Cryo-Torr High-Vacuum Pump Installation, Operation and Maintenance Instructions
P/N 8040613
3-1
C
HELIX TECHNOLOGY CORPORATION
-
TI
CRYOGENICS
Section 3 - Regeneration
Introduction
A Cryo-Torr cryopump periodically requires a regeneration cycle to return
it to its original operating capabilities.
Gases captured from a vacuum chamber and trapped in the cryopump
through condensation and cryo-adsorption are held primarily in an ice-like
form. A regeneration cycle removes trapped gases through a process
similar to defrosting a refrigerator freezer compartment.
During a regeneration cycle, the cryopump is warmed to room temperature
or higher, allowing trapped gases to change from a solid state to a gaseous
state and thereby released from the cryopump through the pressure relief
valve to the atmosphere.
WARNING
If toxic, corrosive, or flammable gases are pumped, a vent pipe must
be connected to the cryopump relief valve and directed to a safe
location.
When to Regenerate
The need to regenerate the Cryo-Torr high-vacuum pump as a result of
saturation is a function of the cryopump capacity and the process gas
throughput.
If the cryopump becomes incapable of maintaining a high-vacuum
(typically an increase in your vacuum chamber base pressure by a factor of
10, even though the cold head and compressor unit are operating
satisfactorily), the cryopump requires regeneration.
It is recommended that your cryopump be regenerated on a regular
schedule coinciding with system maintenance, weekend system shutdown,
etc. A suitable time interval between regeneration cycles can be
determined from experience.
