200 MM WAFER CARRIER INTERFACE
6
INSTALLATION AND USE MANUAL
ENTEGRIS, INC.
Four Point Contact
Entegris utilizes a patented four point contact
on the “H” bar end and on the track of most
200 mm wafer carriers. Supporting the carrier
on four specific points eliminates the variation
in herent in trying to maintain a precise dimension
over a long feature such as conventional “H” bar
rails and track.
Contact Location
The location of the four points is shown by the
arrows in the diagram.
Benefits of Four Point Contact
“H” bar
When the carrier is used with the wafers in a
horizontal position, the four point contact ensures
correct wafer orientation and wafer height in
relation to the centerline of the first pocket.
Track
When the carrier is used with the wafers in the
vertical position and located by the center notch on
the carrier track, the four point contact eliminates
rocking to ensure consistent placement of wafers
for vertical transfer.
Equipment Interface
For optimum use on equipment, the portion of
equipment in direct contact with the wafer carrier
(stage and/or “H” bar nest) should be designed to
provide planar support for all four points.
Wafer Carriers Included and Exceptions
Most 200 mm carriers have a four point contact
feature on both the “H” bar end and the track with
the following exceptions:
The Entegris wafer carriers listed below do not
have a four point contact feature on either the “H”
bar end or the track. They should be supported
along the length of the two “H” bar rails with wafers
in the horizontal position or along the length of the
track with wafers in the vertical position.
• A192-81M-0215
• A192-82M-0215
The Entegris wafer carriers listed below have a
four point contact feature on the “H” bar end only.
They do not have a four point contact on the track.
They should be supported along the length of the
track with wafers in the vertical position.
• A192-80M-0215
• A198-80M-47C02
• A198-80MB-47C02
The Entegris wafer carriers listed below have a four
point contact feature on the track only. They do not
have a four point contact on the “H” bar end. They
should be supported along the length of the two “H”
bar rails with wafers in the horizontal position.
• PA192-80M-XXXX
• PA192-80MN-XXXX
• PA195-80M-XXXX
”H“ Bar (for Wafer’s Horizontal Interface)
Datum A
Track (for Wafer’s Vertical Interface)
