200 MM WAFER CARRIER INTERFACE
8
INSTALLATION AND USE MANUAL
ENTEGRIS, INC.
Contact Area A
When designing an area A interface, use the
following dimensions.
D6a: Inside Width at “H” bar
The interface location should be within 25.4 mm
(1.00") of the crossbar.
D5b: “H” bar WidthTrack
Contact Area B
When designing an area B interface, use the
following information.
D6b: Inside Width at Top (#1)
The interface location should be within 12.7 mm
(0.50") of the top opening of the wafer carrier.
Four Point “H” Bar Contact
Ensure the wafer carrier is supported only on the
four points of the “H” bar contact to ensure proper
height to pocket (D1). Please see page 7 for more
information.
Contact Area C
When designing an Area C interface, use the
following dimensions.
D6a: Inside Track Width
D4a: Cross Bar Centerline
The interface location should be within 9.5 mm
(0.38") of the wafer carrier track.
Four Point “H” Bar Contact
Ensure the wafer carrier is supported only on
the four points of the “H” bar contact to ensure
proper height to pocket (D1). Please see page 7
for more information.
25.4 mm
(1.00”)
25.4 mm
(1.00”)
D6a
D5b
D6b
12.7 mm
(0.50”)
maximum
D6a
9.52 mm
(0.375”)
D4a
