200 MM WAFER CARRIER INTERFACE
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL
11
“H” bar End Flanges
Robotic flanges on a wafer carrier “H” bar end
are near the outer edges of the wafer carrier.
This placement is required to avoid interference
with the inside “H” bar surface.
Endwall Handle
Endwall handles are placed towards the center
of the endwall and above the center of gravity of
the carrier.
Top Flanges
Top flanges run along the top length of the wafer
carrier, parallel to the track.
Use of the top flanges for robotic movement and
placement of the wafer carrier is acceptable only
when precise placement is not required.
“H”-bar End Flanges
Endwall Handle
Top Flanges
