Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
P/N 8040613
1-1
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Section 1 - Cryo-Torr Cryopump Description
Introduction
Cryo-Torr High-Vacuum Pumps, shown in Figures 1-1 and 1-2, are one of
the two major components that make up the Cryo-Torr High-Vacuum
Pumping System. The second component is the Compressor. Instructions
for the compressor are contained in each compressor manual.
The Cryo-Torr High-Vacuum Pump provides fast, clean pumping of all
gases in the 10
-3
to 10
-9
torr range. The cryopump operates on the principle
that gases can be condensed and held at extremely low vapor pressures,
achieving high speeds and throughputs, as described in Tables
1-1 - 1-8.
Your Cryo-Torr High-Vacuum Pump is a highly-reliable and rugged unit
that requires a minimum of servicing. Since the cryopump exposes no
moving parts, operating fluids, or backing pumps to the vacuum, the
possibility of system or process contamination from the cryopump itself is
eliminated.
Installation, Operation, and Service Instructions
Installation, Operation and Maintenance Instructions for your Cryo-Torr
vacuum pump provides easily accessible information. All personnel with
installation, operation, and servicing responsibilities should become
familiar with the contents of these instructions to ensure safe, reliable
cryopump performance.
