200 MM WAFER CARRIER INTERFACE
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL
9
Interface Points:
Wafers Vertical
General Recommendations
Entegris strongly recommends that only the
contact points detailed in this section be used to
locate wafer carriers for vertical wafer handling.
Entegris cannot guarantee reliable equipment
interface if contact points other than the
recommended contact points are used.
Sample Interface Plate
This sample interface plate locates the wafer
carrier with the wafers vertical by using Entegris
recommended interface points. Use of the center
notches provides the most accurate wafer carrier
registration for vertical handling.
Recommended Contact Areas
• A + B + C
Contact Area A
Center Notch
Use of the center notches provides the
most accurate wafer carrier registration
for vertical handling.
D9a, D9b, D9c, D9e
Center Notch Location (#1)
The center of the center notches on 200 mm wafer
carriers, measured from Datum A, are:
• 25 Capacity: 101.6 mm (4.00")
• 26 Capacity: 104.8 mm (4.13")
The center of the center notch may not be at the
center of the track length (#1).
For 25 capacity wafer carriers, the center notches
on the wafer carrier track (Datum B) are located
within 0.3 mm (0.01") of the pocket centerline for
pocket 13.
For 26 capacity wafer carriers, the center notches
on the wafer carrier track (Datum B) are located
within 0.3 mm (0.01") of the centerline of the tooth
between pockets 13 and 14.
Maximum
track length
+ 1.0 mm
(0.04”)
Minimum
6.4 mm
(0.25”)
Minimum
6.4 mm
(0.25”)
Minimum inside track
width (D6a)
25 Capacity
102.1 mm
(4.02”)
26 Capacity
105.3 mm
(4.15”)
9.5 mm
(0.38”)
9.5 mm
(0.38”)
”H“ bar end
Contact Area A
Contact Area B
Contact Area C
D9a
D9b
D9c
D9e
Detail B
Datum B
“H-bar” End
#1
#2
Datum B
Datum A
