200 MM WAFER CARRIER INTERFACE
ENTEGRIS, INC.
INSTALLATION AND USE MANUAL
1
Table of Contents
Overview ............................................ 1
General Terminology and Definitions ......... 2
Definitions .............................................3
Wafer Plane ........................................ 4
Specification Purpose ...............................4
Benefits ................................................4
General Definitions ..................................4
Specification Description ..........................5
Specification Values .................................5
Use with Automated Equipment ..................5
Four Point Contact ................................ 6
Contact Location .....................................6
Benefits of Four Point Contact ....................6
Equipment Interface ................................6
Wafer Carriers Included and Exceptions ........6
General Interface Information .................. 7
Recommended Contact Points ....................6
Print Based Interface Design .....................6
Benefits of Four Point Contact ....................6
Interface Points: Wafers Horizontal ........... 7
General Recommendations ........................7
Sample Interface Plate .............................7
Contact Area A ........................................8
Contact Area B ........................................8
Contact Area C ........................................8
Interface Points: Wafers Vertical .............. 9
General Recommendations ........................9
Sample Interface Plate .............................9
Contact Area A ........................................9
Contact Areas B and C ............................. 10
Interface Points: Robotic Handling ........... 10
General Recommendations ...................... 10
Robotic Handling Features ...................... 10
Endwall Flanges .................................... 10
“H” Bar End Flanges ............................... 11
Endwall Handle ..................................... 11
Top Flanges ......................................... 11
Material Information ............................ 12
Material Properties and
Equipment Interface ........................... 12
Static Protection ................................... 12
Moisture Absorption ............................... 12
Applications ......................................... 12
Wafer Transport Carriers ........................ 12
Process Wafer Carriers ........................... 13
Detailed Material Properties .................. 13
For More Information ........................... 14
Terms and Conditions ........................... 14
Product Warranties .............................. 14
Overview
At Entegris, we are committed to working with you, the equipment
supplier, to provide simple solutions for our joint customers in the
semiconductor industry. Our experience has shown that semiconduc-
tor manufacturers want to order their equipment and their wafer car-
riers without worrying about wafer carrier/equipment interface
issues. By sharing information with you we can provide our joint
customers a compatible equipment and wafer
carrier combination.
