200 MM WAFER CARRIER INTERFACE
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL
3
Definitions
Bar end
See “H” bar.
Crossbar
The mass of material connecting the two sides of the carrier at the bar end
of the carrier.
End wall
The wall of the carrier opposite the “H” bar end of the carrier.
Flange
Mass of material on the exterior of a carrier, perpendicular to the side walls.
”H“ bar
The end of the wafer carrier that has only one crossbar and is capable of
elevator equipment interface.
Hole
The area for the pin of another carrier to enter for transferring wafers.
Left side
The left side of the carrier when viewed from the “H” bar end while
positioned on its track.
Overall size
Overall size is measured by length by width by height as shown in the diagram.
Pin height is not included in the height measurement for wafer carriers.
Pin
The mass of material which enters the hole or slot of another carrier for
transferring wafers.
The area in which the wafer is located in the carrier.
Pocket flat
The width of the pocket along the vertical walls at its most narrow distance.
Pocket spacing
The distance between pocket centerlines.
Pocket width
The width of the pocket at its widest distance.
Right side
The right side of the carrier when viewed from the “H” bar end while
positioned on its track.
Track clearance
The unobstructed area between the two carrier sides on the bar end.
Wafer transfer
The act of relocating wafers from one carrier into another.
