is over the centering cross If the cartridge has a rubber element on each end make certain that it remains in position as you lower the element over the tie rod See Figure 5 14 v Tighten the Cartridge Nuts down on the filter elements Be sure to cent...

Page 29: ...hen under full pressure and re tighten wing nuts as required See Figure 5 17 NOTE Prior to starting a filter element change out it may be desirable to DISMISS the leak detection alarm to prevent process interruption To do this turn the bottom slide switch on the alarm page to ON b Configuration The Filter Housings are configured as two groups of two parallel circuits One circuit handles the recirc...

Page 30: ...hat was in service can be closed Open the air bleed valve on top to remove any residual pressure Then the top cover can be removed to replace the used filter elements c Air Bleed Valves On top of each filter housing is an air bleed valve These permit the housing to fill with water during commissioning See Figure 5 19 d Leak Detector A leak detection system will shut down all pumps and the chiller ...

Page 31: ...isance shut downs from the leak detection system the sensitivity can be adjusted by turning the adjustment know clockwise on the leak detection relay inside the control cabinet See Figure 5 21 f Resin Tanks The WFS 101545 can accommodate three 3 customer supplied resin tanks up to 15 in diameter These tanks interface with the Isolation Valve Sub assembly The interface connection is 1 NPT See figur...

Page 32: ...the leak detecting strip gets wet all of the pumps and chiller will stop SECTION II COMMISSIONING COMMISSIONING Commissioning the system after all of the proper connections and set up have been completed consists primarily of filling the system including all plumbing lines and filter housings with water and bleeding air from the filter housings This is accomplished in the following steps Filling t...

Page 33: ...g level in all of the reservoir chambers is an iterative process It requires starting and stopping pumps until all components in the system are fill with water air has been blead from the filter housings and the system is at equilibrium The description herein assumes that the system is starting with all of the filter housings chiller chambers and process lines empty WARNING Water from the air blee...

Page 34: ...otation is verified correct all other pumps and the chiller will also be correct After verification of pump rotation start Pump One Water is pulled from the Dirty Side chamber and pumped through filter housing 1 or 2 both during commissioning From the filters it goes through the chiller and is returned to the clean side Crack open air bleed valve on Housing 1 Air will start coming out Immediately ...

Page 35: ...alves Start the Pump 2 Water will flow out to the process machine Water from the process machine should drain down into the Lift Station When the water reaches a certain level in the Lift Station reservoir it will pump it back through the Process Return line The Process Circuit is ready to start operation on Filter Housing 3 CAUTION Maintain sufficient water level in the CLEAN SIDE reservoir until...

Page 36: ... These can compensate for evaporation and minor losses due to splashing during process cooling To maintain proper filtration and cooling water should cascade from the Clean Side into the Dirty Side 8 PRESSURE SETTINGS The maximum pressures are limited by two relief valves One valve limits the Process Pressure and the other the Spindle Pressure They are factory set at 75 PSI They can be field adjus...

Page 37: ...37 WFS 101545 Operations Manual FIGURE C8 1 ...

Page 38: ...38 WFS 101545 Operations Manual APPENDIX ...

Page 39: ...4 L3 4 L1 4 L3 4 L2 5 1 3 2 CR3 CR3 CR2 CR1 2 LEAK DETECTOR BLUE BLACK RED BLUE BLACK RED BLUE BLACK RED T3 4 BLUE BLACK L3 4 L1 4 T1 4 T3 4 T1 5 T3 5 11 12 14 13 TB2 TB2 WFS 101545 ELECTRICAL SCHEMATIC WITH PLC V1 SHEET OF 1357 ROUTE 3A BOW NH 03304 HST SPINDLES LLC 7 A REV 1 12 01 2021 DWG No WFS 25003 A SIZE TITLE DRAWN C VALENZE DATE DATE CHKD 3 TO TOUCH SCREEN SHEET 2 GRAPHIC INTERFACE CABLE ...

Page 40: ...C CONTROLLER DROK DC DC 5003MC 5VDC RESITIVITY SENSOR 2 RESITIVITY SENSOR 1 21 22 TB1 TB1 WFS 101545 ELECTRICAL SCHEMATIC WITH PLC V1 SHEET OF 1357 ROUTE 3A BOW NH 03304 HST SPINDLES LLC 7 A REV 2 12 01 2021 DWG No WFS 25003 A SIZE TITLE DRAWN C VALENZE DATE DATE CHKD GRAPHIC INTERFACE CABLE TO PLC SHEET 1 3 24 TO SHEET 3 TO SHEET 3 0 2 3 2 OPTIONAL Leak Sensor 1 4 FLOW SWITCH SPINDLE OPTIONAL 1 4...

