200 MM WAFER CARRIER INTERFACE
2
INSTALLATION AND USE MANUAL
ENTEGRIS, INC.
C3
C2
C11
Section E-E
General Terminology and Definitions
This section contains dimensions called out on standard
carrier drawings. These dimensions, as well as general wafer
carrier terms, are defined below.
Number Description
OVERALL DIMENSIONS
A1
Length
A2
Width (with/without flanges) includes stripper rails
A3
Height (excluding pin)
CAPACITY
B1
Pockets per carrier
B2
Pocket spacing
B3
Center distance from the first to last pocket
DETAIL DIMENSIONS
C1
Pocket width
C2
Pocket depth
C3
Pocket flat
C4
Pocket size (inside pocket across to
inside pocket)
MACHINE FIT SPECIFICATIONS
D1
Distance from Datum A to the center line of the
first pocket
D3a
Distance from Datum A to the front of the
“H” bar at the center of the carrier
D3b
Distance from Datum A to the front of the “H”
bar 13 mm (0.5”) from the side of the carrier
D4a
Distance from Datum B to the center line of the
“H” bar
D4b
Distance from Datum B to the center line of the
wafer
D5a
Bar web width
D5b
Bar width
D5c
Distance from Datum A to the front of the
“H” bar web
D6a
Inside width of the bottom track
D6b
Overall width of the “H” bar at the top of the
wafer carrier
D8a
Overall width of the robotic pick-up flanges
D6b
D4a
D6a
D8a
A2
C4
Wafer
D4b
E
E
Section A-A
D1
B2
D3b
-A-
B
B
D3a
B3
-A-
A
A
-B-
A1
A3
D5b
Section B-B
D5c
D5a
