4 - 17
(5) Correction of Step
Step correction method is explained here.
SET PROG
(SET PROG No.)
ENTER
No. of program containing step to be
deleted (m)
(MODIFY=0, NEW=1)
0
ENTER
(MAX)
ENTER
(MIN)
ENTER
Upper limit pressure
level
Lower limit pressure
level
(TIME)
Time point of step added (Ti)
ENTER
(FLOW)
Set flow rate (Fi)
ENTER
(EVENT)
Event code (E1i)
ENTER
Event code (E2i)
ENTER
Event code (E3i)
ENTER
Event code (E4i)
ENTER
2
3
4
5
7
8
1
8
8
8
6
