200 MM WAFER CARRIER INTERFACE
12
INSTALLATION AND USE MANUAL
ENTEGRIS, INC.
Material Information
Material Properties and Equipment
Interface
Material properties can have a direct effect on
equipment interface. The primary properties that
affect equipment interface are dimensional stabil-
ity, static protection and moisture absorption.
Dimensional Stability
Dimensional stability is the ability of a material
to retain consistent dimensions over time. Highly
rigid materials remain dimensionally consistent,
ensuring reliable interface.
Static Protection
Static protection is the ability of a material to avoid
buildup of static charges that may later discharge,
causing damage to devices and causing equipment
to shut down. Materials that offer static protection
prevent static charges from building up, hence
avoiding the problems of electrostatic discharge.
Moisture Absorption
Moisture absorption is the amount of moisture that
a material will absorb. The level of absorption will
directly affect vacuum pump down times.
Applications
Wafer carrier materials can be divided into two
primary categories based on the wafer carrier’s
primary application.
• Wafer transport carriers
• Process wafer carriers
Wafer Transport Carriers
Wafer transport carriers are used to store and
transport wafers throughout the production
process. They offer limited chemical resistance
and should not be used with harsh chemicals.
Standard Material Definitions
STAT-PRO
®
9000 Material
STAT-PRO 9000 black static dissipative material
is a blend of Carbon Nanotube (CNT) enhanced
polyetheretherketone (PEEK
TM
polymer) carbon
compound.
STAT-PRO 3000 Material
STAT-PRO 3000 black static dissipative material
is a blend of PEEK polymer and carbon fiber.
EMSTAT AR+
EMSTAT AR+ is a blend of high-purity
polypropylene with milled carbon fiber.
STAT-PRO 100 Material
STAT-PRO 100 black static dissipative poly prop -
ylene is a blend of polypropylene and pure inert
carbon powder.
Blue Polypropylene
Blue polypropylene is standard polypropylene
with an additive to make the material blue.
MATERIAL PROPERTIES OVERVIEW
Rank
Material
Dimensional
Stability
Static
Protection
Moisture
Absorption
General Interface Comments
1
STAT-PRO 9000
Excellent
Exceptional
Low
The best material available for
reliable interface.
2
STAT-PRO 3000
Excellent
Excellent
Low
The next best material available
for reliable interface.
3
EMSTAT AR+
Poor
Very good
Very low
Good material for reliable
interface.
4
STAT-PRO 100
Poor
Very good
Very low
Poor material for interface, still
widely used.
5
Blue
polypropylene
Poor
None
Very low
Very poor material for
interface.