Page 41: ...A REV 3 12 01 2021 DWG No WFS 25003 A SIZE TITLE DRAWN C VALENZE DATE DATE CHKD 3 24 TO SHEET 4 TO SHEET 4 0 2 FROM SHEET 2 24 COM FROM SHEET 2 SL 1 SONALERT AUDIBLE ALARM Y4 Y2 Y1 3 A2 C 3 C 2 A2 CHILLER CONTACTOR PUMP 2 CONTACTOR PROCESS A2 C 1 PUMP 1 CONTACTOR RECIRCULATING 2 4 A2 Y2 C 2 A1 A2 Y6 A1 CR 2 Y5 PUMP 3 CONTACTOR SPINDLE CHILLER ZONE 1 SOLENOID ELECTRICAL SCHEMATIC SHEET 3 OF 7 ...

Page 42: ...50 0100C M12 Connector Blue Temperature Transmitter 4 20ma 0 CHILLER RUN PROCESS WATER FLOW PROCESS WATER TEMP C0 04AD 1 ANALOG INPUT FROM SHEET 3 24 FROM SHEET 3 COM 2 CH 1 CH 2 CH 3 CH 4 0 24 V 0 0 0 0 0 Brown WFS 101545 ELECTRICAL SCHEMATIC WITH PLC V1 SHEET OF 1357 ROUTE 3A BOW NH 03304 HST SPINDLES LLC 7 A REV 4 12 01 2021 DWG No WFS 25003 A SIZE TITLE DRAWN C VALENZE DATE DATE CHKD 3 24 TO S...

Page 43: ...WN C VALENZE DATE DATE CHKD 3 24 TO SHEET 2 TO SHEET 3 0 2 3 C0 04AD 1 ANALOG INPUT CBL FLOW CH 2 CBL TEMP Black CH 1 Blue M12 Connector 24 FROM SHEET 4 M12 Connector 0 Blue FTS100 1001 CH 4 0 0 24 V 0 0 0 CH 1 CH 3 CH 2 XTP25N 050 0100C Temperature Transmitter 4 20ma 0 SPINDLE WATER TEMP SPINDLE WATER FLOW FROM SHEET 4 Flow Transmitter 4 20ma 2 COM ELECTRICAL SCHEMATIC SHEET 5 OF 7 ...

Page 44: ...EET 5 1 C2 C3 C4 Y301 Y302 2 Y303 3 Y304 4 WFS 101545 ELECTRICAL SCHEMATIC WITH PLC V1 SHEET OF 1357 ROUTE 3A BOW NH 03304 HST SPINDLES LLC 7 A REV 6 12 01 2021 DWG No WFS 25003 A SIZE TITLE DRAWN C VALENZE DATE DATE CHKD A1 CR 3 A2 CHILLER ZONE 2 SOLENOID ELECTRICAL SCHEMATIC SHEET 6 OF 7 ...

Page 45: ...VALENZE DATE DATE 12 01 2021 CHKD DRAWN WINDOWS PC WITH CLICK PLC PROGRAMING SOFTWARE AND C MORE MICRO PROGRAMING SOFTWARE USB PORT EA MG PGM CBL PROGRAMMING INTERFACE CABLE PLC C0 00DR D SERIAL PORT 1 SERIAL PORT 2 TOUCH SCREEN EA9 T7CL R EA 2CBL GRAPHIC INTERFACE CABLE USB PORT USB TYPE A TO USB TYPE B INTERFACE CABLE PROGRAMMING ONLY ELECTRICAL SCHEMATIC SHEET 7 OF 7 ...

Page 46: ...46 WFS 101545 Operations Manual PLUMBING SCHEMATIC ...

Page 47: ...eaker is off Chiller Freon is low Chiller cycles rapidly Hysteresis setting on controller too small Water Temperature varies significantly Hysteresis setting on controller is too large A particular pump will not start Pump circuit breaker is off Lift Station does not return water No power to Lift Station Internal Float switch failed Water overflows reservoir Float Valves jammed open with debris Re...

Page 48: ... pdf IFM SA4110 Flow Sensors https www ifm com us en product SA4110 Resilite RES 7130 Resistivity Sensor https www servapure com assets images PDF Resilite 20Red Green 20Purity 20Lights pdf Hudson Float Valve http www sharkpw com Upload CPDCategoryDocuments Shark 20Hudson 20 Float 20Valve_1407 pdf http hudsonvalve com products Omron 61F GPN V50 Leak Detection http www ia omron com data_pdf cat 61f...

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